Technology Simulation
Fraunhofer Institute for Integrated Systems and Device Technology
In the department technology simulation physical models and powerful simulation programs for the optimization of individual processes and process sequences in semiconductor technology are developed and transferred to application. Furthermore, the development of processes, components, and circuits is supported by simulation. Special competence exists in the field of mask design and device development by predictive lithography simulation. Special emphasis is placed on the combination of electric, thermal, and mechanic simulations.
