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IST Project 027152 ATOMICS
Advanced Front-End Technology Modeling for Ultimate Integrated Circuits Public ATOMICS WorkshopA Public ATOMICS Workshop was organized on March 19, 2009 at Synopsys Switzerland LLC in Zurich. In this public workshop, the partners of the ATOMICS consortium presented the developed models and their implementation in Sentaurus Process to TCAD users.Workshop AnnouncementThe announcement of the workshop was distributed by Synopsys to companies and research institutes cooperating with ATOMICS and to the customers of Synopsys.Slides ShownIntroduction (Fraunhofer-IISB, 152 KB)Fluorine Diffusion and Clustering (Univ. Newcastle/Synopsys 387 KB) Arsenic Activation (Fraunhofer-IISB/Synopsys, 2.26 MB) EOR Defects, Boron Trapping at EPR Defects, TED in SOI (Synopsys/CNRS-LAAS, 2.66 MB) Stress and Strain Effects on Activation/Diffusion (Univ. Newcastle, 632 KB) Vacancy Engineering (Univ. Newcastle, 743 KB) SOI Test Application (STM-France, 673 KB)
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