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Working Groups
Fraunhofer Institute for Integrated Systems and Device Technology
Apart from single process control, the complex process of semiconductor manufacturing makes high demands on planning, manufacturing execution control, logistics, and quality control. Therefore, focal areas of the manufacturing techniques group are control techniques, which are applicable to process sequences, for process adaptation and stabilization as well as for quality and product monitoring with regard to flexible manufacturing.
The cost-effectiveness of semiconductor manufacturing is crucially dependent on reliably high process quality and the utilization of expensive equipment. Therefore, advanced techniques in metrology and control engineering as developed and offered by the equipment automation group are essential for comprehensive equipment control and continuous quality control.
A high yield is the first priority of every device process. With feature sizes shrinking, thinner layers, new materials, and more complex designs, contamination control is a constant challenge.
