Manufacturing Control and Productivity
Fraunhofer Institute for Integrated Systems and Device Technology
The cost-effectiveness of semiconductor manufacturing is crucially dependent on reliably high process quality and the utilization of expensive equipment. Therefore, advanced techniques in metrology and control engineering as developed and offered by the equipment automation group are essential for comprehensive equipment control and continuous quality control. The range of services includes the conception and implementation of solutions for the integration of metrology, e. g. in-line or in situ, and control techniques ranging from a simple PID solution to advanced fuzzy and neural techniques.