The focus is put on the development and improvement of new manufacturing equipment and the corresponding methods and processes as well as their implementation in industrial production. Great importance is attached to issues of yield and throughput optimization, process compatibility, contamination, safety, environmentally friendly production, and optimization of resources. Process automation, pre-qualification of equipment, analytics in the IISB analytical laboratory (accredited according to ISO 17025) for micro- and nanotechnology as well as integrated and virtual metrology are possible fields of application.