Inorganic thin films for large-area coating and printing are provided for functional electrodes and electronic applications.
Besides facile and low-cost processing, low temperature drying and conversion is a major research goal, making the films applicable to a wide range of substrates.
The targetted application fields functionalities include
- transparent conductive films, injection layers, insulators, encapsulants
- energy systems
- capacitor stacks, battery electrodes
- integrated thin-film sensorics and electronics for industrial and automotive electronics, wearables / sports gear, and energy electronics
- semiconductors, insulators, and conductors for thin-film transistors, functional films/stacks for resistive sensors or charge sensing devices
Research on thin-film materials is centered around the versatile chemical routes for the synthesis and deposition of metal oxide materials. Alternative materials systems as polymer or nanoparticle-based silicon, organic-inorganic compounds, and nanoscale metals round out the portfolio for serving manifold requests.
The extensive cleanroom facilities of IISB offer a broad range of conventional chemical (PECVD, ALD, LPCVD) and physical (Sputtering, e-beam evaporation) vapor deposition techniques for complementary referencing and benchmarking of materials and layer systems.