In the field of contamination control we are developing or adapting analytical methods and sample preparation methods to provide emerging solutions for our partners. More Moore as well as More-than-Moore applications are being addressed. With feature sizes shrinking, thinner layers, new materials, 3D integration and more complex designs, contamination control is a constant challenge and a prerequisite for a continuous quality control and achieving high yields in the manufacturing processes.
Our focus is the developement of advanced contamination control methods for yield enhancement. Solutions for characterizing wafers, processes, media, materials, and equipment concerning their contamination behavior, for determining contamination sources, and for certifying cleanroom suitability are being developed together with partners. The characterization methods include the analysis of organic, inorganic and particulate contamination.
Furthermore, a test capabilities for the assessment of sensors or other electronic systems under various atmospheric conditions -even evaluations in harmful atmospheres - are being developed.
Faunhofer IISB provides services in the fields of physical, chemical and physico-chemical, and chemical analysis for micro- and nanotechnology. Fraunhofer IISB offers customer support, process optimization and development of novel processes.
Reference samples are prepared in ultra clean environment and have defined surface metal contamination or defined concentration of particles.
Highly complex manufacturing chains, like for semiconductor devices, reveal several challenges in the areas of planning and controlling of the manufacturing, as well as logistics and factory wide quality control. In the field of controlling we are developing flexible manufacturing planning methodologies and control concepts to optimize the full process chain regarding productivity, costs and energy consumption. Focus areas are factory wide closed loop control concepts (feed forward and feedback), logistical optimization strategies, on-demand side management for energy efficiency improvement and fab wide automation aspects including ultra-thin wafer handling. All these research activities are oriented towards predictive manufacturing chains and are considering the internet of things (IoT) topics on factory level.
Our services are dedicated to the full process chain of semiconductor manufacturing and other related industries and are addressing all relevant Key Performance Indicators (KPIs), e. g. energy consumption, throughput, cycle time, costs and on-time delivery: