Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie IISB
Fraunhofer IISB Lithography Simulation Workshop 2023
Veranstaltungsdetails
Veranstaltungsort
Behringersmühle
Datum
25. Mai 2023 - 27. Mai 2023
Diffraction cone of mask aligner simulated with Dr.LiTHO
Near field inside opening between EUV mask absorbers simulated with Dr.LiTHO
The 18th Fraunhofer IISB lithography simulation workshop will bring together experts from various fields of lithography simulation and related areas including computational optics, photochemistry, semiconductor processing /metrology and applied artificial intelligence.
The workshop will host about 40 attendees from academics and industry. The invited talks will present reviews on recent developments and applications of computational lithography, description of novel methods to address lithography-related problems and discuss selected unresolved problems.
In addition to presentations by international experts in semiconductor lithography, the workshop provides excellent opportunities for invited PhD students to present their research work and to exchange ideas and discuss results and developments in advanced lithography. An archive with the program flyers of previous workshops can be found here.
The workshop will take place in Behringersmühle from May 25-27, 2023. The location in the heart of Franconian Switzerland about 50 km north of Nuremberg is ideal for networking. The workshop will focus on the following topics:
- Computational EUV lithography: 3D mask, high NA and stochastic effects, resolution enhancement techniques, novel resist materials and phenomena
- Computational metrology and imaging for lithography: Deep learning and related techniques, mask characterization, hybrid optical models, SEM modeling, big data and novel methods for process characterization
- Modeling challenges and solutions for lithography applications beyond CMOS: 3D lithography and gray tone techniques for micro- and nanooptics, Si-photonics, bio-sensing, MEMS, ...
Updates will be provided via our mailing list. If you would like to subscribe to the list, please send an e-mail to Andreas Erdmann.
Registration: The event is fully booked.