Cleanroom laboratories

Fraunhofer Institute for Integrated Systems and Device Technology

Cleanroom laboratories of IISB and LEB

The Fraunhofer IISB possesses about 500 m2 own cleanroom space.

In addition,  the large cleanroom hall of the University of Erlangen-Nuremberg is operated jointly by IISB and the Chair of Electron Devices (LEB). This cleanroom building of LEB comprises 600 m2 of class-10 and 400 m2 of class-1000 lab area. Modern equipment offers excellent conditions for high-class research in micro and nanoelectronics. Extensive processing technology allows CMOS compatible processing steps for the development of test structures and electron devices in 150 mm silicon technology. Several processing steps are available for wafer sizes up to 300 mm. Moreover, there is a pilot line for the manufacturing of devices on silicon carbide.

Research activities are carried out in the fields of semiconductor technology, nanotechnology, semiconductor manufacturing equipment and methods, and process and device simulation. This is complemented by the IISB work on power electronics and crystal growth.