Fraunhofer Institute for Integrated Systems and Device Technology IISB

Publications Semiconductor Devices

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2024

Jahr Year	Titel/Autor:in Title/Author	Publikationstyp Publication Type
2024	Analysis and Design of an SiC CMOS Three-Channel DC-DC Synchronous Buck Converter for High-Temperature Applications Martinez, Andres; Torres, Felipe; Marin, Jorge; Rojas, Christian A.; Gak, Joel; Rommel, Mathias; May, Alexander; Wilson-Veas, Alan H.; Miguez, Matias; Rossi, Chiara; Schraml, Michael; Calarco, Nicolas	Zeitschriftenaufsatz Journal Article
2024	Performance and Understanding of 4H-SiC Electron Devices at Low Temperature Range Benedetto, Luigi Di; Rinaldi, Nicola; Licciardo, Gian Domenico; Liguori, Rosalba; Rubino, Alfredo; May, Alexander; Rommel, Mathias	Konferenzbeitrag Conference Paper
2024	Novel Rapid and Deposition-Free Strategy for FIB Cross-Section Preparation Beuer, Susanne; Rommel, Mathias	Konferenzbeitrag Conference Paper
2024	Recent insights and improvements in the "flying cube"-strategy for FIB cross-sectioning Beuer, Susanne; Yokosawa, Tadahiro; Apeleo Zubiri, Benjamin; Spiecker, Erdmann; Rommel, Mathias	Poster
2024	Device Modeling of 4H-SiC PIN Photodiodes with Shallow Implanted Al Emitters for VUV Sensor Applications Schraml, Michael; Rommel, Mathias; Papathanasiou, Niklas; Erlbacher, Tobias	Zeitschriftenaufsatz Journal Article
2024	Simulation-Guided Analysis towards Trench Depth Optimization for Enhanced Flexibility in Stretch-Free, Shape-Induced Interconnects for Flexible Electronics Joch, Daniel; Lang, Thomas; Sanctis, Shawn; Jank, Michael P.M.	Zeitschriftenaufsatz Journal Article
2024	Novel rapid and deposition-free strategy for FIB cross-section preparation Beuer, Susanne; Rommel, Mathias	Poster
2024	Anisotropic stress observation of 4H‐SiC trench metal‐oxide semiconductor field‐effect transistor test structures by scanning near‐field optical Raman microscope Yoshikawa, Masanobu; Murakami, Masataka; Ushida, Tomoyuki; Samejima, Junichiro; Mitsuzawa, Kana; Matoba, Nobuhiro; Lim, Minwho; Rusch, Oleg; Rommel, Mathias	Zeitschriftenaufsatz Journal Article
2024	Investigation of CMOS Single Process Steps on 4H-SiC a-Plane Wafers for Quantum Applications Schwarberg, Jannik H.; Karhu, Robin; Kallinger, Birgit; Rommel, Mathias; Schmidt, Robin; Schulze, Jörg	Konferenzbeitrag Conference Paper
2024	Adhesion strength of ductile thin film determined by cross-sectional nanoindentation Zhao, Dawei; Letz, Sebastian; Jank, Michael; März, Martin	Zeitschriftenaufsatz Journal Article
2024	Precise Compensation of Device Variability in IGZO‐based Ferroelectric Thin‐Film Transistors for Enhanced Transparent Display Performance Joch, Daniel; Lehninger, David; Sunil, Athira; Sanctis, Shawn; Lang, Thomas; Zeltner, Johannes; Wartenberg, Philipp; Seidel, Konrad; Jank, Michael	Zeitschriftenaufsatz Journal Article
2024	A 4H-SiC CMOS Technology enabling Smart Sensor Integration and Circuit Operation above 500 °C May, Alexander; Rommel, Mathias; Baier, Leander; Schraml, Michael; Dick, Jan F.; Jank, Michael; Schulze, Jörg	Konferenzbeitrag Conference Paper
2024	Concept for a GaN-Based Intelligent Motor Controller with Integrated Failure Prediction for the Inverter and the Drive Blechinger, Christoph; Schellenberger, Martin; Hofmann, Maximilian; Mensing, Michael; Gensch, Marc; Westerhoff, David; Stanitzki, Alexander; Barylla, Patrick; Kapels, Holger; Krupp, Lukas; Lüdecke, Andre	Konferenzbeitrag Conference Paper
2024	An analog to digital converter in a SiC CMOS technology for high-temperature applications Mo, Jiarui; Niu, Yunfan; May, Alexander; Rommel, Mathias; Rossi, Chiara; Romijn, Joost; Zhang, Guoqi; Vollebregt, Sten	Zeitschriftenaufsatz Journal Article
2024	Defects distribution and evolution in selected-area helium ion implanted 4H–SiC Song, Ying; Xu, Zongwei; Rommel, Mathias; Astakhov, Georgy V.; Hlawacek, Gregor; Fang, Fengzhou	Zeitschriftenaufsatz Journal Article
2024	A 4H-SiC CMOS SPICE Level 3 Model for Circuit Simulations Rinaldi, Nicola; May, Alexander; Rommel, Mathias; Liguori, Rosalba; Rubino, Alfredo; Licciardo, Gian Domenico; Benedetto, Luigi Di	Zeitschriftenaufsatz Journal Article
2024	A 4H-SiC NMOSFET-based temperature sensor operating between 14K and 481K Rinaldi, Nicola; May, Alexander; Rommel, Mathias; Liguori, Rosalba; Rubino, Alfredo; Licciardo, Gian Domenico; Benedetto, Luigi di	Zeitschriftenaufsatz Journal Article
2024	An end-to-end machine learning approach with explanation for time series with varying lengths Schneider, Manuel; Greifzu, Norbert; Wang, Lei; Walther, Christian; Wenzel, Andreas; Li, Pu	Zeitschriftenaufsatz Journal Article

Diese Liste ist ein Auszug aus der Publikationsplattform Fraunhofer-Publica

This list has been generated from the publication platform Fraunhofer-Publica

2023

Jahr Year	Titel/Autor:in Title/Author	Publikationstyp Publication Type
2023	A 4H-SiC CMOS Oscillator-Based Temperature Sensor Operating from 298 K up to 573 K Rinaldi, Nicola; Liguori, Rosalba; May, Alexander; Rossi, Chiara; Rommel, Mathias; Rubino, Alfredo; Licciardo, Gian Domenico; Di Benedetto, Luigi	Zeitschriftenaufsatz Journal Article
2023	Intragranular thermal fatigue of Cu thin films: Near-grain boundary hardening, strain localization and voiding Hlushko, K.; Ziegelwanger, T.; Reisinger, M.; Todt, J.; Meindlhumer, M.; Beuer, Susanne; Rommel, Mathias; Greving, I.; Flenner, S.; Kopeček, J.; Keckes, J.; Detlefs, C.; Yildirim, C.	Zeitschriftenaufsatz Journal Article
2023	Towards SiC-Based VUV Pin-Photodiodes - Investigations on 4H-SiC Photodiodes with Shallow Implanted Al Emitters Schraml, Michael; Papathanasiou, Niklas; May, Alexander; Weiss, Tilman; Erlbacher, Tobias	Zeitschriftenaufsatz Journal Article
2023	Investigating HCI and BTI degradation in 4H-SiC CMOS Lange, André; Winkler, Sophie; Ortstein, Katrin; May, Alexander; Rommel, Mathias	Poster
2023	CMOS-compatible manufacturability of sub-15 nm Si/SiO2/Si nanopillars containing single Si nanodots for single electron transistor applications Borany, Johannes von; Engelmann, Hans-Jürgen; Heinig, Karl-Heinz; Amat, Esteve; Hlawacek, Gregor; Klüpfel, Fabian J.; Hübner, René; Möller, Wolfhard; Pourteau, Marie-Line; Rademaker, Guido; Rommel, Mathias; Baier, Leander; Pichler, Peter; Perez-Murano, Francesc; Tiron, Raluca	Zeitschriftenaufsatz Journal Article
2023	Ferroelectric Content-Addressable Memory Cells with IGZO Channel: Impact of Retention Degradation on the Multibit Operation Sk, Masud Rana; Thunder, Sunanda; Lehninger, David; Raffel, Yannick; Lederer, Maximilian; Jank, Michael; Kämpfe, Thomas; De, Sourav; Chakrabarti, Bhaswar	Zeitschriftenaufsatz Journal Article
2023	A Highly Linear Temperature Sensor Operating up to 600°C in a 4H-SiC CMOS Technology Mo, Jiarui; Li, Jinglin; Zhang, Yaqian; Romijn, Joost; May, Alexander; Erlbacher, Tobias; Zhang, Guoqi; Vollebregt, Sten	Zeitschriftenaufsatz Journal Article
2023	Growth and characterization of thorium-doped calcium fluoride single crystals Beeks, Kjeld; Sikorsky, Tomas; Rosecker, Veronika; Pressler, Martin; Schaden, Fabian; Werban, David; Hosseini, Niyusha Lajevardi; Rudischer, Lukas; Schneider, Felix; Berwian, Patrick; Friedrich, Jochen; Hainz, Dieter; Welch, Jan Matthew; Sterba, Johannes H.; Kazakov, George A.; Schumm, Thorsten	Zeitschriftenaufsatz Journal Article
2023	Stiffness influence on particle separation in polydimethylsiloxane-based deterministic lateral displacement devices Marhenke, Julius; Dirnecker, Tobias; Vogel, Nicolas; Rommel, Mathias	Zeitschriftenaufsatz Journal Article
2023	Author Correction: Highly accurate determination of heterogeneously stacked Van-der-Waals materials by optical microspectroscopy (Scientific Reports, (2020), 10, 1, (13676), 10.1038/s41598-020-70580-3) Hutzler, Andreas; Fritsch, Birk; Matthus, Christian David; Jank, Michael; Rommel, Mathias	Erratum
2023	The Influence of Extended Defects in 4H-SiC Epitaxial Layers on Gate Oxide Performance and Reliability Schlichting, Holger; Lim, Minwho; Becker, Tom; Kallinger, Birgit; Erlbacher, Tobias	Aufsatz in Buch Book Article
2023	Microfabricated albedo insensitive sun position sensor system in silicon carbide with integrated 3D optics and CMOS electronics Romijn, Joost; Vollebregt, Sten; Bie, Vincent G. de; Middelburg, Luke M.; El Mansouri, Brahim; Zeijl, Henk W. van; May, Alexander; Erlbacher, Tobias; Leijtens, Johan A.P.; Zhang, Guoqi; Sarro, Pasqualina Maria	Zeitschriftenaufsatz Journal Article
2023	Study on Estimation of Device Yield in Non-Epitaxial 4H-SiC Material Relating to Defect Densities Influencing Bipolar Degradation with XRT- Measurements Jayaprakash, H.; Csato, Constantin; Erlbacher, Tobias; Kranert, Christian; Krippendorf, Florian; Wimmer, Paul; Reimann, Christian; Rüb, Michael	Aufsatz in Buch Book Article
2023	Unconventional conductivity increase in multilayer black phosphorus Koleśnik-Gray, Maria M.; Meingast, Laura; Siebert, Martin; Unbehaun, Tim; Huf, Tobias; Ellrott, Günter; Abellán, G.; Wild, Stefan; Lloret, Vicent; Mundloch, Udo; Schwarz, Julian; Niebauer, Michael; Szabo, Maximilian; Rommel, Mathias; Hutzler, Andreas; Hauke, Frank; Hirsch, Andreas; Krstić, Vojislav	Zeitschriftenaufsatz Journal Article
2023	Tailoring the Acidity of Liquid Media with Ionizing Radiation: Rethinking the Acid-Base Correlation beyond pH Fritsch, Birk; Körner, Andreas; Couasnon, Thaïs; Blukis, Roberts; Taherkhani, Mehran; Benning, Liane G.; Jank, Michael; Spiecker, Erdmann; Hutzler, Andreas	Zeitschriftenaufsatz Journal Article
2023	On the interpretation of confocal spectral depth profiling of color center and carrier concentration by photoluminescence and Raman of implanted 4H-SiC Song, Ying; Xu, Zongwei; Rommel, Mathias	Zeitschriftenaufsatz Journal Article
2023	Combining Full Wafer Inspection with Deep Learning to Recognize Wafers with Critical Defects Anger, Sabrina; Yayak, Anil Bora; Roeder, Georg; Schellenberger, Martin; Sipőcz, Tamas; Alcaire, Thomas; Le Cunff, Delphine; Nagy, Máté	Konferenzbeitrag Conference Paper
2023	A Modeling of 4H-SiC Super-Junction MOSFETs with Filtered High Energy Implantation Lim, Minwho; Csato, Constantin; Förthner, Julietta; Rusch, Oleg; Ehrensberger, Kevin; Kupfer, Barbara; Beuer, Susanne; Oertel, Susanne; Byun, Dong-Wook; Kim, Seongjun; Koo, Sang-Mo; Shin, Hoon-Kyu; Erlbacher, Tobias	Zeitschriftenaufsatz Journal Article
2023	Adjustable Current Limiting Function With a Monolithically Integrated SiC Circuit Breaker Device Takamori, Taro; Wada, Keiji; Boettcher, Norman; Erlbacher, Tobias; Saito, Wataru; Nishizawa, Shinichi	Zeitschriftenaufsatz Journal Article
2023	Towards Unveiling the Mystery of Electron-Liquid Interaction in Liquid-Phase TEM: Implications for Practical Application Fritsch, Birk; Körner, Andreas; Couasnon, Thäis; Blukis, Roberts; Benning, Liane; Jank, Michael; Spiecker, Erdmann; Hutzler, Andreas	Zeitschriftenaufsatz Journal Article
2023	Highly Efficient Floating Field Rings for SiC Power Electronic Devices - A Systematic Experimental Study Broderick, Lirong Z.; Moult, Jonathan; Rusch, Oleg; Tong, Tong; Erlbacher, Tobias; Corcoran, Yunji L.	Aufsatz in Buch Book Article
2023	Low-power vertically stacked one time programmable multibit IGZO-based BEOL compatible ferroelectric TFT memory devices with lifelong retention for monolithic 3D-inference engine applications De, Sourav; Thunder, Sunanda; Lehninger, David; Jank, Michael; Lederer, Maximilian; Raffel, Yannick; Seidel, Konrad; Kämpfe, Thomas	Aufsatz in Buch Book Article
2023	Proven Power Cycling Reliability of Ohmic Annealing Free SiC Power Device Through the Use of SmartSiC™ Substrate Guiot, Eric; Allibert, Frédéric; Leib, Jürgen; Becker, Tom; Schwarzenbach, Walter; Hellinger, Carsten; Erlbacher, Tobias; Rouchier, Séverin	Aufsatz in Buch Book Article
2023	A DC SPICE Level 3 Model for 4H-SiC lateral NMOSFET under strong inversion conditions Rinaldi, Nicola; Licciardo, Gian Domenico; Benedetto, Luigi di; Rommel, Mathias; Erlbacher, Tobias	Konferenzbeitrag Conference Paper
2023	Correlating Optical Microspectroscopy with 4×4 Transfer Matrix Modeling for Characterizing Birefringent Van der Waals Materials Schwarz, Julian; Niebauer, Michael; Koleśnik‐Gray, Maria; Szabo, Maximilian; Baier, Leander; Chava, Phanish; Erbe, Artur; Krstić, Vojislav; Rommel, Mathias; Hutzler, Andreas	Zeitschriftenaufsatz Journal Article
2023	Optimization over decision trees: a case study for the design of stable direct-current electricity networks Gutina, Daria; Bärmann, Andreas; Roeder, Georg; Schellenberger, Martin; Liers, Frauke	Zeitschriftenaufsatz Journal Article
2023	4H-SiC PIN Photodiode for VUV Detection Using an Enhanced Emitter Doping Design Schraml, Michael; Papathanasiou, Niklas; May, Alexander; Rommel, Mathias; Erlbacher, Tobias	Konferenzbeitrag Conference Paper
2023	Increasing flow rates in polydimethylsiloxane-based deterministic lateral displacement devices for sub-micrometer particle separation Marhenke, Julius; Dirnecker, Tobias; Vogel, Nicolas; Rommel, Mathias	Zeitschriftenaufsatz Journal Article
2023	Goethite Mineral Dissolution to Probe the Chemistry of Radiolytic Water in Liquid-Phase Transmission Electron Microscopy Couasnon, Thaïs; Fritsch, Birk; Jank, Michael; Blukis, Roberts; Hutzler, Andreas; Benning, Liane G.	Zeitschriftenaufsatz Journal Article
2023	Threshold Voltage Adjustment on 4H-SiC MOSFETs Using P-Doped Polysilicon as a Gate Material May, Alexander; Rommel, Mathias; Abbasi, Affan; Erlbacher, Tobias	Zeitschriftenaufsatz Journal Article

Diese Liste ist ein Auszug aus der Publikationsplattform Fraunhofer-Publica

This list has been generated from the publication platform Fraunhofer-Publica

2022

Jahr Year	Titel/Autor:in Title/Author	Publikationstyp Publication Type
2022	Embedding Solutions for vertical SiC and GaN Power Devices Bach, Hoang Linh; Huang, Anqi; Teng, Yue; Rauh, Hubert; Schletz, Andreas; Jank, Michael P. M.; März, Martin	Konferenzbeitrag Conference Paper
2022	Radiolysis-Driven Evolution of Gold Nanostructures - Model Verification by Scale Bridging In Situ Liquid-Phase Transmission Electron Microscopy and X-Ray Diffraction Fritsch, Birk; Zech, Tobias Sebastian; Bruns, Mark Peter; Körner, Andreas; Khadivianazar, Saba; Wu, Mingjian; Zargar Talebi, Neda; Virtanen, Sannakaisa; Unruh, Tobias; Jank, Michael; Spiecker, Erdmann; Hutzler, Andreas	Zeitschriftenaufsatz Journal Article
2022	Aluminum Activation in 4H-SiC Measured on Laterally Contacted MOS Capacitors with a Buried Current-Spreading Layer Mletschnig, Kristijan Luka; Rommel, Mathias; Pobegen, Gregor; Schustereder, Werner; Pichler, Peter	Konferenzbeitrag Conference Paper
2022	Low-Temperature and UV Irradiation Effect on Transformation of Zirconia -MPS nBBs-Based Gels into Hybrid Transparent Dielectric Thin Films Musat, V.; Herbei, E.E.; Anghel, E.M.; Jank, Michael; Oertel, Susanne; Timpu, D.; Frangu, L.	Zeitschriftenaufsatz Journal Article
2022	Integrated Digital and Analog Circuit Blocks in a Scalable Silicon Carbide CMOS Technology Romijn, J.; Vollebregt, S.; Middelburg, L.M.; El Mansouri, B.; Zeijl, H.W. van; May, Alexander; Erlbacher, Tobias; Zhang, G.; Sarro, P.M.	Zeitschriftenaufsatz Journal Article
2022	Ultrathin and flexible sensors for pressure and temperature monitoring inside battery cells Dreher, Vincent; Joch, Daniel; Kren, Harald; Schwarberg, Jannik H.; Jank, Michael P.M.	Konferenzbeitrag Conference Paper
2022	Visible Blind Quadrant Sun Position Sensor in a Silicon Carbide Technology Romijn, Joost; Vollebregt, Sten; May, Alexander; Erlbacher, Tobias; Zeijl, Henk W. van; Leijtens, Johan; Zhang, Guoqi; Sarro, Pasqualina M.	Konferenzbeitrag Conference Paper
2022	Cognitive Power Electronics for Smart Drives in Unmanned Aerial Vehicles Huf, Tobias; Roeder, Georg; Schellenberger, Martin; Lorentz, Vincent R.H.; Steinmetz, Harm-Friedrich	Konferenzbeitrag Conference Paper
2022	Sub-Kelvin thermometry for evaluating the local temperature stability within in situ TEM gas cells Fritsch, Birk; Wu, Mingjian; Hutzler, Andreas; Zhou, Dan; Spruit, Ronald; Vogl, Lilian; Will, Johannes; Perez Garza, H. Hugo; März, Martin; Jank, Michael; Spiecker, Erdmann	Zeitschriftenaufsatz Journal Article
2022	Fabrication Aspects and Switching Performance of a Self-Sensing 800 V SiC Circuit Breaker Device Boettcher, Norman; Takamori, Taro; Wada, Keiji; Saito, Wataru; Nishizawa, Shin-ichi; Erlbacher, Tobias	Konferenzbeitrag Conference Paper
2022	Cognitive Power Electronics - An Enabler for Smart Systems Schellenberger, Martin; Lorentz, Vincent; Eckardt, Bernd	Konferenzbeitrag Conference Paper
2022	Integrated 64 pixel UV image sensor and readout in a silicon carbide CMOS technology Romijn, Joost; Vollebregt, Sten; Middelburg, Luke M.; Mansouri, Brahim El; Zeijl, Henk W. van; May, Alexander; Erlbacher, Tobias; Leijtens, Johan A.P.; Zhang, Guoqi; Sarro, Pasqualina Maria	Zeitschriftenaufsatz Journal Article
2022	A Study of High Resistivity Semi-Insulating 4H-SiC Epilayers Formed via the Implantation of Germanium and Vanadium Renz, A.B.; Vavasour, O.J.; Rommel, Mathias; Baker, G.W.C.; Gammon, P.M.; Dai, T.; Li, F.; Antoniou, M.; Mawby, P.A.; Shah, V.A.	Konferenzbeitrag Conference Paper
2022	Short Circuit Performance and Current Limiting Mode of a Monolithically Integrated SiC Circuit Breaker for DC Applications up to 800 v Böttcher, Norman; Takamori, Taro; Wada, Keiji; Saito, Wataru; Nishizawa, Shinichi; Erlbacher, Tobias	Konferenzbeitrag Conference Paper
2022	Mechanisms of ohmic contact formation of Ti/Al-based metal stacks on p-doped 4H-SiC Kocher, Matthias; Rommel, Mathias; Michalowski, P.; Erlbacher, Tobias	Zeitschriftenaufsatz Journal Article
2022	Proven Power Cycling Reliability of SmartSiC™ Substrate for Power Devices Guiot, Eric; Picun, Gonzalo; Allibert, Frederic; Leib, Jürgen; Becker, Tom; Schwarzenbach, Walter; Drouin, Alexis; Béthoux, Jean-Marc; Widiez, Julie; Rouchier, Severin; Erlbacher, Tobias	Konferenzbeitrag Conference Paper
2022	Influence of Non-Stoichiometric Silicon Nitride Layer Thickness on Electrical Properties and Manufacturability of 900 V Silicon RC-Snubbers Becker, Tom; Böttcher, Norman; Erlbacher, Tobias	Konferenzbeitrag Conference Paper
2022	Homoepitaxial growth and defect characterization of 4H-SiC Kallinger, Birgit; Kranert, Christian; Schade, Zara Mercedes; Rommel, Mathias; Berwian, Patrick	Meeting Abstract
2022	CMOS compatible manufacturing of a hybrid SET-FET circuit Moral, Alberto del; Amat, E.; Engelmann, Hans-Jürgen; Pourteau, Marie-Line; Rademaker, Guido; Quirion, D.; Torres-Herrero, N.; Rommel, Mathias; Heinig, Karl Heinz H.; Borany, Johannes von; Tiron, Raluca; Bausells, Joan; Perez-Murano, Francesc	Zeitschriftenaufsatz Journal Article
2022	Integration of a humidity sensor with power electronic applications Chen, Weiyi; Berwald, Alexander; Hauke, Alicia; Zimmermann, Victoria; Bayer, Christoph; Jank, Michael	Konferenzbeitrag Conference Paper
2022	Via Size-Dependent Properties of TiAl Ohmic Contacts on 4H-SiC May, Alexander; Rommel, Mathias; Beuer, Susanne; Erlbacher, Tobias	Konferenzbeitrag Conference Paper
2022	Adjustable Current Limit Feature with a Self-Sensing and Self-Triggering Monolithically Integrated SiC Circuit Breaker Device Takamori, Taro; Wada, Keiji; Böttcher, Norman; Erlbacher, Tobias; Saito, Wataru; Nishizawa, Shinichi	Konferenzbeitrag Conference Paper

Diese Liste ist ein Auszug aus der Publikationsplattform Fraunhofer-Publica

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2021

Jahr Year	Titel/Autor:in Title/Author	Publikationstyp Publication Type
2021	MD simulation of two-temperature model in ion irradiation of 3C-SiC: Effects of electronic and nuclear stopping coupling, ion energy and crystal orientation Wu, J.; Xu, Z.; Zhao, J.; Rommel, M.; Nordlund, K.; Ren, F.; Fang, F.	Zeitschriftenaufsatz Journal Article
2021	Reliability of Silicon-Nitride based High-Voltage Monolithic Capacitors Becker, Tom; Matlok, Stefan; Heckel, Thomas; Böttcher, Norman; Leib, Jürgen; Erlbacher, Tobias	Vortrag Presentation
2021	Smart Platform for Rapid Prototyping: Solutions in the Dilemma of Flexibility and Standardization Anger, Sabrina; Klingert, Felix; Häublein, Volker; Pfeffer, Markus; Schellenberger, Martin	Konferenzbeitrag Conference Paper
2021	MD simulation study on defect evolution and doping efficiency of p-type doping of 3C-SiC by Al ion implantation with subsequent annealing Wu, J.; Xu, Z.; Liu, L.; Hartmaier, A.; Rommel, M.; Nordlund, K.; Wang, T.; Janisch, R.; Zhao, E.	Zeitschriftenaufsatz Journal Article
2021	Monolithisch integrierter Lasttrennschalter in SiC JFET Technologie Boettcher, N.; Erlbacher, Tobias	Vortrag Presentation
2021	Device Design and Process Integration of SiC Trench MOSFETs Lim, Minwho; Rusch, Oleg; Erlbacher, Tobias; Bauer, Anton	Vortrag Presentation
2021	Fully convolutional networks for chip-wise defect detection employing photoluminescence images Stern, M.L.; Schellenberger, M.	Zeitschriftenaufsatz Journal Article
2021	Accessing local electron-beam induced temperature changes during In situ liquid-phase transmission electron microscopy Fritsch, B.; Hutzler, A.; Wu, M.; Khadivianazar, S.; Vogl, L.; Jank, M.; März, M.; Spiecker, E.	Zeitschriftenaufsatz Journal Article
2021	Frabrication and Evaluation of 4H-SiC Double Trench MOSFETs on 6-inch Wafer Lim, Minwho; Kim, Seongjun; Rusch, Oleg; Kang, Min-Jae; Sung, Mi-Je; Kwak, Juyoung; Lee, Nam-Suk; Shin, Hoon-Kyu; Erlbacher, Tobias; Bauer, Anton	Vortrag Presentation
2021	Modelling the Radiolysis of Silver Nitrate Solutions in presence of Bromide Ions in Liquid-Phase Transmission Electron Microscopy Taherkhani, Mehran; Fritsch, Birk; Jank, Michael; Spiecker, Erdmann; Hutzler, Andreas	Zeitschriftenaufsatz Journal Article
2021	Lifetime limiting defects in 4H-SiC epitaxial layers: The influence of substrate originated defects Erlekampf, Jürgen; Rommel, Mathias; Rosshirt-Lilla, Katharina; Kallinger, Birgit; Berwian, Patrick; Friedrich, Jochen; Erlbacher, Tobias	Zeitschriftenaufsatz Journal Article
2021	From Cyclopentasilane to Thin-Film Transistors Gerwig, M.; Ali, A.S.; Neubert, D.; Polster, S.; Bohme, U.; Franze, G.; Rosenkranz, M.; Popov, A.; Ponomarev, I.; Jank, M.; Vieweger, C.; Brendler, E.; Frey, L.; Kroll, P.; Kroke, E.	Zeitschriftenaufsatz Journal Article
2021	SiC for Power Electronics and More - 150mm and 200mm Technologies on the Move Erlbacher, Tobias	Vortrag Presentation
2021	Process-based Modeling of 4H-SiC Double-trench MOSFETs with Reshaped Trench Geometries Lim, Minwho; Rusch, Oleg; Erlbacher, Tobias; Beuer, Susanne; Rommel, Mathias; Bauer, Anton; Kim, S.; Kang, M.; Shin, H.-K.	Poster
2021	Experimental wafer carrier contamination analysis and monitoring in fully automated 300 mm power production lines Zängle, C.; Pfeffer, M.; Franze, P.; Schneider, G.; Bauer, A.	Konferenzbeitrag Conference Paper
2021	Beam-induced heating at low electron fluxes during liquid phase transmission electron microscopy Fritsch, Birk; Hutzler, Andreas; Wu, Mingjian; Vogl, Lilian; Jank, Michael; März, Martin; Spiecker, Erdmann	Zeitschriftenaufsatz Journal Article
2021	A Fully Integrated Ferroelectric Thin-Film-Transistor - Influence of Device Scaling on Threshold Voltage Compensation in Displays Lehninger, D.; Ellinger, M.; Ali, T.; Li, S.; Mertens, K.; Lederer, M.; Olivio, R.; Kampfe, T.; Hanisch, N.; Biedermann, K.; Rudolph, M.; Brackmann, V.; Sanctis, C.; Jank, M.; Seidel, K.	Zeitschriftenaufsatz Journal Article
2021	A Monolithically Integrated SiC Circuit Breaker Böttcher, Norman; Erlbacher, Tobias	Zeitschriftenaufsatz Journal Article
2021	Molecular dynamics simulation of color centers in silicon carbide by helium and dual ion implantation and subsequent annealing Fan, Y.; Song, Y.; Xu, Z.; Dong, B.; Wu, J.; Rommel, Mathias; Zhang, K.; Zhao, J.; Zhu, R.; Li, B.; Li, Q.; Fang, F.	Zeitschriftenaufsatz Journal Article
2021	Doping-related photoluminescence spectroscopy in 4H-SiC Kallinger, Birgit; Schlichting, Holger; Kocher, Matthias; Rommel, Mathias; Berwian, Patrick	Poster
2021	SiC Power MOS technology evolution. Sustainable and efficient energy conversion in DC grids Erlbacher, Tobias	Vortrag Presentation

Diese Liste ist ein Auszug aus der Publikationsplattform Fraunhofer-Publica

This list has been generated from the publication platform Fraunhofer-Publica

2020

Jahr Year	Titel/Autor:in Title/Author	Publikationstyp Publication Type
2020	A 4H-SiC UV Phototransistor with Excellent Optical Gain Based on Controlled Potential Barrier Benedetto, L. di; Licciardo, G.D.; Erlbacher, T.; Bauer, A.J.; Rubino, A.	Zeitschriftenaufsatz Journal Article
2020	Nanocutting mechanism of 6H-SiC investigated by scanning electron microscope online observation and stress-assisted and ion implant-assisted approaches Xu, Zongwei; Liu, Lei; He, Zhongdu; Tian, Dongyu; Hartmaier, Alexander; Zhang, Junjie; Luo, Xichun; Rommel, Mathias; Nordlund, Kai; Zhang, Guoxiong; Fang, Fengzhou	Zeitschriftenaufsatz Journal Article
2020	The impact of dislocations on AlGaN/GaN Schottky diodes and on gate failure of high electron mobility transistors Besendörfer, S.; Meissner, E.; Medjoub, F.; Derluyn, J.; Friedrich, J.; Erlbacher, T.	Zeitschriftenaufsatz Journal Article
2020	Design Considerations on a Monolithically Integrated, Self Controlled and Regenerative 900 V SiC Circuit Breaker Böttcher, Norman; Erlbacher, Tobias	Konferenzbeitrag Conference Paper
2020	RESURF n-LDMOS Transistor for Advanced Integrated Circuits in 4H-SiC Weiße, J.; Matthus, C.; Schlichting, H.; Mitlehner, H.; Erlbacher, T.	Zeitschriftenaufsatz Journal Article
2020	Cognitive Power Electronics for Intelligent Drive Technology Roeder, Georg; Liu, Xinjun; Hofmann, Maximilian; Schellenberger, Martin; Hilpert, Florian; März, Martin	Konferenzbeitrag Conference Paper
2020	Photoluminescence and Raman Spectroscopy Study on Color Centers of Helium Ion-Implanted 4H-SiC Song, Ying; Xu, Zongwei; Li, Rongrong; Wang, Hong; Fan, Yexin; Rommel, Mathias; Liu, Jiayu; Astakhov, Georgy V.; Hlawacek, Gregor; Li, Bingsheng; Xu, Jun; Fang, Fengzhou	Zeitschriftenaufsatz Journal Article
2020	Leistungsmodul mit unipolarem Halbleiterbauelement für hohe Lebensdauer Erlbacher, Tobias; Schletz, Andreas	Patent
2020	Sub-20 nm multilayer nanopillar patterning for hybrid SET/CMOS integration Porteau, M.-L.; Gharbi, A.; Brianceau, P.; Dallery, J.-A.; Laulagnet, F.; Rademaker, G.; Tiron, R.; Engelmann, Hans-Jürgen; Borany, Johannes von; Heinig, Karl-Heinz; Rommel, Mathias; Baier, Leander	Zeitschriftenaufsatz Journal Article
2020	Integrated Passive Devices and Switching Circuit Design for a 3D DC/DC Converter up to 60 V Saponara, S.; Ciarpi, G.; Erlbacher, Tobias; Rattmann, Gudrun	Zeitschriftenaufsatz Journal Article
2020	Highly accurate determination of heterogeneously stacked Van-der-Waals materials by optical microspectroscopy Hutzler, Andreas; Fritsch, Birk; Matthus, Christian D.; Jank, Michael P.M.; Rommel, Mathias	Zeitschriftenaufsatz Journal Article
2020	Beyond SIC Power Devices and Technology - Novel High Temperature SIC CMOS 1 Micron Technology Erlbacher, T.	Vortrag Presentation
2020	Elektrisches Kabel oder elektrische Litze sowie drahtförmiges elektrisches Verbindungselement mit halbleitendem Funktionsabschnitt Bayer, Christoph; Schletz, Andreas; Erlbacher, Tobias	Patent
2020	An Iterative Surface Potential Algorithm including Interface Traps for Compact Modeling of SiC-MOSFETs Albrecht, M.; Klüpfel, F.J.; Erlbacher, T.	Zeitschriftenaufsatz Journal Article
2020	Verfahren zur Herstellung von Halbleiterkondensatoren unterschiedlicher Kapazitätswerte in einem Halbleitersubstrat Erlbacher, Tobias	Patent
2020	Confocal photoluminescence characterization of silicon-vacancy color centers in 4H-SiC fabricated by a femtosecond laser Liu, J.; Xu, Z.; Song, Y.; Wang, H.; Dong, B.; Li, S.; Ren, J.; Li, Q.; Rommel, M.; Gu, X.; Liu, B.; Hu, M.; Fang, F.	Zeitschriftenaufsatz Journal Article
2020	Vertical breakdown of GaN on Si due to V-pits Besendörfer, S.; Meissner, E.; Tajalli, A.; Meneghini, M.; Freitas, J.A.; Derluyn, J.; Medjdoub, F.; Meneghesso, G.; Friedrich, J.; Erlbacher, T.	Zeitschriftenaufsatz Journal Article
2020	Pre-Deposition Interfacial Oxidation and Post-Deposition Interface Nitridation of LPCVD TEOS Used as Gate Dielectric on 4H-SiC Lim, Minwho; Sledziewski, Tomasz; Rommel, Mathias; Erlbacher, Tobias; Kim, Hong-Ki; Kim, Seongjun; Shin, Hoon-Kyu; Bauer, A.J.	Konferenzbeitrag Conference Paper
2020	Interplay between C-doping, threading dislocations, breakdown, and leakage in GaN on Si HEMT structures Besendörfer, S.; Meissner, E.; Zweipfennig, T.; Yacoub, H.; Fahle, D.; Behmenburg, H.; Kalisch, H.; Vescan, A.; Friedrich, J.; Erlbacher, T.	Zeitschriftenaufsatz Journal Article
2020	Reducing On-Resistance for SiC Diodes by Thin Wafer and Laser Anneal Technology Rusch, Oleg; Hellinger, Carsten; Moult, Jonathan; Corcoran, Yunji; Erlbacher, Tobias	Konferenzbeitrag Conference Paper
2020	Density functional theory calculation of the properties of carbon vacancy defects in silicon carbide Wang, X.; Zhao, J.; Xu, Z.; Djurabekova, F.; Rommel, M.; Song, Y.; Fang, F.	Zeitschriftenaufsatz Journal Article
2020	RC-Snubberglied mit hoher Spannungsfestigkeit Erlbacher, Tobias; Schletz, Andreas; Rattmann, Gudrun	Patent
2020	Design and fabrication of 4h-Sic Mosfets with optimized JFET and p-body design Ni, W.; Wang, X.; Feng, C.; Xiao, H.; Jiang, L.; Li, W.; Wang, Q.; Li, M.; Schlichting, H.; Erlbacher, T.	Konferenzbeitrag Conference Paper
2020	Impact of the transition region between active area and edge termination on electrical performance of SiC MOSFET Liu, S.; Cheng, X.; Zheng, L.; Sledziewski, T.; Erlbacher, T.; Sheng, L.; Yu, Y.	Zeitschriftenaufsatz Journal Article
2020	Screen-Printed Sensor for Low-Cost Chloride Analysis in Sweat for Rapid Diagnosis and Monitoring of Cystic Fibrosis Hauke, A.; Oertel, S.; Knoke, L.; Fein, V.; Maier, C.; Brinkmann, F.; Jank, M.P.M.	Zeitschriftenaufsatz Journal Article
2020	Influence of Aluminum Compensation Effects in 4H-SiC on the Performance of VDMOS Transistors Schlichting, Holger; Kocher, Matthias; Weiße, Julietta; Erlbacher, Tobias; Bauer, A.J.	Konferenzbeitrag Conference Paper
2020	Foreword to the special issue on wide-bandgap (WBG) semiconductors: from fundamentals to applications Xu, Z.; Tang, Y.; Rommel, M.	Zeitschriftenaufsatz Journal Article
2020	Influence of Shallow Pits and Device Design of 4H-SiC VDMOS Transistors on In-Line Defect Analysis by Photoluminescence and Differential Interference Contrast Mapping Kocher, Matthias; Schlichting, Holger; Kallinger, Birgit; Rommel, Mathias; Bauer, A.J.; Erlbacher, Tobias	Konferenzbeitrag Conference Paper
2020	Advancing the sensitivity of integrated epoxy-based Bragg grating refractometry by high-index nanolayers Hessler, Steffen; Knopf, Stefan; Rommel, Mathias; Girschikofsky, Maiko; Schmauss, Bernhard; Hellmann, Ralf	Zeitschriftenaufsatz Journal Article
2020	Impact of Channel Implantation on a 4H-SiC CMOS Operational Amplifier for High Temperature Applications Albrecht, M.; Perez, D.; Martens, R.C.; Bauer, A.J.; Erlbacher, T.	Konferenzbeitrag Conference Paper
2020	Low-Resistance Ohmic Contact Formation by Laser Annealing of N-Implanted 4H-SiC Hellinger, Carsten; Rusch, Oleg; Rommel, Mathias; Bauer, A.J.; Erlbacher, Tobias	Konferenzbeitrag Conference Paper
2020	SiC MOSFET with a Self-Aligned Channel Defined by Shallow Source-JFET Implantation: A Simulation Study Sledziewski, T.; Erlbacher, T.	Konferenzbeitrag Conference Paper
2020	Real embedding process of SiC devices in a monolithic ceramic package using LTCC technology Lenz, Christian; Ziesche, Steffen; Schletz, Andreas; Bach, Hoang Linh; Erlbacher, Thomas	Konferenzbeitrag Conference Paper
2020	Depth Profiling of Ion-Implanted 4H-SiC Using Confocal Raman Spectroscopy Song, Ying; Xu, Zongwei; Liu, Tao; Rommel, Mathias; Wang, Hong; Wang, Yufang; Fang, Fengzhou	Zeitschriftenaufsatz Journal Article
2020	Recent progress of high temperature vapor phase epitaxy for the growth of GaN layers - Controlled coalescence of nucleation layers Schneider, T.; Förste, M.; Lukin, G.; Fischer, P.; Barchuk, M.; Schimpf, C.; Niederschlag, E.; Pätzold, O.; Rafaja, D.; Stelter, M.	Zeitschriftenaufsatz Journal Article
2020	Perspectives and tradeoffs of absorber materials for high NA EUV lithography Erdmann, A.; Mesilhy, H.; Evanschitzky, P.; Philipsen, V.; Timmermans, F.; Bauer, M.	Zeitschriftenaufsatz Journal Article
2020	Smart Platform for Rapid Prototyping: A First Solution Approach to Improve Time-to-Market and Process Control in Low-Volume Device Fabrication Schellenberger, M.; Anger, S.; Pfeffer, M.; Häublein, V.; Roeder, G.; Bauer, A.	Konferenzbeitrag Conference Paper
2020	Integration of Printed Electronics in Potted Power Electronic Modules Zimmermann, Victoria; Zoerner, Alicia; Yu, Zechun; Jank, Michael; Bayer, Christoph Friedrich; Schletz, Andreas; März, Martin	Konferenzbeitrag Conference Paper

Diese Liste ist ein Auszug aus der Publikationsplattform Fraunhofer-Publica

This list has been generated from the publication platform Fraunhofer-Publica

2019

Jahr Year	Titel/Autor:in Title/Author	Publikationstyp Publication Type
2019	Technological advances towards 4H-SiC JBS diodes for wind power applications Buettner, Jonas; Erlbacher, Tobias; Bauer, Anton	Konferenzbeitrag Conference Paper
2019	Large-Area Layer Counting of Two-Dimensional Materials Evaluating the Wavelength Shift in Visible-Reflectance Spectroscopy Hutzler, Andreas; Matthus, Christian D.; Dolle, Christian; Rommel, Mathias; Jank, Michael P.M.; Spiecker, Erdmann; Frey, Lothar	Zeitschriftenaufsatz Journal Article
2019	Improving 5V Digital 4H-SiC CMOS ICs for Operating at 400°C Using PMOS Channel Implantation Albrecht, M.; Erlbacher, T.; Bauer, A.J.; Frey, L.	Konferenzbeitrag Conference Paper
2019	Silicon RC-Snubber for 900 V Applications Utilising non-Stoichiometric Silicon Nitride Boettcher, N.; Heckel, T.; Erlbacher, T.; Pelaic, K.	Konferenzbeitrag Conference Paper
2019	Verfahren zur Bestimmung mindestens eines elektrischen oder optischen Parameters einer Vielzahl von Halbleiterchips auf einem Wafer Lindberg, Hans; Schellenberger, Martin; Stern, Maike	Patent
2019	Methodology for the investigation of threading dislocations as a source of vertical leakage in AlGaN/GaN-HEMT heterostructures for power devices Besendörfer, S.; Meissner, E.; Lesnik, A.; Friedrich, J.; Dadgar, A.; Erlbacher, T.	Zeitschriftenaufsatz Journal Article
2019	Electron paramagnetic resonance characterization of aluminum ion implantation induced defects in 4H-SiC Wang, Xiuhong; Xu, Zongwei; Rommel, Mathias; Dong, Bing; Song, Le; Tee, Clarence Augustine T.H.; Fang, Fengzhou	Zeitschriftenaufsatz Journal Article
2019	Surface Characterization of Ion Implanted 4H-SiC Epitaxial Layers with Ion Energy and Concentration Variations Kim, Hong-Ki; Kim, Seongjun; Buettner, Jonas; Lim, Minwho; Erlbacher, Tobias; Bauer, A.J.; Koo, Sang-Mo; Lee, Nam-Suk; Shin, Hoon-Kyu	Konferenzbeitrag Conference Paper
2019	3D-Integrated Multi-Sensor Demonstrator System for Environmental Monitoring Köck, A.; Wimmer-Teubenbacher, R.; Sosada-Ludwikovska, F.; Rohracher, K.; Wachmann, E.; Herold, M.; Welden, T. an; Kim, J.M.; Ali, Z.; Poenninger, A.; Stahl-Offergeld, M.; Hohe, H.-P.; Lorenz, J.; Erlbacher, T.; Dolmans, G.; Offermans, P.; Vandecasteele, M.; Yurchenko, O.; Sicard, O. von; Pohle, R.; Udrea, F.; Falco, C.; Flandre, D.; Bol, D.; Comini, E.; Zappa, D.; Gardner, J.; Cole, M.; Theunis, J.; Peters, J.; Baldwin, A.	Konferenzbeitrag Conference Paper
2019	Feasibility of 4H-SiC p-i-n diode for sensitive temperature measurements between 20.5 K and 802 K Matthus, C.D.; Benedetto, L. di; Kocher, M.; Bauer, A.J.; Licciardo, G.D.; Rubino, A.; Erlbacher, T.	Zeitschriftenaufsatz Journal Article
2019	NanoElectronics roadmap for Europe: From nanodevices and innovative materials to system integration Ahopelto, J.; Ardila, G.; Baldi, L.; Balestra, F.; Belot, D.; Fagas, G.; Gendt, S. de; Demarchi, D.; Fernandez-Bolaños, M.; Holden, D.; Ionescu, A.M.; Meneghesso, G.; Mocuta, A.; Pfeffer, M.; Popp, R.M.; Sangiorgi, E.; Sotomayor Torres, C.M.	Zeitschriftenaufsatz Journal Article
2019	Resistless Ga+ beam lithography for flexible prototyping of nanostructures Rommel, Mathias	Vortrag Presentation
2019	Publisher's Note: "Aluminum acceptor activation and charge compensation in implanted p-type 4H-SiC" [AIP Advances 9, 055308 (2019)] Weiße, J.; Hauck, M.; Krieger, M.; Bauer, A.J.; Erlbacher, T.	Zeitschriftenaufsatz Journal Article
2019	Preparation of graphene-supported microwell liquid cells for in situ transmission electron microscopy Hutzler, A.; Fritsch, B.; Jank, M.P.M.; Branscheid, R.; Spiecker, E.; März, M.	Zeitschriftenaufsatz Journal Article
2019	Raman Characterization of Carrier Concentrations of Al-implanted 4H-SiC with Low Carrier Concentration by Photo-Generated Carrier Effect Liu, Tao; Xu, Zongwei; Rommel, Mathias; Wang, Hong; Song, Ying; Wang, Yufang; Fang, Fengzhou	Zeitschriftenaufsatz Journal Article
2019	A TCAD Process Model with Monte Carlo Ion Implantation for 4H-SiC JBS Diode Analysis and Design Büttner, J.; Beuer, Susanne; Petersen, S.; Rommel, Mathias; Erlbacher, T.; Bauer, A.	Poster
2019	Pre-deposition interfacial oxidation and post-deposition interface nitridation of LPCVD TEOS used as gate dielectric on 4H-SiC Lim, Minwho; Sledziewski, Tomasz; Rommel, Mathias; Erlbacher, Tobias; Kim, Hong-Ki; Kim, Seongjun; Shin, Hoon-Kyu; Bauer, Anton	Poster
2019	Reducing On-Resistance for SiC Diodes by Thin Wafer and Laser Anneal Technology Rusch, O.; Hellinger, C.; Moult, J.; Corcoran, Y.; Erlbacher, T.	Poster
2019	Process and design optimization of SiC MOSFET for low on-state resistance Sledziewski, Tomasz; Erlbacher, Tobias; Bauer, Anton	Vortrag Presentation
2019	Design and fabrication of 3300V 100mO 4H-SiC MOSFET with Stepped p-body structure Ni, W.; Wang, X.; Xu, M.; Li, M.; Feng, C.; Xiao, H.; Li, W.; Wang, Q.; Schlichting, H.; Erlbacher, T.	Konferenzbeitrag Conference Paper
2019	UV-Strahlungssensor auf Basis von Diamant Erlbacher, Tobias	Patent
2019	Hochvolt-Kondensator zur Integration in elektrische Leistungsmodule sowie Verfahren zur Herstellung Erlbacher, Tobias	Patent
2019	Influence of shallow pits and device design of 4H-SiC VDMOS transistors on in-line defect analysis by using PL scanning Kocher, Matthias; Schlichting, Holger; Kallinger, Birgit; Rommel, Mathias; Bauer, A.J.; Erlbacher, Tobias	Poster
2019	TSV-based passive networks for monolithic integration in smartpower ICS for automotive applications Erlbacher, Tobias; Rattmann, Gudrun	Vortrag Presentation
2019	Monolithisch integrierter Halbleiterschalter, insbesondere Leistungstrennschalter Erlbacher, Tobias; Hürner, Andreas	Patent
2019	Heteroepitaxial growth of GaN on sapphire substrates by high temperature vapor phase epitaxy Lukin, G.; Schneider, T.; Förste, M.; Barchuk, M.; Schimpf, C.; Röder, C.; Zimmermann, F.; Niederschlag, E.; Pätzold, O.; Beyer, F.C.; Rafaja, D.; Stelter, M.	Zeitschriftenaufsatz Journal Article
2019	Surface-enhanced Raman scattering on nanodiamond-derived carbon onions Song, Ying; Xu, Zongwei; Rosenkranz, Andreas; Rommel, Mathias; Shi, Changkun; Fang, Fengzhou	Zeitschriftenaufsatz Journal Article
2019	Low-resistance ohmic contact formation by laser annealing of N-implanted 4H-SiC Hellinger, Carsten; Rusch, Oleg; Rommel, Mathias; Bauer, A.J.; Erlbacher, Tobias	Poster
2019	Influence of Aluminum Compensation Effects in 4H-SiC on the Performance of VDMOS Transistors Schlichting, Holger; Kocher, Matthias; Weiße, Julietta; Erlbacher, Tobias; Bauer, A.J.	Poster
2019	Elektrische Schaltungsanordnung mit einer aktiven Entladeschaltung Erlbacher, Tobias; Matlok, Stefan	Patent
2019	On the Origin of Charge Compensation in Aluminum-Implanted n-Type 4H-SiC by Analysis of Hall Effect Measurements Weisse, Julietta; Hauck, Martin; Sledziewski, Tomasz; Krieger, Michael; Bauer, A.J.; Mitlehner, Heinz; Frey, Lothar; Erlbacher, Tobias	Konferenzbeitrag Conference Paper
2019	Ohmic Contact Mechanism for Ni/C-Faced 4H-n-SiC Substrate Kim, Seongjun; Kim, Hong-Ki; Lim, Minwho; Jeong, Seonghoon; Kang, Min-Jae; Kang, Min-Sik; Lee, Nam-Suk; Coung, Tran Viet; Kim, Hyunsoo; Erlbacher, Tobias; Bauer, Anton J.; Shin, Hoon-Kyu	Zeitschriftenaufsatz Journal Article
2019	First Experimental Test on Bipolar Mode Field Effect Transistor Prototype in 4H-SiC. A Proof of Concept Benedetto, L. di; Licciardo, G.D.; Huerner, A.; Erlbacher, T.; Bauer, A.J.; Rubino, A.	Konferenzbeitrag Conference Paper
2019	Characterization of a silicon carbide BCD process for 300°C circuits Abbasi, A.; Roy, S.; Murphree, R.; Rashid, A.-U.; Hossain, M.M.; Lai, P.; Fraley, J.; Erlbacher, T.; Chen, Z.; Mantooth, A.	Konferenzbeitrag Conference Paper
2019	On a Novel Source Technology for Deep Aluminum Diffusion for Silicon Power Electronics Rattmann, Gudrun; Pichler, Peter; Erlbacher, Tobias	Zeitschriftenaufsatz Journal Article
2019	Influence of Trench Design on the Electrical Properties of 650V 4H-SiC JBS Diodes Rusch, Oleg; Moult, Jonathan; Erlbacher, Tobias	Konferenzbeitrag Conference Paper
2019	Deeper insight into lifetime-engineering in 4H-SiC by ion implantation Erlekampf, J.; Kallinger, B.; Weiße, J.; Rommel, M.; Berwian, P.; Friedrich, J.; Erlbacher, T.	Zeitschriftenaufsatz Journal Article
2019	Comparison between Ni-SALICIDE and Self-Aligned Lift-Off Used in Fabrication of Ohmic Contacts for SiC Power MOSFET Sledziewski, Tomasz; Erlbacher, Tobias; Bauer, A.J.; Frey, Lothar; Chen, Ximing; Zhao, Yanli; Li, Chengzhan; Dai, Xiaoping	Konferenzbeitrag Conference Paper
2019	SiC MOSFET with a self-aligned channel defined by shallow source-JFET implantation: A simulation study Sledziewski, Tomasz; Erlbacher, Tobias	Poster
2019	Determination of Compensation Ratios of Al-Implanted 4H-SiC by TCAD Modelling of TLM Measurements Kocher, Matthias; Yao, Boteng; Weisse, Julietta; Rommel, Mathias; Xu, Zong Wei; Erlbacher, Tobias; Bauer, A.J.	Konferenzbeitrag Conference Paper
2019	Performance of 4H-SiC Bipolar Diodes as Temperature Sensor at Low Temperatures Benedetto, L. di; Matthus, C.D.; Erlbacher, T.; Bauer, A.J.; Licciardo, G.D.; Rubino, A.; Frey, L.	Konferenzbeitrag Conference Paper
2019	Design of a 4H-SiC RESURF n-LDMOS Transistor for High Voltage Integrated Circuits Weisse, Julietta; Mitlehner, Heinz; Frey, Lothar; Erlbacher, Tobias	Konferenzbeitrag Conference Paper
2019	Design Considerations for Robust Manufacturing and High Yield of 1.2 kV 4H-SiC VDMOS Transistors Schlichting, H.; Sledziewski, T.; Bauer, A.J.; Erlbacher, T.	Konferenzbeitrag Conference Paper
2019	Aluminum acceptor activation and charge compensation in implanted p-type 4H-SiC Weiße, J.; Hauck, M.; Krieger, M.; Bauer, A.J.; Erlbacher, T.	Zeitschriftenaufsatz Journal Article
2019	Wavelength-selective 4H-SiC UV-sensor array Matthus, C.D.; Bauer, A.J.; Frey, L.; Erlbacher, T.	Zeitschriftenaufsatz Journal Article
2019	In Situ Liquid Cell TEM Studies on Etching and Growth Mechanisms of Gold Nanoparticles at a Solid-Liquid-Gas Interface Hutzler, A.; Fritsch, B.; Jank, M.P.M.; Branscheid, R.; Martens, R.C.; Spiecker, E.; März, M.	Zeitschriftenaufsatz Journal Article
2019	Decoration of Al Implantation Profiles in 4H-SiC by Bevel Grinding and Dry Oxidation Kocher, Matthias; Erlbacher, Tobias; Rommel, Mathias; Bauer, A.J.	Konferenzbeitrag Conference Paper
2019	Channeling in 4H-SiC from an Application Point of View Pichler, Peter; Sledziewski, Tomasz; Häublein, Volker; Bauer, A.J.; Erlbacher, Tobias	Konferenzbeitrag Conference Paper
2019	Lifetime engineering in 4H-SiC materials and devices Rommel, Mathias; Erlekampf, Jürgen; Kallinger, Birgit; Weiße, Julietta; Berwian, Patrick; Friedrich, Jochen; Erlbacher, Tobias	Vortrag Presentation
2019	Attenuated phase shift mask for extreme ultraviolet: Can they mitigate three-dimensional mask effects? Erdmann, A.; Evanschitzky, P.; Mesilhy, H.; Philipsen, V.; Hendrickx, E.; Bauer, M.	Zeitschriftenaufsatz Journal Article
2019	SIC device manufacturing using ion implantation. Opportunities and challenges Erlbacher, Tobias	Vortrag Presentation
2019	Raman Spectroscopy Characterization of Ion Implanted 4H-SiC and its Annealing Effects Xu, Zongwei; Song, Ying; Rommel, Mathias; Liu, T.; Kocher, Matthias; He, Z.D.; Wang, H.; Yao, B.T.; Liu, L.; Fang, Fengzhou	Konferenzbeitrag Conference Paper
2019	1700V 34mO 4H-SiC MOSFET With Retrograde Doping in Junction Field-Effect Transistor Region Ni, W.; Wang, X.; Xiao, H.; Xu, M.; Li, M.; Schlichting, H.; Erlbacher, T.	Konferenzbeitrag Conference Paper
2019	Depth profiling of ion-implanted 4H-SiC using confocal Raman spectroscopy Song, Ying; Xu, Zongwei; Liu, Tao; Rommel, Mathias; Wang, Hong; Fang, Fengzhou	Poster

Diese Liste ist ein Auszug aus der Publikationsplattform Fraunhofer-Publica

This list has been generated from the publication platform Fraunhofer-Publica

2018

Jahr Year	Titel/Autor:in Title/Author	Publikationstyp Publication Type
2018	Normalized differential conductance to study current conduction mechanisms in MOS structures Nouibat, T.H.; Messai, Z.; Chikouch, D.; Ouennoughi, Z.; Rouag, N.; Rommel, Mathias; Frey, Lothar	Zeitschriftenaufsatz Journal Article
2018	One-step nanoimprinted Bragg grating sensor based on hybrid polymers Förthner, Michael; Girschikofsky, Maiko; Rumler, Maximilian; Stumpf, Florian; Rommel, Mathias; Hellmann, Ralf; Frey, Lothar	Zeitschriftenaufsatz Journal Article
2018	Comparative Study of 4H-SiC UV-Sensors with Ion Implanted and Epitaxially Grown p-Emitter Matthus, C.D.; Erlbacher, T.; Bauer, A.J.; Frey, L.	Konferenzbeitrag Conference Paper
2018	Investigation of Ga ion implantation-induced damage in single-crystal 6H-SiC He, Zhongdu; Xu, Zongwei; Rommel, Mathias; Yao, Boteng; Liu, Tao; Song, Ying; Fang, Fengzhou	Zeitschriftenaufsatz Journal Article
2018	Future technology trends Lorenz, Leo; Erlbacher, Tobias; Hilt, Oliver	Aufsatz in Buch Book Article
2018	Advances in thermal laser separation: Process monitoring in a kerf-free laser-based cutting technology to ensure high yield Barreto, M.C.; Roeder, G.; Steinhoff, M.; Schellenberger, M.; Bauer, A.	Zeitschriftenaufsatz Journal Article
2018	Influence and mutual interaction of process parameters on the Z1/2 defect concentration during epitaxy of 4H-SiC Erlekampf, Jürgen; Kaminzky, Daniel; Rosshirt, Katharina; Kallinger, Birgit; Rommel, Mathias; Berwian, Patrick; Friedrich, Jochen; Frey, Lothar	Konferenzbeitrag Conference Paper
2018	Elektronik Bauer, Anton; Bär, Eberhard; Erlbacher, Tobias; Friedrich, Jochen; Lorenz, Jürgen; Rommel, Mathias; Schellenberger, Martin	Aufsatz in Buch Book Article
2018	Dose dependent profile deviation of implanted aluminum in 4H-SiC during high temperature annealing Kocher, Matthias; Rommel, Mathias; Sledziewski, Tomasz; Häublein, Volker; Bauer, Anton	Poster
2018	Unravelling the Mechanisms of Gold-Silver Core-Shell Nanostructure Formation by in Situ TEM Using an Advanced Liquid Cell Design Hutzler, A.; Schmutzler, T.; Jank, M.P.M.; Branscheid, R.; Unruh, T.; Spiecker, E.; Frey, L.	Zeitschriftenaufsatz Journal Article
2018	Large-area layer counting of 2D materials via visible reflection spectroscopy Hutzler, Andreas; Matthus, C.D.; Dolle, C.; Rommel, Mathias; Jank, M.P.M.; Spiecker, E.; Frey, L.	Poster
2018	Nano- and micro-patterned S-, H- and X-PDMS for cell-based applications: Comparison of wettability, roughness and cell-derived parameters Scharin-Mehlmann, Marina; Häring, Aaron; Rommel, Mathias; Dirnecker, Tobias; Friedrich, Oliver; Frey, Lothar; Gilbert, Daniel F.	Zeitschriftenaufsatz Journal Article
2018	Principle of lifetime-engineering in 4H-SiC by ion implantation Erlekampf, Jürgen; Kallinger, Birgit; Berwian, Patrick; Rommel, Mathias; Friedrich, Jochen; Frey, Lothar; Erlbacher, Tobias	Poster
2018	Strukturierungsverfahren Fader, Robert; Lorenz, Jürgen; Rommel, Mathias; Baum, Mario; Danylyuk, Serhiy; Gillner, Arnold; Stollenwerk, Jochen; Bläsi, Benedikt	Aufsatz in Buch Book Article
2018	Detailed characterisation of focused ion beam induced lateral damage on silicon carbide samples by electrical scanning probe microscopy and transmission electron microscopy Stumpf, Florian; Abu Quba, A.A.; Singer, Philip; Rumler, Maximilian; Cherkashin, Nikolay; Schamm-Chardon, Sylvie; Cours, Robin; Rommel, Mathias	Zeitschriftenaufsatz Journal Article
2018	Topic review: Application of raman spectroscopy characterization in micro/nano-machining Xu, Zongwei; He, Zhongdu; Song, Ying; Fu, Xiu; Rommel, Mathias; Luo, Xichun; Hartmaier, Alexander; Zhang, Junjie; Fang, Fengzhou	Zeitschriftenaufsatz Journal Article
2018	Mass Separation Issues for the Implantation of Doubly Charged Aluminum Ions Häublein, V.; Bauer, A.J.; Ryssel, H.; Frey, L.	Konferenzbeitrag Conference Paper
2018	Flexible thin film bending sensor based on Bragg gratings in hybrid polymers Girschikofsky, Maiko; Rosenberger, Manuel; Förthner, Michael; Rommel, Mathias; Frey, Lothar; Hellmann, Ralf	Konferenzbeitrag Conference Paper
2018	Strahlungssensor zur Detektion schwacher Strahlungssignale Erlbacher, Tobias; Matthus, Christian	Patent
2018	Decoration of Al implantation profiles in 4H-SiC by bevel grinding and dry oxidation Kocher, Matthias; Erlbacher, Tobias; Rommel, Mathias; Bauer, Anton	Poster
2018	Laser Surface Microstructuring of a Bio-Resorbable Polymer to Anchor Stem Cells, Control Adipocyte Morphology, and Promote Osteogenesis Ortiz, Rocio; Aurrekoetxea-Rodríguez, Iskander; Rommel, Mathias; Quintana, Iban; Vivanco, Maria; Toca-Herrera, Jose Luis	Zeitschriftenaufsatz Journal Article
2018	Determination of compensation ratios of Al-implanted 4H-SiC by TCAD modelling of TLM measurements Kocher, Matthias; Yao, Boteng; Weisse, Julietta; Rommel, Mathias; Xu, Zongwei; Erlbacher, Tobias; Bauer, Anton	Poster
2018	TLS-dicing for SiC - Latest assessment results Lewke, D.; Cerezuela Barreto, M.; Dohnke, K.; Zühlke, H.-U.; Belgardt, C.; Schellenberger, M.	Konferenzbeitrag Conference Paper
2018	Evidence of low injection efficiency for implanted p-emitters in bipolar 4H-SiC high-voltage diodes Matthus, C.D.; Huerner, A.; Erlbacher, T.; Bauer, A.; Frey, L.	Zeitschriftenaufsatz Journal Article
2018	Electrical properties of schottky-diodes based on B doped diamond Erlbacher, T.; Huerner, A.; Zhu, Y.; Bach, L.; Schletz, A.; Zürbig, Verena; Pinti, Lucas; Kirste, Lutz; Giese, Christian; Nebel, Christoph E.; Bauer, A.J.; Frey, L.	Konferenzbeitrag Conference Paper
2018	Lifetime testing method for ceramic capacitors for power electronics applications Dresel, Fabian; Tham, Nils; Erlbacher, Tobias; Schletz, Andreas	Konferenzbeitrag Conference Paper
2018	Influence of Al doping concentration and annealing parameters on TiAl based Ohmic contacts on 4H-SiC Kocher, Matthias; Rommel, Mathias; Erlbacher, Tobias; Bauer, A.J.	Konferenzbeitrag Conference Paper
2018	Raman spectroscopy characterization of ion implanted 4H-SiC and its annealing effects Xu, Zongwei; Song, Y.; Rommel, Mathias; Liu, T.; Kocher, Matthias; He, Z.D.; Wang, H.; Yao, B.T.; Liu, L.; Fang, F.Z.	Poster
2018	Heterogeneous integration of vertical GaN power transistor on Si capacitor for DC-DC converters Yu, Zechun; Zeltner, Stefan; Boettcher, N.; Rattmann, Gudrun; Leib, Jürgen; Bayer, Christoph Friedrich; Schletz, Andreas; Erlbacher, Tobias; Frey, Lothar	Vortrag Presentation
2018	Human Sweat Analysis Using a Portable Device Based on a Screen-printed Electrolyte Sensor Zoerner, A.; Oertel, S.; Jank, M.P.M.; Frey, L.; Langenstein, B.; Bertsch, T.	Zeitschriftenaufsatz Journal Article
2018	Defect functional structures of 4H-SiC and diamond induced by ion implantation: MD simulation and spectral characterization Xu, Zongwei; Zhao, Junlei; Djurabekova, Flyura; Rommel, Mathias; Nordlund, Kai	Vortrag Presentation
2018	Analytical model for the influence of the gate-voltage on the forward conduction properties of the body-diode in SiC-MOSFETs Huerner, A.; Heckel, T.; Enduschat, A.; Erlbacher, T.; Bauer, A.J.; Frey, L.	Konferenzbeitrag Conference Paper
2018	Impact of Al-ion implantation on the formation of deep defects in n-type 4H-SiC Weiße, Julietta; Hauck, Martin; Krieger, Michael; Erlekampf, Jürgen; Mitlehner, Heinz; Bauer, A.J.; Rommel, Mathias; Häublein, Volker; Erlbacher, Tobias; Csato, Constantin; Rüb, Michael; Akhmadaliev, Shavkat; Frey, Lothar	Konferenzbeitrag Conference Paper
2018	The GaN trench gate MOSFET with floating islands Shen, L.; Müller, S.; Cheng, X.; Zhang, D.; Zheng, L.; Xu, D.; Yu, Y.; Meissner, E.; Erlbacher, T.	Zeitschriftenaufsatz Journal Article
2018	On the limits of scalpel AFM for the 3D electrical characterization of nanomaterials Chen, Shaochuan; Jiang, Lanlan; Buckwell, Mark; Jing, Xu; Ji, Yanfeng; Grustan-Gutierrez, Enric; Hui, Fei; Shi, Yuanyuan; Rommel, Mathias; Paskaleva, Albena; Benstetter, Günther; Ng, Wing. H.; Mehonic, Adnan; Kenyon, Anthony J.; Lanza, Mario	Zeitschriftenaufsatz Journal Article
2018	Schottky diode and method for its manufacturing Erlbacher, Tobias; Hürner, Andreas	Patent
2018	Dose Dependent Profile Deviation of Implanted Aluminum in 4H-SiC During High Temperature Annealing Kocher, Matthias; Rommel, Mathias; Sledziewski, Tomasz; Häublein, Volker; Bauer, A.J.	Konferenzbeitrag Conference Paper
2018	Novel approach based on continuous trench modelling to predict focused ion beam prepared freeform surfaces Bilbao-Guillerna, A.; Eachambadi, R.T.; Cadot, G.B.J.; Axinte, D.A.; Billingham, J.; Stumpf, F.; Beuer, Susanne; Rommel, Mathias	Zeitschriftenaufsatz Journal Article
2018	Influence of triangular defects on the electrical characteristics of 4H-SiC devices Schoeck, J.; Schlichting, H.; Kallinger, B.; Erlbacher, T.; Rommel, Mathias; Bauer, A.J.	Konferenzbeitrag Conference Paper
2018	Analysis of compensation effects in aluminum-implanted 4H-SiC devices Weisse, J.; Hauck, M.; Sledziewski, T.; Tschiesche, M.; Krieger, M.; Bauer, A.; Mitlehner, H.; Frey, L.; Erlbacher, T.	Konferenzbeitrag Conference Paper
2018	TiO2 surface functionalization of COC based planar waveguide Bragg gratings for refractive index sensing Rosenberger, Manuel; Girschikofsky, Maiko; Förthner, Michael; Belle, Stefan; Rommel, Mathias; Frey, Lothar; Schmauß, Bernhard; Hellmann, Ralf	Zeitschriftenaufsatz Journal Article
2018	Attenuated PSM for EUV Erdmann, A.; Evanschitzky, P.; Mesilhy, H.; Philipsen, V.; Hendrickx, E.; Bauer, M.	Konferenzbeitrag Conference Paper
2018	Defects and carrier lifetime in 4H-Silicon Carbide Kallinger, Birgit; Erlekampf, Jürgen; Rommel, Mathias; Berwian, Patrick; Friedrich, J.; Matthus, Christian D.	Vortrag Presentation
2018	Design of a Power Flow Control Converter for Bipolar Meshed LVDC Distribution Grids Purgat, P.; MacKay, L.; Schulz, M.; Han, Y.; Qin, Z.; März, M.; Bauer, P.	Konferenzbeitrag Conference Paper

Diese Liste ist ein Auszug aus der Publikationsplattform Fraunhofer-Publica

This list has been generated from the publication platform Fraunhofer-Publica

2017

Jahr Year	Titel/Autor:in Title/Author	Publikationstyp Publication Type
2017	Influence of triangular defects on the electrical characteristics of 4H-SiC devices Schöck, Johannes; Schlichting, Holger; Kallinger, Birgit; Erlbacher, Tobias; Rommel, Mathias; Bauer, A.J.	Poster
2017	Complex 3D structures via double imprint of hybrid structures and sacrificial mould techniques Steinberg, Christian; Rumler, Maximilian; Runkel, Manuel; Papenheim, Marc; Wang, Si; Mayer, Andre; Becker, Marco; Rommel, Mathias; Scheer, Hella-Christin	Zeitschriftenaufsatz Journal Article
2017	Switching SiC devices faster and more efficient using a DBC mounted terminal decoupling Si-RC element Matlok, S.; Erlbacher, T.; Krach, F.; Eckardt, B.	Konferenzbeitrag Conference Paper
2017	Tiegel zur Herstellung von Silicium-Ingots, Verfahren zu dessen Herstellung sowie Silicium-Ingot Schneider, Veronika; Reimann, Christian; Friedrich, Jochen; Sans, Jürgen; Kuczynski, Maciej	Patent
2017	Polymerization related deformations in multilayer soft stamps for nanoimprint Förthner, Michael; Papenheim, Marc; Rumler, Maximilian; Stumpf, Florian; Baier, Leander; Rommel, Mathias; Scheer, Hella-Christin; Frey, Lothar	Zeitschriftenaufsatz Journal Article
2017	Experimental verification of a self-triggered solid-state circuit breaker based on a SiC BIFET Albrecht, M.; Hürner, A.; Erlbacher, T.; Bauer, A.J.; Frey, L.	Konferenzbeitrag Conference Paper
2017	Waveguide bragg gratings in Ormocer®s for temperature sensing Girschikofsky, Maiko; Rosenberger, Manuel; Förthner, Michael; Rommel, Mathias; Frey, Lothar; Hellmann, Ralf	Zeitschriftenaufsatz Journal Article
2017	Determination of the selectivity of printed wearable sweat sensors Zörner, A.; Oertel, S.; Schmitz, B.; Lang, N.; Jank, M.P.M.; Frey, L.	Konferenzbeitrag Conference Paper
2017	Investigation of high-k dielectric stacks by C-AFM: Advantages, limitations, and possible applications Rommel, Mathias; Paskaleva, Albena	Aufsatz in Buch Book Article
2017	Generalized approach to design multi-layer stacks for enhanced optical detectability of ultrathin layers Hutzler, Andreas; Matthus, Christian D.; Rommel, Mathias; Frey, Lothar	Zeitschriftenaufsatz Journal Article
2017	System integration of printed biosensors for sweat electrolytes with data acquisition via Bluetooth to App Oertel, S.; Jank, M.; Zörner, A.; Schmitz, B.; Lang, N.	Konferenzbeitrag Conference Paper
2017	Fabrication of Bragg grating sensors in UV-NIL structured Ormocer waveguides Girschikofsky, Maiko; Förthner, Michael; Rommel, Mathias; Frey, Lothar; Hellmann, Ralf	Vortrag Presentation
2017	One-step fabrication of hierarchical structures by direct laser writing through PDMS molds Rumler, Maximilian; Förthner, Michael; Baier, Leander; Marhenke, Julius; Kollmuss, Manuel; Michel, Felix; Becker, Marco; Rommel, Mathias	Vortrag Presentation
2017	Monolithically integrated solid-state-circuit-breaker for high power applications Huerner, A.; Erlbacher, T.; Bauer, A.J.; Frey, L.	Konferenzbeitrag Conference Paper
2017	Nanoimprinted surface relief Bragg gratings for sensor applications Förthner, Michael; Girschikofsky, Maiko; Rumler, Maximilian; Rommel, Mathias; Hellmann, Ralf; Frey, Lothar	Poster
2017	Advanced 4H-SiC p-i-n Diode as Highly Sensitive High-Temperature Sensor Up To 460 degrees C Matthus, C.D.; Erlbacher, T.; Hess, A.; Bauer, A.J.; Frey, L.	Zeitschriftenaufsatz Journal Article
2017	Implementation of 4H-SiC PiN-diodes as nearly linear temperature sensors up to 800 K towards SiC multi-sensor integration Matthus, C.D.; Erlbacher, T.; Schöfer, B.; Bauer, A.J.; Frey, L.	Konferenzbeitrag Conference Paper
2017	Optimization of 4H-SiC photodiodes as selective UV sensors Matthus, C.D.; Burenkov, A.; Erlbacher, T.	Konferenzbeitrag Conference Paper
2017	Bulk lifetime characterization of corona charged silicon wafers with high resistivity by means of microwave detected photoconductivity Engst, Christian R.; Rommel, Mathias; Bscheid, Christian; Eisele, Ignaz; Kutter, Christoph	Zeitschriftenaufsatz Journal Article
2017	Stress reduction in high voltage MIS capacitor fabrication Banzhaf, S.; Kenntner, J.; Grieb, M.; Schwaiger, S.; Erlbacher, T.; Bauer, A.J.; Frey, L.; Frey, L.	Konferenzbeitrag Conference Paper
2017	Large area manufacturing of plasmonic colour filters using substrate conformal imprint lithography Rumler, Maximilian; Foerthner, M.; Baier, L.; Evanschitzky, P.; Becker, M.; Rommel, M.; Frey, L.	Zeitschriftenaufsatz Journal Article
2017	Resistless Ga+ beam lithography for flexible prototyping of nanostructures in different materials by reactive ion etching Rommel, Mathias; Rumler, Maximilian; Haas, Anke; Beuer, Susanne	Vortrag Presentation
2017	Influence of Al doping concentration and annealing parameters on TiAl based ohmic contacts on 4H-SiC Kocher, Matthias; Rommel, Mathias; Erlbacher, Tobias; Bauer, Anton	Poster
2017	Fabrication of Bragg grating sensors in UV-NIL structured Ormocer waveguides Girschikofsky, Maiko; Förthner, Michael; Rommel, Mathias; Frey, Lothar; Hellmann, Ralf	Konferenzbeitrag Conference Paper
2017	One-step fabrication of hierarchical structures Rumler, Maximilian; Förthner, Michael; Kollmuss, Manuel; Baier, Leander; Stumpf, Florian; Becker, Marco; Rommel, Mathias; Frey, Lothar	Poster
2017	Verfahren zur Überprüfung eines Trennschrittes bei der Zerteilung eines flachen Werkstückes in Teilstücke Tobisch, Alexander; Schellenberger, Martin; Lewke, Dirk	Patent
2017	Enhanced contamination control methods in advanced wafer processing Pfeffer, M.; Richter, H.; Altmann, R.; Leibold, A.; Bauer, A.	Konferenzbeitrag Conference Paper
2017	Influence and mutual interaction of process parameters on the Z1/2 defect concentration during epitaxy of 4H-SiC Erlekampf, Jürgen; Kaminzky, Daniel; Roßhirt, Katharina; Kallinger, Birgit; Rommel, Mathias; Berwian, Patrick; Friedrich, Jochen; Frey, Lothar	Poster
2017	Point contact current voltage measurements of 4H-SiC samples with different doping profiles Kocher, Matthias; Niebauer, Michael; Rommel, Mathias; Haeublein, Volker; Bauer, Anton	Konferenzbeitrag Conference Paper
2017	Novel advanced analytical design tool for 4H-SiC VDMOSFET devices Benedetto, L. di; Licciardo, G.D.; Erlbacher, T.; Bauer, A.J.; Rubino, A.	Konferenzbeitrag Conference Paper
2017	Raman micro-spectroscopy as a non-destructive key analysis tool in current power semiconductor manufacturing Biasio, M. de; Kraft, M.; Geier, E.; Goller, B.; Bergmann, C.; Esteve, R.; Cerezuela-Barreto, M.; Lewke, D.; Schellenberger, M.; Roesner, M.	Konferenzbeitrag Conference Paper
2017	4.5 kV SiC junction barrier schottky diodes with low leakage current and high forward current density Schöck, Johannes; Büttner, Jonas; Rommel, Mathias; Erlbacher, Tobias; Bauer, Anton	Konferenzbeitrag Conference Paper

Diese Liste ist ein Auszug aus der Publikationsplattform Fraunhofer-Publica

This list has been generated from the publication platform Fraunhofer-Publica

2016

Jahr Year	Titel/Autor:in Title/Author	Publikationstyp Publication Type
2016	The efficiency of hydrogen-doping as a function of implantation temperature Jelinek, Moriz; Laven, Johannes G.; Ganagona, Naveen Goud; Schustereder, Werner; Schulze, Hans-Joachim; Rommel, Mathias; Frey, Lothar	Konferenzbeitrag Conference Paper
2016	Flexographic printing of nanoparticulate tin-doped indium oxide inks on PET foils and glass substrates Wegener, M.; Spiehl, D.; Sauer, H.M.; Mikschl, F.; Liu, X.; Kölpin, N.; Schmidt, M.; Jank, M.P.M.; Dörsam, E.; Roosen, A.	Zeitschriftenaufsatz Journal Article
2016	Nitride bonded silicon nitride as a reusable crucible material for directional solidification of silicon Schneider, V.; Reimann, C.; Friedrich, J.; Müller, G.	Zeitschriftenaufsatz Journal Article
2016	Electrical properties of solution processed layers based on Ge-Si alloy nanoparticles Meric, Z.; Mehringer, C.; Jank, M.P.M.; Peukert, W.; Frey, L.	Zeitschriftenaufsatz Journal Article
2016	Correlation of film morphology and defect content with the charge-carrier transport in thin-film transistors based on ZnO nanoparticles Polster, S.; Jank, M.P.M.; Frey, L.	Zeitschriftenaufsatz Journal Article
2016	Optimization of 4H-SiC UV photodiode performance using numerical process and device simulation Burenkov, Alex; Matthus, Christian David; Erlbacher, Tobias	Zeitschriftenaufsatz Journal Article
2016	Optimized design for 4H-SiC power DMOSFETs Benedetto, Luigi di; Licciardo, Gian D.; Erlbacher, Tobias; Bauer, Anton J.; Rubino, Alfredo	Zeitschriftenaufsatz Journal Article
2016	Combination of direct laser writing and soft lithography molds for combined nano- and microfabrication Rumler, Maximilian; Kollmuss, M.; Baier, L.; Michel, F.; Förthner, M.; Becker, M.; Rommel, Mathias; Frey, L.	Konferenzbeitrag Conference Paper
2016	Materials integration for printed zinc oxide thin-film transistors: Engineering of a fully-printed semiconductor/contact scheme Liu, X.; Wegener, M.; Polster, S.; Jank, M.P.M.; Roosen, A.; Frey, L.	Zeitschriftenaufsatz Journal Article
2016	Ion implantation of polypropylene films for the manufacture of thin film capacitors Häublein, V.; Birnbaum, E.; Ryssel, H.; Frey, L.; Djupmyr, M.	Konferenzbeitrag Conference Paper
2016	Towards highly integrated, automotive power SoCs using capacitors operating at 100 V implemented in TSV Grünler, S.; Rattmann, G.; Erlbacher, T.; Bauer, A.J.; Krach, F.; Frey, L.	Konferenzbeitrag Conference Paper
2016	Post-trench processing of silicon deep trench capacitors for power electronic applications Banzhaf, Stefanie; Schwaiger, Stefan; Erlbacher, Tobias; Bauer, A.J.; Frey, Lothar	Konferenzbeitrag Conference Paper
2016	Wetting and infiltration of nitride bonded silicon nitride by liquid silicon Schneider, V.; Reimann, C.; Friedrich, J.	Zeitschriftenaufsatz Journal Article
2016	Waveguide Bragg gratings in Ormocer hybrid polymers Girschikofsky, Maiko; Förthner, Michael; Rommel, Mathias; Frey, Lothar; Hellmann, Ralf	Zeitschriftenaufsatz Journal Article
2016	Systematic characterization of doping profiles in 4H-SiC by point contact current voltage measurements Kocher, Matthias; Niebauer, Michael; Rommel, Mathias; Haeublein, Volker; Bauer, Anton	Poster
2016	Direct optical stress sensing in semiconductor manufacturing using raman micro-spectrometry Biasio, M. de; Kraft, M.; Roesner, M.; Bergmann, C.; Cerezuela-Barreto, M.; Lewke, D.; Schellenberger, M.	Konferenzbeitrag Conference Paper
2016	Monolithic 3D TSV-based high-voltage, high-temperature capacitors Gruenler, S.; Rattmann, G.; Erlbacher, T.; Bauer, A.J.; Frey, L.	Zeitschriftenaufsatz Journal Article
2016	Quantification and reduction of deformations in multilayer soft-NIL stamps Förthner, Michael; Papenheim, Marc; Rumler, Maximilian; Stumpf, Florian; Baier, Leander; Rommel, Mathias; Schlachter, Florian; Hornung, Michael; Scheer, Hella-Christin; Frey, Lothar	Poster
2016	Stamps for nanoimprint lithography - R&D at Fraunhofer IISB Rommel, Mathias; Rumler, Maximilian; Förthner, Michael; Scharin, Marina; Fader, R.; Schmidt, H.	Vortrag Presentation
2016	Contamination control for wafer container used within 300 mm manufacturing for power microelectronics Schneider, G.; Nguyen, T.Q.; Taubert, M.; Bounouar, J.; Le-Guet, C.; Leibold, A.; Richter, H.; Pfeffer, M.	Konferenzbeitrag Conference Paper
2016	4.5 kV SiC junction barrier schottky diodes with low leakage current and high forward current density Schöck, Johannes; Büttner, Jonas; Rommel, Mathias; Erlbacher, Tobias; Bauer, Anton	Poster
2016	Monitoring of biomarkers in sweat with printed sensors combined with sport wearables Oertel, S.; Jank, M.; Schmitz, B.; Lang, N.	Konferenzbeitrag Conference Paper
2016	Silicon integrated RC snubbers for applications up to 900V with reduced mechanical stress and high manufacturability Krach, Florian; Thielen, Nils; Heckel, Thomas; Bauer, A.J.; Erlbacher, Tobias; Frey, Lothar	Konferenzbeitrag Conference Paper
2016	A model of electric field distribution in gate oxide and JFET-region of 4H-SiC DMOSFETs Benedetto, Luigi di; Licciardo, Gian D.; Erlbacher, Tobias; Bauer, Anton J.; Liguori, R.; Rubino, Alfredo	Zeitschriftenaufsatz Journal Article
2016	A trade-off between nominal forward current density and surge current capability for 4.5kV SiC MPS diodes Huang, Yaren; Erlbacher, Tobias; Buettner, Jonas; Wachutka, Gerhard	Konferenzbeitrag Conference Paper
2016	Innovative monolithic RC-snubber for fast switching power modules Krach, F.; Heckel, T.; Frey, L.; Bauer, A.J.; Erlbacher, T.; März, M.	Konferenzbeitrag Conference Paper
2016	Imaging defect luminescence of 4H-SiC by ultraviolet-photoluminescence Berwian, Patrick; Kaminzky, Daniel; Roßhirt, Katharina; Kallinger, Birgit; Friedrich, Jochen; Oppel, Steffen; Schneider, Adrian; Schütz, Michael	Konferenzbeitrag Conference Paper
2016	Potential of 4H-SiC CMOS for high temperature applications using advanced lateral p-MOSFETs Albrecht, Matthäus; Erlbacher, Tobias; Bauer, A.J.; Frey, Lothar	Konferenzbeitrag Conference Paper
2016	Comparative spatially resolved characterization of a Czochralski-grown silicon crystal by different laser-based imaging techniques Herms, Martin; Wagner, Matthias; Molchanov, Alexander; Rommel, Mathias; Zschorsch, Markus; Würzner, Sindy	Konferenzbeitrag Conference Paper
2016	Ion implanted 4H-SiC UV pin-diodes for solar radiation detection - simulation and characterization Matthus, Christian D.; Erlbacher, Tobias; Burenkov, Alexander; Bauer, A.J.; Frey, Lothar	Konferenzbeitrag Conference Paper
2016	Advanced detection method for polymer residues on semiconductor substrates Richter, H.; Pfitzner, L.; Pfeffer, M.; Bauer, A.; Siegert, J.; Bodner, T.	Konferenzbeitrag Conference Paper
2016	Particle free handling of substrates Samadi, H.; Pfeffer, M.; Altmann, R.; Leibold, A.; Gumprecht, T.; Bauer, A.	Zeitschriftenaufsatz Journal Article
2016	Combination of direct laser writing and soft lithography molds for combined nano- and microfabrication Rumler, Maximilian; Kollmuss, Manuel; Baier, Leander; Michel, Felix; Förthner, Michael; Becker, Marco; Rommel, Mathias; Frey, Lothar	Poster
2016	Modelling of effective minority carrier lifetime in 4H-SiC n-type epilayers Kaminzky, Daniel; Kallinger, Birgit; Berwian, Patrick; Rommel, Mathias; Friedrich, Jochen	Konferenzbeitrag Conference Paper
2016	ATHENIS-3D: Automotive tested high-voltage and embedded non-volatile integrated SoC platform with 3D technology Wachmann, Ewald; Saponara, Sergio; Zambelli, C.; Tisserand, Pierre; Charbonnier, Jean; Erlbacher, Tobias; Grünler, Saeideh; Hartler, C.; Siegert, J.; Chassard, P.; Ton, D.M.; Ferrari, L.; Fanucci, L.	Konferenzbeitrag Conference Paper
2016	Prospects and issues of nanomaterials use in microelectronics Jank, Michael; Bauer, Anton; Frey, Lothar	Poster
2016	Enhancement of the partial discharge inception voltage of DBCs by adjusting the permittivity of the encapsulation Bayer, Christoph Friedrich; Waltrich, Uwe; Soueidan, Amal; Schneider, Richard; Bär, Eberhard; Schletz, Andreas	Konferenzbeitrag Conference Paper
2016	Hybrid polymers processed by substrate conformal imprint lithography for the fabrication of planar Bragg gratings Förthner, Michael; Rumler, Maximilian; Stumpf, Florian; Fader, Robert; Rommel, Mathias; Frey, Lothar; Girschikofsky, Maiko; Belle, Stefan; Hellmann, Ralf; Klein, Jan Jasper	Zeitschriftenaufsatz Journal Article
2016	Drill-down analysis with equipment health monitoring Krauel, Christopher; Weishäupl, Laura; Pfeffer, Markus	Vortrag Presentation
2016	Enhancing partial discharge inception voltage of DBCs by geometrical variations based on simulations of the electric field strength Bayer, Christoph Friedrich; Waltrich, Uwe; Schneider, Richard; Soueidan, Amal; Bär, Eberhard; Schletz, Andreas	Konferenzbeitrag Conference Paper
2016	Simulating wafer bow for integrated capacitors using a multiscale approach Wright, Alan; Krach, Florian; Thielen, Nils; Grünler, Saeideh; Erlbacher, Tobias; Pichler, Peter	Konferenzbeitrag Conference Paper
2016	Metastable defects in proton implanted and annealed silicon Jelinek, Moriz; Laven, Johannes G.; Ganagona, Naveen Goud; Job, Reinhart; Schustereder, Werner; Schulze, Hans-Joachim; Rommel, Mathias; Frey, Lothar	Konferenzbeitrag Conference Paper
2016	Semiconductor equipment assessment - An enabler for production ready equipment Pfeffer, M.; Pfitzner, L.; Bauer, A.	Konferenzbeitrag Conference Paper
2016	Quantification and reduction of deformations in multilayer soft-NIL stamps Förthner, Michael; Papenheim, Marc; Rumler, Maximilian; Stumpf, Florian; Baier, Leander; Rommel, Mathias; Schlachter, Florian; Hornung, Michael; Scheer, Hella-Christin; Frey, Lothar	Poster
2016	Analytical Model and Design of 4H-SiC Planar and Trenched JBS Diodes Di Benedetto, L.; Licciardo, G.D.; Erlbacher, T.; Bauer, A.J.; Bellone, S.	Zeitschriftenaufsatz Journal Article
2016	Conduction loss reduction for bipolar injection field-effect-transistors (BIFET) Hürner, Andreas; Mitlehner, Heinz; Erlbacher, Tobias; Bauer, A.J.; Frey, Lothar	Konferenzbeitrag Conference Paper

Diese Liste ist ein Auszug aus der Publikationsplattform Fraunhofer-Publica

This list has been generated from the publication platform Fraunhofer-Publica

2015

Jahr Year	Titel/Autor:in Title/Author	Publikationstyp Publication Type
2015	Controlling cellular adhesion through micro- or nanopatterning of silicone-based surfaces to improve biomedical devices for in vitro based applications Scharin, Marina; Rommel, Mathias; Dirnecker, Tobias; Stumpf, Florian; Zipfel, J.; Marhenke, J.; Friedrich, O.; Glibert, D.F.; Herrmann, M.; Frey, Lothar	Poster
2015	Tailoring the electrical properties of HfO2 MOS-devices by aluminum doping Paskaleva, Albena; Rommel, Mathias; Hutzler, Andreas; Spassov, Dencho; Bauer, Anton J.	Zeitschriftenaufsatz Journal Article
2015	Comparison of surface relief Bragg gratings fabricated by UV-SCIL and volume index Bragg gratings based on hybrid polymers Förthner, Michael; Rumler, Maximilian; Michel, Felix; Rommel, Mathias; Frey, Lothar; Girschikofsky, Maiko; Belle, Stefan; Hellmann, Ralf; Klein, Jan Jasper	Poster
2015	Large area fabrication of hybrid polymer waveguides for planar Bragg grating sensors using UV-enhanced Substrate Conformal Imprint Lithography (UV-SCIL) Förthner, Michael; Fader, Robert; Rumler, Maximilian; Rommel, Mathias; Frey, Lothar; Girschikofsky, M.; Belle, S.; Hellmann, R.; Klein, Jan Jasper	Poster
2015	Advanced contamination control methods for yield enhancement. YE: Yield Enhancement/Learning Richter, H.; Leibold, A.; Altmann, R.; Doffek, B.; Koebl, J.; Pfeffer, M.; Bauer, A.; Schneider, G.; Cheung, D.	Konferenzbeitrag Conference Paper
2015	Comparison of surface relief Bragg gratings fabricated by UV-SCIL and volume index Bragg gratings based on hybrid polymers Förthner, Michael; Rumler, Maximilian; Michel, Felix; Rommel, Mathias; Frey, Lothar; Girschikofsky, Maiko; Belle, Stefan; Hellmann, Ralf; Klein, Jan Jasper	Poster
2015	Robust double-ring junction termination extension design for high voltage power semiconductor devices based on 4H-SiC Hürner, A.; Benedetto, L. di; Erlbacher, T.; Mitlehner, H.; Bauer, A.J.; Frey, L.	Konferenzbeitrag Conference Paper
2015	Impact of acceptor concentration on electrical properties and density of interface states of 4H-SiC n-metal-oxide-semiconductor field effect transistors studied by Hall effect Ortiz, Guillermo; Strenger, Christian; Uhnevionak, Viktoryia; Burenkov, Alexander; Bauer, Anton J.; Pichler, Peter; Cristiano, Fuccio; Bedel-Pereira, Elena; Mortet, Vincent	Zeitschriftenaufsatz Journal Article
2015	In situ formation of tantalum oxide - PMMA hybrid dielectric thin films for transparent electronic application Valcu, E.E.; Musat, V.; Oertel, S.; Jank, M.P.M.; Leedham, T.	Zeitschriftenaufsatz Journal Article
2015	Nano- and micrometer scale surface topography modification of Si (100) by Ga focused ion beam irradiation Rai, Deepa; Stumpf, Florian; Frey, Lothar; Rommel, Mathias	Poster
2015	Functionalization of PDMS surfaces through micro- or nano-patterning to control the cellular adhesion Scharin, Marina; Häring, Aron; Dirnecker, Tobias; Rommel, Mathias; Marhenke, Julius; Friedrich, O.; Gilbert, D.F.; Herrmann, Martin; Frey, Lothar	Vortrag Presentation
2015	Temperature dependent characterization of bipolar injection field-effect-transistors (BiFET) for determining the short-circuit-capability Hürner, A.; Erlbacher, T.; Mitlehner, H.; Bauer, A.J.; Frey, L.	Konferenzbeitrag Conference Paper
2015	Comparison of silicon and 4H silicon carbide patterning using focused ion beams Veerapandian, Savita Kaliya Perumal; Beuer, Susanne; Rumler, Maximilian; Stumpf, Florian; Thomas, Keith; Pillatsch, Lex; Michler, Johannes; Frey, Lothar; Rommel, Mathias	Zeitschriftenaufsatz Journal Article
2015	Junction formation and current transport mechanisms in hybrid n-Si/PEDOT:PSS solar cells Jäckle, Sara; Mattiza, Matthias; Liebhaber, Martin; Brönstrup, Gerald; Rommel, Mathias; Lips, Klaus; Christiansen, Silke	Zeitschriftenaufsatz Journal Article
2015	Imaging defect luminescence of 4H-SiC by UV-photoluminescence Kaminzky, Daniel; Roßhirt, Katharina; Kallinger, Birgit; Berwian, Patrick; Friedrich, Jochen; Oppel, Steffen; Schneider, Adrian; Schütz, Michael	Vortrag Presentation
2015	Nitridgebundenes Siliziumnitrid: Wiederverwendbare Tiegel für die gerichtete Erstarrung von Silizium Schneider, Veronika	Dissertation Doctoral Thesis
2015	Defect Luminescence Scanner (DLS): Scientific and industrial-scale defect analysis Oppel, Steffen; Schneider, Adrian; Schütz, Michael; Kaminzky, Daniel; Kallinger, Birgit; Weber, Jonas; Krieger, Michael	Vortrag Presentation
2015	Modelling of effective minority carrier lifetimes in 4H-SiC n-type epilayers Kaminzky, Daniel; Kallinger, Birgit; Berwian, Patrick; Rommel, Mathias; Friedrich, Jochen	Poster
2015	Bragg gratings in imprinted Ormocer waveguides Girschikofsky, M.; Förthner, M.; Rommel, Mathias; Frey, L.; Hellmann, R.	Konferenzbeitrag Conference Paper
2015	Metastable defects in proton implanted and annealed silicon Jelinek, Moriz; Laven, Johannes G.; Ganagona, N.; Job, R.; Schustereder, Werner; Schulze, Hans-Joachim; Rommel, Mathias; Frey, Lothar	Poster
2015	Thin film metallization of PDMS with improved adhesion properties for micro electrode arrays Scharin, Marina; Newcomer, Kate; Dirnecker, Tobias; Al-Naimi, A.; Rumler, Maximilian; Rommel, Mathias; Frey, Lothar	Poster
2015	Classification and key feature extraction for equipment health monitoring Krauel, Christopher; Weishäupl, Laura; Petzold, Lisa; Pfeffer, Markus; Bauer, Anton	Vortrag Presentation
2015	Nanoelectronics research gaps and recommendations. Editorial Galatsis, K.; Gargini, P.; Hiramoto, T.; Beernaert, D.; DeKeersmaecker, R.; Pelka, J.; Pfitzner, L.	Editorial
2015	A DLTS study of hydrogen doped czochralski-grown silicon Jelinek, Moriz; Laven, Johannes G.; Kirnstoetter, Stefan; Schustereder, Werner; Schulze, Hans-Joachim; Rommel, Mathias; Frey, Lothar	Zeitschriftenaufsatz Journal Article
2015	Semiconductor equipment assessment - an enabler for production ready equipment Pfeffer, M.; Pfitzner, L.; Bauer, A.	Konferenzbeitrag Conference Paper
2015	Imaging defect luminescence measurements of 4H-SiC by UV-PL Kaminzky, Daniel; Roßhirt, Katharina; Kallinger, Birgit; Berwian, Patrick; Friedrich, Jochen; Oppel, Steffen; Schneider, Adrian; Schütz, Michael	Vortrag Presentation
2015	Tunable conduction type of solution-processed germanium nanoparticle based field effect transistors and their inverter integration Meric, Z.; Mehringer, C.; Karpstein, N.; Jank, M.P.M.; Peukert, W.; Frey, L.	Zeitschriftenaufsatz Journal Article
2015	Comprehensive study of the electron scattering mechanisms in 4H-SiC MOSFETs Uhnevionak, Viktoryia; Burenkov, Alexander; Strenger, Christian; Ortiz, Guillermo; Bedel-Pereira, Elena; Mortet, Vincent; Cristiano, Fuccio; Bauer, Anton J.; Pichler, Peter	Zeitschriftenaufsatz Journal Article
2015	Improved electrical behavior of ZrO2-based MIM structures by optimizing the O3 oxidation pulse time Paskaleva, A.; Weinreich, W.; Bauer, A.J.; Lemberger, M.; Frey, L.	Zeitschriftenaufsatz Journal Article
2015	Modelling of the electrochemical etch stop with high reverse bias across pn-junctions Szwarc, R.; Frey, L.; Weber, H.; Moder, I.; Erlbacher, T.; Rommel, Mathias; Bauer, A.J.	Konferenzbeitrag Conference Paper
2015	Impact of post-trench processing on the electrical characteristics of 4H-SiC trench-MOS structures with thick top and bottom oxides Banzhaf, C.T.; Grieb, M.; Rambach, M.; Bauer, A.J.; Frey, L.	Konferenzbeitrag Conference Paper
2015	Defined area polymer working stamp manufacture for S&R UV-NIL by direct laser writing Rumler, Maximilian; Michel, Felix; Becker, Marco; Baier, Leander; Förthner, Michael; Rommel, Mathias; Schleunitz, Arne; Klein, Jan Jasper	Poster
2015	Influence of annealing, oxidation and doping on conduction-band near interface traps in 4H-SiC characterized by low temperature conductance measurements Noll, S.; Rambach, M.; Grieb, M.; Scholten, D.; Bauer, A.; Frey, L.	Konferenzbeitrag Conference Paper
2015	UV-NIL R&D at Fraunhofer IISB. Past examples and future challenges Rommel, Mathias; Rumler, Maximilian; Förthner, Michael; Scharin, Marina; Fader, Robert; Schmitt, Holger	Vortrag Presentation
2015	Thermal laser separation - a novel dicing technology fulfilling the demands of volume manufacturing of 4H-SiC devices Lewke, D.; Dohnke, K.O.; Zühlke, H.U.; Cerezuela Barret, M.; Schellenberger, M.; Bauer, A.; Ryssel, H.	Konferenzbeitrag Conference Paper
2015	Atomic scale characterization of SiO2/4H-SiC interfaces in MOSFETs devices Beltran, A.M.; Duguay, S.; Strenger, C.; Bauer, A.J.; Cristiano, F.; Schamm-Chardon, S.	Zeitschriftenaufsatz Journal Article
2015	Thin film metallization of PDMS with improved adhesion properties for micro electrode arrays Scharin, Marina; Newcomer, Kate; Al-Naimi, Abd; Dirnecker, Tobias; Rumler, Maximilian; Rommel, Mathias; Frey, Lothar	Poster
2015	Silicon nitride, a high potential dielectric for 600 V integrated RC-snubber applications Krach, F.; Schwarzmann, H.; Bauer, A.J.; Erlbacher, T.; Frey, L.	Zeitschriftenaufsatz Journal Article
2015	Characterization and application of nano- and microstructured PDMS surfaces for manipulation of cells Scharin, Marina; Gilbert, D.; Rommel, Mathias; Dirnecker, Tobias; Stumpf, Florian; Haering, A.; Friedrich, O.; Frey, Lothar	Vortrag Presentation
2015	Nachbearbeitung von teilgetrennten Bauelementen in der Halbleitertechnik Lewke, Dirk; Schellenberger, Martin	Studie Study
2015	Particle free handling of substrates Samadi, H.; Pfeffer, M.; Altmann, R.; Leibold, A.; Gumprecht, T.; Bauer, A.	Konferenzbeitrag Conference Paper
2015	Modeling of ion drift in 4H-SiC-based chemical MOSFET sensors Erlbacher, T.; Schwarzmann, H.; Bauer, A.J.; Döhler, G.H.; Schreivogel, M.; Lutz, T.; Guillén, F.H.; Graf, J.; Fix, R.; Frey, L.	Zeitschriftenaufsatz Journal Article
2015	Improvement of 4H-SiC material quality Kallinger, Birgit; Kaminzky, Daniel; Rommel, Mathias; Berwian, Patrick; Friedrich, Jochen	Vortrag Presentation
2015	Bioactivation and functionalization of PDMS surfaces to control cellular adhesion behaviour by micro- or nanopatterning and plasma treatment Scharin, Marina; Rommel, Mathias; Dirnecker, Tobias; Stumpf, Florian; Zipfel, J.; Marhenke, J.; Friedrich, O.; Gilbert, D.F.; Herrmann, M.; Frey, Lothar	Poster
2015	Experimental characterisation of FIB induced lateral damage on silicon carbide samples Stumpf, Florian; Rumler, Maximilian; Abu Quba, Abd Alaziz; Singer, Philipp; Rommel, Mathias	Poster
2015	Device optimization and application study of low cost printed temperature sensor for mobile and stationary battery based Energy Storage Systems Grosch, J.; Teuber, E.; Jank, M.; Lorentz, V.; März, M.; Frey, L.	Konferenzbeitrag Conference Paper
2015	Current conduction mechanism of MIS devices using multidimensional minimization system program Rouag, N.; Ouennoughi, Zahir; Rommel, Mathias; Murakami, Katsuhisa; Frey, Lothar	Zeitschriftenaufsatz Journal Article
2015	Characterization and application of nano- and microstructured silicon-polymer-based surfaces for manipulation of cells Scharin, Marina; Haering, Aaron; Gilbert, D.; Dirnecker, Tobias; Stumpf, Florian; Rommel, Mathias; Friedrich, Oliver; Frey, Lothar	Poster
2015	Optical bragg gratings in inorganic-organic hybrid polymers for highly sensitive temperature measurements Girschikofsky, Maiko; Belle, Stefan; Hellmann, Ralf; Förthner, Michael; Frey, Lothar; Rommel, Mathias; Fader, Robert	Konferenzbeitrag Conference Paper
2015	Vorrichtung und Verfahren zur Überbrückung eines elektrischen Energiespeichers Erlbacher, Tobias; Lorentz, Vincent; Waller, Reinhold; Rattmann, Gudrun	Patent
2015	Modeling of the electrochemical etch stop with high reverse bias across pn-junctions Szwarc, Robert; Frey, Lothar; Weber, Hans; Moder, Iris; Erlbacher, Tobias; Rommel, Mathias; Bauer, A.J.	Vortrag Presentation
2015	SuperLIB: Smart Battery Management of a Dual Cell Architecture for Electric Vehicles Kurtulus, C.; Krabb, P.; Hennige, V.; Räsänen, M.; Salminen, J.; Nuutinen, M.; Grosch, J.; Jank, M.; Teuber, E.; Lorentz, V.; Petit, M.; Martin, J.; Silvi, J.-L.; Omar, N.; Widanage, D.	Konferenzbeitrag Conference Paper
2015	High-voltage monolithic 3D capacitors based on through-silicon-via technology Grünler, Saeideh; Rattmann, Gudrun; Erlbacher, Tobias; Bauer, Anton; Frey, Lothar	Poster

Diese Liste ist ein Auszug aus der Publikationsplattform Fraunhofer-Publica

This list has been generated from the publication platform Fraunhofer-Publica

2014

Jahr Year	Titel/Autor:in Title/Author	Publikationstyp Publication Type
2014	Reliability of monolithic RC-snubbers in MOS-based power modules Erlbacher, T.; Schwarzmann, H.; Krach, F.; Bauer, A.J.; Berberich, S.E.; Kasko, I.; Frey, L.	Konferenzbeitrag Conference Paper
2014	Large area fabrication of plasmonic color filters using UV-SCIL Rumler, Maximilian; Fader, Robert; Förthner, Michael; Haas, Anke; Rommel, Mathias; Bauer, Anton; Frey, Lothar	Vortrag Presentation
2014	Investigation of trenched and high temperature annealed 4H-SiC Banzhaf, C.T.; Grieb, M.; Trautmann, A.; Bauer, A.J.; Frey, L.	Konferenzbeitrag Conference Paper
2014	Large area fabrication of plasmonic color filters using UV-SCIL Rumler, Maximilian; Fader, R.; Förthner, M.; Haas, A.; Rommel, Mathias; Bauer, A.J.; Frey, L.	Vortrag Presentation
2014	Optical polymers with tunable refractive index for nanoimprint technologies Fader, Robert; Landwehr, Johannes; Rumler, Maximilian; Förthner, Michael; Rommel, Mathias; Bauer, A.J.; Frey, Lothar; Simon, B.; Fodor, B.; Petrik, Peter; Winter, Benjamin; Spiecker, Erdmann	Poster
2014	Comparison of carrier lifetime measurements and mapping in 4H SiC using time resolved photoluminescence and m-PCD Kallinger, Birgit; Rommel, Mathias; Lilja, Louise; Hassan, Jawad ul; Booker, Ian; Janzen, Erik; Bergman, Peder	Konferenzbeitrag Conference Paper
2014	MeV-proton channeling in crystalline silicon Jelinek, Moriz; Schustereder, Werner; Kirnstoetter, S.; Laven, Johannes G.; Schulze, Hans-Joachim; Rommel, Mathias; Frey, Lothar	Konferenzbeitrag Conference Paper
2014	Lateral Power Transistors in Integrated Circuits Erlbacher, T.	Buch Book
2014	HCl assisted growth of thick 4H-SiC epilayers for bipolar devices Kallinger, Birgit; Ehlers, Christian; Berwian, Patrick; Rommel, Mathias; Friedrich, Jochen	Konferenzbeitrag Conference Paper
2014	Thickness mapping of high-k dielectrics at the nanoscale Trapnauskas, Justinas; Rommel, Mathias; Bauer, Anton J.; Frey, Lothar	Zeitschriftenaufsatz Journal Article
2014	Nanoscale characterization of high-k dielectrics by electrical SPM methods Rommel, Mathias	Vortrag Presentation
2014	Temperature and electrical field dependence of the ambipolar mobility in n-doped 4H-SiC Hürner, A.; Bonse, C.; Clemmer, G.; Kallinger, B.; Heckel, T.; Erlbacher, T.; Mitlehner, H.; Häublein, V.; Bauer, A.J.; Frey, L.	Konferenzbeitrag Conference Paper
2014	Optical characterization of patterned thin films Rosu, D.; Petrik, P.; Rattmann, G.; Schellenberger, M.; Beck, U.; Hertwig, A.	Zeitschriftenaufsatz Journal Article
2014	Automated tool for measuring nanotopography of 300 mm wafers at early stages of wafer production Tröger, B.; Mühlig, A.; Fries, T.; Bauer, S.; Wihr, H.; Riedel, F.; Lewke, D.; Schellenberger, M.	Konferenzbeitrag Conference Paper
2014	High-mobility metal-oxide thin-film transistors by spray deposition of environmentally friendly precursors Oertel, S.; Jank, M.P.M.; Teuber, E.; Bauer, A.J.; Frey, L.	Konferenzbeitrag Conference Paper
2014	Enabling large area and high throughput roll-to-roll NIL by novel inkjetable and photo-curable NIL-resists Thesen, Manuel; Rumler, Maximilian; Schlachter, Florian; Grützner, Susanne; Moormann, Christian; Rommel, Mathias; Nees, Dieter; Ruttloff, Stephan; Pfirrmann, Stefan; Vogler, Marko; Schleunitz, Arne; Grützner, Gabi	Konferenzbeitrag Conference Paper
2014	Approaches to calculate the dielectric function of ZnO around the band gap Agocs, E.; Fodor, B.; Pollakowski, B.; Beckhoff, B.; Nutsch, A.; Jank, M.; Petrik, P.	Zeitschriftenaufsatz Journal Article
2014	Sol-gel preparation of ZrO2-PMMA for thin films transistors Valcu, E.E.; Musat, V.; Jank, M.; Oertel, S.	Zeitschriftenaufsatz Journal Article
2014	Feasibility evaluation of virtual metrology for the example of a trench etch process Roeder, G.; Winzer, S.; Schellenberger, M.; Jank, S.; Pfitzner, L.	Zeitschriftenaufsatz Journal Article
2014	Out-diffusion of cesium and rubidium from amorphized silicon during solid-phase epitaxial regrowth Maier, R.; Häublein, V.; Ryssel, H.	Konferenzbeitrag Conference Paper
2014	High quality and high speed cutting of 4H-SiC JFET wafers including PCM structures by using thermal laser separation Lewke, D.; Koitzsch, M.; Dohnke, K.O.; Schellenberger, M.; Zuehlke, H.-U.; Rupp, R.; Pfitzner, L.; Ryssel, H.	Konferenzbeitrag Conference Paper
2014	Optical polymers with tunable refractive index for nanoimprint technologies Landwehr, Johannes; Fader, Robert; Rumler, Maximilian; Rommel, Mathias; Bauer, Anton J.; Frey, Lothar; Simon, B.; Fodor, B.; Petrik, Peter; Schiener, A.; Winter, Benjamin; Spiecker, Erdmann	Zeitschriftenaufsatz Journal Article
2014	The Factory Integration Roadmap in Semiconductor manufacturing Moyne, J.; Schellenberger, M.; Pfitzner, L.	Konferenzbeitrag Conference Paper
2014	A DLTS study of hydrogen doped Czochralski-grown silicon Jelinek, Moriz; Laven, Johannes G.; Kirnstoetter, S.; Schustereder, Werner; Schulze, Hans-Joachim; Rommel, Mathias; Frey, Lothar	Poster
2014	Inkjetable and photo-curable resists for large-area and high-throughput roll-to-roll nanoimprint lithography Thesen, M.W.; Nees, D.; Ruttloff, S.; Rumler, Maximilian; Rommel, Mathias; Schlachter, F.; Grützner, S.; Vogler, M.; Schleunitz, A.; Grützner, G.	Zeitschriftenaufsatz Journal Article
2014	Effect of shallow n-doping on field effect mobility in p-doped channels of 4H-SiC MOS field effect transistors Noll, S.; Rambach, M.; Grieb, M.; Scholten, D.; Bauer, A.J.; Frey, L.	Konferenzbeitrag Conference Paper
2014	Hall factor calculation for the characterization of transport properties in n-channel 4H-SiC MOSFETs Uhnevionak, U.; Burenkov, A.; Strenger, C.; Mortet, V.; Bedel-Peireira, E.; Cristiano, F.; Bauer, A.J.; Pichler, Peter	Konferenzbeitrag Conference Paper
2014	A new method to increase the doping efficiency of proton implantation in a high-dose regime Jelinek, Moriz; Laven, Johannes G.; Job, R.; Schustereder, Werner; Schulze, Hans-Joachim; Rommel, Mathias; Frey, Lothar	Konferenzbeitrag Conference Paper
2014	Experimental analysis of bipolar SiC-devices for future energy distribution systems Huerner, A.; Mitlehner, H.; Erlbacher, T.; Bauer, A.J.; Frey, L.	Konferenzbeitrag Conference Paper
2014	Systematic analysis of the high- and low-field channel mobility in lateral 4H-SiC MOSFETs Strenger, C.; Uhnevionak, V.; Mortet, V.; Ortiz, G.; Erlbacher, T.; Burenkov, A.; Bauer, A.J.; Cristiano, F.; Bedel-Pereira, E.; Pichler, P.; Ryssel, H.; Frey, L.	Konferenzbeitrag Conference Paper
2014	Comparison of patterning silicon and silicon carbide using focused ion beam Veerapandian, S.K.P.; Beuer, Susanne; Rumler, Maximilian; Stumpf, Florian; Thomas, Keith; Pillatsch, L.; Michler, Johannes; Frey, Lothar; Rommel, Mathias	Poster
2014	Pulsed direct flame deposition and thermal annealing of transparent amorphous indium zinc oxide films as active layers in field effect transistors Kilian, D.; Polster, S.; Vogeler, I.; Jank, M.P.M.; Frey, L.; Peukert, W.	Zeitschriftenaufsatz Journal Article
2014	Silicon carbide in power electronics: Overcoming the obstacle of bipolar degradation Kallinger, Birgit; Ehlers, Christian; Berwian, Patrick; Friedrich, Jochen; Rommel, Mathias	Vortrag Presentation
2014	Large area fabrication of hybrid polymer waveguides for planar Bragg grating sensors using UV-enhanced Substrate Conformal Imprint Lithography (UV-SCIL) Förthner, Michael; Fader, Robert; Rumler, Maximilian; Rommel, Mathias; Frey, Lothar; Girschikofsky, Maiko; Belle, Stefan; Hellmann, Ralf; Klein, Jan Jasper	Poster
2014	NanoSPV - SPM Technique for the Quantitative Measurement of Minority Charge Carrier Diffusion Lengths with High Spatial Resolution Stumpf, Florian; Rommel, Mathias; Bauer, Anton; Frey, Lothar; Hitzel, Frank; Stadelmann, Anja; Bartel, Til	Vortrag Presentation
2014	DLTS characterization of proton-implanted silicon under varying annealing conditions Laven, J.G.; Jelinek, M.; Job, R.; Schustereder, W.; Schulze, H.-J.; Rommel, M.; Frey, L.	Zeitschriftenaufsatz Journal Article
2014	Bioactivation of plane and patterned PDMS thin films by wettability engineering Scharin, Marina; Rommel, Mathias; Dirnecker, Tobias; Marhenke, Julius; Herrmann, Benjamin; Rumler, Maximilian; Fader, Robert; Frey, Lothar; Herrmann, Martin	Zeitschriftenaufsatz Journal Article
2014	Modification of polypropylene films for thin film capacitors by ion implantation Häublein, V.; Birnbaum, E.; Ryssel, H.; Frey, L.; Grimm, W.	Konferenzbeitrag Conference Paper
2014	Deep-level defects in high-dose proton implanted and high-temperature annealed silicon Jelinek, Moriz; Laven, Johannes G.; Rommel, Mathias; Schustereder, Werner; Schulze, Hans-Joachim; Frey, Lothar; Job, R.	Konferenzbeitrag Conference Paper
2014	Structure placement accuracy of wafer level stamps for substrate conformal imprint lithography Fader, Robert; Förthner, Michael; Rumler, Maximilian; Rommel, Mathias; Bauer, A.J.; Frey, Lothar; Verschuuren, Marc; Butschke, Jörg; Irmscher, Mathias; Storace, Eleonora; Ji, Ran; Schömbs, Ulrike	Poster
2014	Impact of fabrication process on electrical properties and on interfacial density of states in 4H-SiC n-MOSFETs studied by hall effect Ortiz, Guillermo; Mortet, Vincent; Strenger, Christian; Uhnevionak, Viktoryia; Burenkov, Alexander; Bauer, A.J.; Pichler, Peter; Cristiano, Fuccio; Bedel-Pereira, Elena	Konferenzbeitrag Conference Paper
2014	NanoSPV - SPM Technique for Measuring Minority Charge Carrier Diffusion Lengths with High Spatial Resolution Stumpf, Florian; Rommel, Mathias; Bauer, A.J.; Frey, L.; Hitzel, F.; Stadelmann, A.	Vortrag Presentation
2014	Optical polymers with tunable refractive index for nanoimprint technologies Fader, Robert; Landwehr, Johannes; Rumler, Maximilian; Rommel, Mathias; Bauer, A.J.; Frey, Lothar; Simon, B.; Fodor, B.; Petrik, Peter; Schiener, A.; Winter, Benjamin; Spiecker, Erdmann	Poster
2014	Process development for nanoimprint at Fraunhofer IISB Fader, Robert; Rumler, Maximilian; Scharin, Marina; Förthner, Michael; Rommel, Mathias	Vortrag Presentation
2014	Influence of diverse post-trench processes on the electrical performance of 4H-SiC MOS structures Banzhaf, C.T.; Grieb, M.; Trautmann, A.; Bauer, A.J.; Frey, L.	Konferenzbeitrag Conference Paper
2014	Nanoscale characterization of TiO2 films grown by atomic layer deposition on RuO2 electrodes Murakami, Katsuhisa; Rommel, Mathias; Hudec, Boris; Rosová, Alica; Hus&ekova&, Krístina; Dobroc&ka, Edmund; Rammula, Raul; Kasikov, Arne; Han, Jeong Hwan; Lee, Woongkyu; Song, Seul Ji; Paskaleva, Albena; Bauer, Anton J.; Frey, Lothar; Fröhlich, Karol; Aarik, Jaan; Hwang, Cheol Seong	Zeitschriftenaufsatz Journal Article
2014	New Defect Luminescence Scanner for Inline Control of Material Quality Kallinger, Birgit; Kaminzky, Daniel; Berwian, Patrick; Oppel, Steffen; Schütz, Michael; Schneider, Adrian; Krieger, Michael; Weber, Jonas; Friedrich, Jochen	Poster
2014	Verfahren zur Herstellung einer diffusionshemmenden Beschichtung, Tiegel zum Schmelzen und/oder Kristallisieren von Nicht-Eisen Metallen sowie Verwendungszwecke Reimann, Christian; Obermeier, Sebastian; Trempa, Matthias; Schneider, Veronika; Friedrich, Jochen	Patent

Diese Liste ist ein Auszug aus der Publikationsplattform Fraunhofer-Publica

This list has been generated from the publication platform Fraunhofer-Publica

2013

Jahr Year	Titel/Autor:in Title/Author	Publikationstyp Publication Type
2013	Leistungselektronik und elektrische Antriebstechnik März, Martin; Eilers, Dirk; Gillner, Arnold; Schliwinski, Hans-Jürgen; Schneider-Ramelow, Martin; Schubert, Thomas; Partsch, Uwe; Paschen, Uwe; Wilken, Ralph	Aufsatz in Buch Book Article
2013	Bimodal CAFM TDDB distributions in polycrystalline HfO2 gate stacks: The role of the interfacial layer and grain boundaries Iglesias, V.; Martin-Martinez, J.; Porti, M.; Rodriguez, R.; Nafria, M.; Aymerich, X.; Erlbacher, T.; Rommel, Mathias; Murakami, K.; Bauer, A.J.; Frey, L.; Bersuker, G.	Zeitschriftenaufsatz Journal Article
2013	Improving electric behavior and simplifying production of Si-based diodes by using thermal laser separation Koitzsch, M.; Lewke, D.; Schellenberger, M.; Pfitzner, L.; Ryssel, H.; Kolb, R.; Zühlke, H.-U.	Konferenzbeitrag Conference Paper
2013	Functional epoxy polymer for direct nano-imprinting of micro-optical elements Fader, R.; Landwehr, J.; Rumler, M.; Rommel, M.; Bauer, A.J.; Frey, L.; Völkel, R.; Brehm, M.; Kraft, A.	Zeitschriftenaufsatz Journal Article
2013	Micromolding of micropatterned PDMS surfaces to define the adhesive behavior of human cells in vitro Scharin, Marina; Rommel, Mathias; Dirnecker, Tobias; Marhenke, J.; Rumler, Maximilian; Herrmann, Benjamin; Fader, Robert; Frey, Lothar; Herrmann, Martin	Poster
2013	Detailed leakage current analysis of metal-insulator-metal capacitors with ZrO2, ZrO2/SiO2/ZrO2, and ZrO2/Al2O3/ZrO2 as dielectric and TiN electrodes Weinreich, W.; Shariq, A.; Seidel, K.; Sundqvist, J.; Paskaleva, A.; Lemberger, M.; Bauer, A.J.	Zeitschriftenaufsatz Journal Article
2013	Electrical impact of the aluminum p-implant annealing on lateral MOSFET transistors on 4H-SiC n-epi Noll, S.; Scholten, D.; Grieb, M.; Bauer, A.J.; Frey, L.	Konferenzbeitrag Conference Paper
2013	Characterization of diverse gate oxides on 4H-SiC 3D trench-MOS structures Banzhaf, C.T.; Grieb, M.; Trautmann, A.; Bauer, A.J.; Frey, L.	Konferenzbeitrag Conference Paper
2013	On the temperature dependence of the hall factor in n-channel 4H-SiC MOSFETs Uhnevionak, V.; Burenkov, A.; Strenger, C.; Bauer, A.J.; Pichler, P.	Konferenzbeitrag Conference Paper
2013	Verfahren und Vorrichtung zum parallelen Trennen eines Werkstücks in mehrere Teilstücke Lorenz, Jürgen; Koitzsch, Matthias; Schellenberger, Martin; Lewke, Dirk; Gumprecht, Thomas	Patent
2013	Influence of parasitic capacitances on conductive AFM I-V measurements and approaches for its reduction Rommel, Mathias; Jambreck, Joachim D.; Lemberger, Martin; Bauer, Anton J.; Frey, Lothar; Murakami, Katsuhisa; Richter, Christoph; Weinzierl, Philipp	Zeitschriftenaufsatz Journal Article
2013	Influence of ion implantation in SiC on the channel mobility in lateral n-channel MOSFETs Strenger, C.; Uhnevionak, V.; Burenkov, A.; Bauer, A.J.; Pichler, P.; Erlbacher, T.; Ryssel, H.; Frey, L.	Konferenzbeitrag Conference Paper
2013	Accuracy of wafer level alignment with substrate conformal imprint lithography Fader, Robert; Rommel, Mathias; Bauer, Anton J.; Rumler, Maximilian; Frey, Lothar; Verschuuren, Marcus Antonius; Laar, Robert van de; Ji, Ran; Schömbs, Ulrike	Zeitschriftenaufsatz Journal Article
2013	Comparison of carrier lifetime measurements and mapping using time resolved photoluminescence and µ-PCD Kallinger, Birgit; Rommel, Mathias; Lilja, L.; Hassan, J.; Booker, Ian; Janzen, Erik; Bergman, J.P.	Poster
2013	Influence of epilayer thickness and structural defects on the minority carrier lifetime in 4H-SiC Kallinger, Birgit; Berwian, Patrick; Friedrich, Jochen; Azizi, Maral; Rommel, Mathias; Hecht, Christian; Friedrichs, Peter	Konferenzbeitrag Conference Paper
2013	Melt depth and time variations during pulsed laser thermal annealing with one and more pulses Hackenberg, Moritz; Rommel, Mathias; Rumler, M; Lorenz, Jürgen; Pichler, Peter; Huet, Karim; Negru, Razvan; Fisicaro, Giuseppe; Magna, Antonino la; Taleb, Nadjib; Quillec, M.	Konferenzbeitrag Conference Paper
2013	Correlation of interface characteristics to electron mobility in channel-implanted 4H-SiC MOSFETs Strenger, C.; Uhnevionak, V.; Burenkov, A.; Bauer, A.J.; Mortet, V.; Bedel-Pereira, E.; Cristiano, F.; Krieger, M.; Ryssel, H.	Konferenzbeitrag Conference Paper
2013	Alloying of ohmic contacts to n-type 4H-SiC via laser irradiation Hürner, A.; Schlegl, T.; Adelmann, B.; Mitlehner, H.; Hellmann, R.; Bauer, A.J.; Frey, L.	Konferenzbeitrag Conference Paper
2013	Evaluation of resistless Ga+ beam lithography for UV NIL stamp fabrication Rumler, Maximilian; Fader, Robert; Haas, Anke; Rommel, Mathias; Bauer, Anton; Frey, Lothar	Zeitschriftenaufsatz Journal Article
2013	Characterization of thin ZnO films by vacuum ultra-violet reflectometry Gumprecht, T.; Petrik, P.; Roeder, G.; Schellenberger, M.; Pfitzner, L.; Pollakowski, B.; Beckhoff, B.	Konferenzbeitrag Conference Paper
2013	Characterization of ZnO structures by optical and X-ray methods Petrik, P.; Pollakowski, B.; Zakel, S.; Gumprecht, T.; Beckhoff, B.; Lemberger, M.; Labadi, Z.; Baji, Z.; Jank, M.; Nutsch, A.	Zeitschriftenaufsatz Journal Article
2013	HCl assisted growth of thick 4H-SiC epilayers for bipolar devices Kallinger, Birgit; Ehlers, Christian; Berwian, Patrick; Rommel, Mathias; Friedrich, Jochen	Poster
2013	Laser alloying nickel on 4H-silicon carbide substrate to generate ohmic contacts Adelmann, B.; Hürner, A.; Schlegel, T.; Bauer, A.J.; Frey, L.; Hellmann, R.	Zeitschriftenaufsatz Journal Article
2013	Advanced Vacuum Wafer Drying for Thermal Laser Separation Dicing Assessment. Results from European collaborative SEAL project Le Barillec, Olivier; Davenet, Magali; Bellet, B.; Koitzsch, Matthias; Lewke, Dirk; Schellenberger, Martin; Zühlke, Hans-Ulrich	Konferenzbeitrag Conference Paper
2013	Virtual metrology for prediction of etch depth in a trench etch process Roeder, G.; Schellenberger, M.; Pfitzner, L.; Winzer, S.; Jank, S.	Konferenzbeitrag Conference Paper
2013	Surface modification of flexible plain and microstructured hard and soft PDMS-thin films by plasma treatment and layer deposition for improved usability for biomedical applications Scharin, Marina; Rommel, Mathias; Dirnecker, Tobias; Rumler, Maximilian; Fader, Robert; Bauer, A.J.; Frey, Lothar; Hermman, Martin	Poster
2013	Verification of near-interface traps models by electrical measurements on 4H-SiC n-channel MOSFETs Uhnevionak, V.; Strenger, C.; Burenkov, A.; Mortet, V.; Bedel-Pereira, E.; Cristiano, F.; Bauer, A.; Pichler, P.	Konferenzbeitrag Conference Paper
2013	Hall effect characterization of 4H-SiC MOSFETs: Influence of nitrogen channel implantation Mortet, V.; Bedel-Pereira, E.; Bobo, J.F.; Cristiano, F.; Strenger, C.; Uhnevionak, V.; Burenkov, A.; Bauer, A.J.	Konferenzbeitrag Conference Paper
2013	Patterning flat and tilted 4H-SiC by Ga+ resistless lithography and subsequent reactive ion etching Beuer, Susanne; Rommel, Mathias; Rumler, Maximilian; Haas, Anke; Bauer, A.J.; Frey, Lothar	Poster
2013	Full wafer nanotopography analysis on rough surfaces using stitched white light interferometry images Lewke, D.; Schellenberger, M.; Pfitzner, L.; Fries, T.; Tröger, B.; Muehlig, A.; Riedel, F.; Bauer, S.; Wihr, H.	Konferenzbeitrag Conference Paper
2013	Processing of silicon nanostructures by Ga+ resistless lithography and reactive ion etching Rommel, M.; Rumler, M.; Haas, A.; Bauer, A.J.; Frey, L.	Zeitschriftenaufsatz Journal Article
2013	Structural properties of as deposited and annealed ZrO2 influenced by atomic layer deposition, substrate, and doping Weinreich, W.; Wilde, L.; Müller, J.; Sundqvist, J.; Erben, E.; Heitmann, J.; Lemberger, M.; Bauer, A.J.	Zeitschriftenaufsatz Journal Article
2013	Laser melting of nanoparticulate transparent conductive oxide thin films Baum, M.; Polster, S.; Jank, M.P.M.; Alexeev, I.; Frey, L.; Schmidt, M.	Zeitschriftenaufsatz Journal Article
2013	Comparative study of n-LIGBT and n-LDMOS structures on 4H-SiC Häublein, V.; Temmel, G.; Mitlehner, H.; Rattmann, G.; Strenger, C.; Hürner, A.; Bauer, A.J.; Ryssel, H.; Frey, L.	Konferenzbeitrag Conference Paper
2013	Accuracy of wafer level alignment with substrate conformal imprint lithography Fader, Robert; Rumler, M.; Rommel, Mathias; Bauer, A.J.; Frey, L.; Verschuuren, M.A.; Laar, R. van de; Ji, R.; Schömbs, U.	Vortrag Presentation
2013	Innovative balancing, heating and temperature sensing element for automotive batteries Filimon, R.; Grosch, J.; Teuber, E.; Jank, M.; Lorentz, V.; Wenger, M.; Giegerich, M.; März, M.; Frey, L.	Konferenzbeitrag Conference Paper
2013	Practical aspects of virtual metrology and predictive maintenance model development and optimization Schöpka, U.; Roeder, G.; Mattes, A.; Schellenberger, M.; Pfeffer, M.; Pfitzner, L.; Scheibelhofer, P.	Konferenzbeitrag Conference Paper
2013	Simulation and design optimization of transparent heaters for spectroscopic micro cells Völlm, H.; Herrmann, J.; Maier, R.; Feili, D.; Häublein, V.; Ryssel, H.; Seidel, H.	Konferenzbeitrag Conference Paper
2013	Evaluation of UV-SCIL resists for structure transfer using plasma etching Rumler, Maximilian; Rusch, O.; Fader, Robert; Haas, Anke; Rommel, Mathias; Bauer, A.J.; Frey, Lothar; Brehm, Markus; Kraft, Andreas	Poster
2013	Life time of flexible PDMS stamps for UV-enhanced substrate conformal imprint lithography (SCIL) Fader, Robert; Rumler, M.; Rommel, Mathias; Bauer, A.J.; Frey, L.; Brehm, M.; Kraft, A.; Reboud, V.; Landis, S.	Vortrag Presentation

Diese Liste ist ein Auszug aus der Publikationsplattform Fraunhofer-Publica

This list has been generated from the publication platform Fraunhofer-Publica

2012

Jahr Year	Titel/Autor:in Title/Author	Publikationstyp Publication Type
2012	Novel cost-efficient contactless distributed monitoring concept for smart battery cells Lorentz, V.R.H.; Wenger, M.M.; Grosch, J.L.; Giegerich, M.; Jank, M.P.M.; März, M.; Frey, L.	Konferenzbeitrag Conference Paper
2012	Measurement strategy for dielectric ultra-thin film characterization by vacuum ultra-violet reflectometry Gumprecht, T.; Roeder, G.; Schellenberger, M.; Pfitzner, L.	Konferenzbeitrag Conference Paper
2012	Assessment of a FOUP conditioning equipment for advanced semiconductor application Otto, M.; Rioufrays, S.; Favre, A.; Leibold, A.; Altmann, R.; Gennaro, S.; Dell'Anna, R.; Canteri, R.; Pfitzner, L.	Konferenzbeitrag Conference Paper
2012	Solid-phase epitaxy of silicon amorphized by implantation of the alkali elements rubidium and cesium Maier, R.; Häublein, V.; Ryssel, H.; Völlm, H.; Feili, D.; Seidel, H.; Frey, L.	Konferenzbeitrag Conference Paper
2012	Eletrisches Überbrückungselement, insbesondere für Speicherzellen eines Energiespeichers Dorp, Joachim vom; Erlbacher, Tobias; Frey, L.	Patent
2012	Evaluation of resistless Ga+ beam lithography for UV-NIL stamp fabrication Rumler, Maximilian; Fader, Robert; Haas, Anke; Rommel, Mathias; Bauer, A.J.; Frey, Lothar	Poster
2012	Plasma-assisted atomic layer deposition of alumina at room temperature Lemberger, Martin; Fromm, Timo; Rommel, Mathias; Bauer, A.J.; Frey, Lothar	Poster
2012	Approaches for the reduction of the influence of parasitic capacitances on local IV characteristics for conductive AFM Rommel, Mathias; Jambreck, Joachim D.; Murakami, Katsuhisa; Lemberger, Martin; Richter, Christoph; Weinzierl, Philip; Bauer, A.J.; Frey, Lothar	Vortrag Presentation
2012	Resistive circuit, circuit layout and driver Berberich, Sven E.; Wintrich, Arendt; Erlbacher, Tobias	Patent
2012	Predictive sampling approach to dynamically optimize defect density control operations Pfeffer, M.; Oechsner, R.; Pfitzner, L.; Eckert, S.; Hartmann, A.; Gold, H.; Biebl, G.; Kaspar, J.	Konferenzbeitrag Conference Paper
2012	Virtual Equipment for benchmarking Predictive Maintenance algorithms Mattes, A.; Schöpka, U.; Schellenberger, M.; Scheibelhofer, P.; Leditzky, G.	Konferenzbeitrag Conference Paper
2012	Reference samples for ultra trace analysis of organic compounds on substrate surfaces Nutsch, A.; Beckhoff, B.; Borionetti, G.; Codegoni, D.; Grasso, S.; Hoenicke, P.; Leibold, A.; Müller, M.; Otto, M.; Pfitzner, L.; Polignano, M.-L.	Konferenzbeitrag Conference Paper
2012	Efficient laser induced consolidation of nanoparticulate ZnO thin films with reduced thermal budget Baum, M.; Polster, S.; Jank, M.P.M.; Alexeev, I.; Frey, L.; Schmidt, M.	Zeitschriftenaufsatz Journal Article
2012	Significant on-resistance reduction of LDMOS devices by intermitted trench gates integration Erlbacher, Tobias; Bauer, Anton J.; Frey, Lothar	Zeitschriftenaufsatz Journal Article
2012	Life time evaluation of PDMS stamps for UV-enhanced substrate conformal imprint lithography Schmitt, H.; Duempelmann, P.; Fader, R.; Rommel, M.; Bauer, A.J.; Frey, L.; Brehm, M.; Kraft, A.	Zeitschriftenaufsatz Journal Article
2012	Comparative study of electrical and microstructural properties of 4H-SiC MOSFETs Strenger, C.; Häublein, V.; Erlbacher, T.; Bauer, A.J.; Ryssel, H.; Beltran, A.M.; Schamm-Chardon, S.; Mortet, V.; Bedel-Pereira, E.; Lefebvre, M.; Cristiano, F.	Konferenzbeitrag Conference Paper
2012	Nanoscale characterization of TiO2 films grown by atomic layer deposition Murakami, Katsuhisa; Rommel, Mathias; Bauer, A.J.; Frey, Lothar; Hudec, Boris; Rosova, A.; Hueková, K.; Fröhlich, Karol; Kasikov, A.; Ramula, R.; Aarik, J.; Han, J.H.; Han, S.; Lee, W.; Song, S.J.; Hwang, C.S.	Poster
2012	Hall effect characterizations of 4H-SiC MOSFETs: Influence of nitrogen channel implantation Mortet, V.; Bedel-Pereira, E.; Bobo, J.; Strenger, C.; Uhnevionak, V.; Burenkov, A.; Cristiano, F.; Bauer, A.	Poster
2012	Comparative investigation on installation space requirements for input filters of DC-link- and matrix converters based on amplitude pseudo-spectra Schramm, A.; Lanfer, H.; Petzoldt, J.; Rädel, U.; Schwarzmann, H.; Erlbacher, T.	Konferenzbeitrag Conference Paper
2012	Ablation Free Dicing of 4H-SiC Wafers with Feed Rates up to 200 mm/s by Using Thermal Laser Separation Lewke, Dirk; Koitzsch, Matthias; Schellenberger, Martin; Pfitzner, Lothar; Ryssel, Heiner; Zühlke, Hans-Ulrich	Konferenzbeitrag Conference Paper
2012	All electrochemical layer deposition for crystalline silicon solar cell manufacturing: Experiments and interpretation Kröner, Friedrich; Kröner, Z.; Reichmann, Klaus; Rommel, Mathias	Zeitschriftenaufsatz Journal Article
2012	Amplitude modulated resonant push-pull driver for piezoelectric transformers in switching power applications Schwarzmann, Holger; Erlbacher, Tobias; Bauer, A.J.; Ryssel, Heiner; Frey, Lothar	Konferenzbeitrag Conference Paper
2012	Nano-analytical and electrical characterization of 4H-SiC MOSFETs Beltran, A.M.; Schamm-Chardon, S.; Mortet, V.; Lefebvre, M.; Bedel-Pereira, E.; Cristiano, F.; Strenger, C.; Häublein, V.; Bauer, A.J.	Konferenzbeitrag Conference Paper
2012	Aufreinigung eines Tiegels für eine Halbleiterverarbeitung Schneider, Veronika; Reimann, Christian; Friedrich, J.	Patent
2012	Structural and reliability analysis of ohmic contacts to SiC with a stable protective coating for harsh environment applications Daves, W.; Kraus, A.; Haublein, V.; Bauer, A.J.; Frey, L.	Zeitschriftenaufsatz Journal Article
2012	Thermal laser separation and its applications Lewke, Dirk; Koitzsch, Matthias; Schellenberger, Martin; Pfitzner, Lothar; Ryssel, Heiner; Zühlke, Hans-Ulrich	Zeitschriftenaufsatz Journal Article
2012	Simulationsgestützte Untersuchung von logistischen Optimierungsstrategien bei Halbleiterfertigungsprozessen Pfeffer, M.	Dissertation Doctoral Thesis
2012	A generic approach for comparing input filter efforts of voltage- and current source converters Schramm, A.; Lanfer, H.; Petzoldt, J.; Rädel, U.; Schwarzmann, H.; Erlbacher, T.	Konferenzbeitrag Conference Paper
2012	Electrical characterization of nanostructured p-silicon electrodes for bioimpedance measurements on single cell level Pliquett, Uwe; Westenthanner, Maximilian; Rommel, Mathias; Bauer, A.J.; Beckmann, Dieter	Konferenzbeitrag Conference Paper
2012	Influence of epilayer thickness and structural defects on the minority carrier lifetime in 4H-SiC Kallinger, Birgit; Berwian, Patrick; Friedrich, Jochen; Azizi, Maral; Rommel, Mathias; Hecht, Christian; Friedrichs, Peter	Poster
2012	TiO2-based metal-insulator-metal structures for future DRAM storage capacitors Fröhlich, K.; Hudec, B.; Tapajna, M.; Hueková, K.; Rosova, A.; Eliá, P.; Aarik, J.; Rammula, R.; Kasikov, A.; Arroval, T.; Aarik, L.; Murakami, Katsuhisa; Rommel, Mathias; Bauer, A.J.	Konferenzbeitrag Conference Paper
2012	Reliability characterization of dielectrics in 200V trench capacitors Erlbacher, Tobias; Schwarzmann, Holger; Bauer, A.J.; Dorp, Joachim vom; Frey, Lothar	Poster
2012	Effect of HfO2 polycrystallinity on distribution of the CAFM-induced TDDB in high-k gate stacks Iglesias, V.; Erlbacher, T.; Rommel, Mathias; Murakami, K.; Bauer, A.J.; Frey, L.; Porti, M.; Martin-Martinez, J.; Rodriguez, R.; Nafria, M.; Aymerich, X.; Bersuker, G.	Poster
2012	Ohmic and rectifying contacts on bulk AlN for radiation detector applications Erlbacher, Tobias; Bickermann, Matthias; Kallinger, Birgit; Meissner, Elke; Bauer, Anton J.; Frey, Lothar	Zeitschriftenaufsatz Journal Article
2012	Simple and efficient method to fabricate nano cone arrays by FIB milling demonstrated on planar substrates and on protruded structures Rommel, M.; Bauer, A.J.; Frey, L.	Zeitschriftenaufsatz Journal Article
2012	Feasibility and limitations of anti-fuses based on bistable non-volatile switches for power electronic applications Erlbacher, T.; Huerner, A.; Bauer, A.J.; Frey, L.	Zeitschriftenaufsatz Journal Article
2012	Wiederverwendbarer Tiegel aus einer Siliziumnitrid-Keramik sowie dessen Verwendung bei der Herstellung eines mono- oder multikristallinen Halbmetallkörpers aus einer Schmelze Mono, T.; Schneider, Veronika; Martin, R.; Reimann, Christian; Friedrich, J.	Patent
2012	IMPROVE - a joint European effort to boost efficiency in semiconductor manufacturing Schellenberger, Martin; Koitzsch, Matthias; Roeder, Georg; Pfeffer, Markus; Schöpka, Ulrich; Mattes, Andreas; Pfitzner, Lothar	Vortrag Presentation
2012	Stationsanordnung zur Bearbeitung und/oder Vermessen von Halbleiterscheiben sowie Bearbeitungsverfahren Schellenberger, Martin; Lewke, Dirk	Patent
2012	Functional epoxy polymer for direct nano-imprinting of micro optical elements Fader, Robert; Landwehr, Johannes; Rumler, Maximilian; Rommel, Mathias; Frey, Lothar; Bauer, A.J.; Völkel, Reinhard; Brehm, Markus; Kraft, Andreas	Poster
2012	Fabrication and application of shielded probes for conductive AFM measurements Jambreck, Joachim D.; Rommel, Mathias; Richter, Christoph; Weinzierl, Philip; Bauer, A.J.; Frey, Lothar	Poster
2012	Der "Zauberspiegel" als Messprinzip Tobisch, Alexander; Schellenberger, Martin; Pfitzner, Lothar	Zeitschriftenaufsatz Journal Article
2012	Framework for integration of virtual metrology and predictive maintenance Roeder, G.; Mattes, A.; Pfeffer, M.; Schellenberger, M.; Pfitzner, L.; Knapp, A.; Mühlberger, H.; Kyek, A.; Lenz, B.; Frisch, M.; Bichlmeier, J.; Leditzky, G.; Lind, E.; Zoia, S.; Fazio, G.	Konferenzbeitrag Conference Paper
2012	4H-SiC MOSFETs with a stable protective coating for harsh environment applications Daves, W.; Krauss, A.; Häublein, V.; Bauer, A.J.; Frey, L.	Konferenzbeitrag Conference Paper
2012	Improving module performance and reliability in power electronic applications by monolithic integration of RC-snubbers Erlbacher, Tobias; Schwarzmann, Holger; Bauer, A.J.; Berberich, Sven E.; Dorp, Joachim vom; Frey, Lothar	Konferenzbeitrag Conference Paper
2012	Feasiblity and limitations of anti-fuses based on bistable non-volatile switches for power electronic applications Erlbacher, Tobias; Hürner, A.; Bauer, Anton J.; Frey, Lothar	Zeitschriftenaufsatz Journal Article
2012	Characterization of grain boundaries in multicrystalline silicon with high lateral resolution using conductive atomic force microscopy Rumler, Maximilian; Rommel, Mathias; Erlekampf, Jürgen; Azizi, Maral; Geiger, Tobias; Bauer, Anton J.; Meißner, Elke; Frey, Lothar	Zeitschriftenaufsatz Journal Article
2012	Novel organic polymer for UV-enhanced substrate conformal imprint lithography Fader, R.; Schmitt, H.; Rommel, M.; Bauer, A.J.; Frey, L.; Ji, R.; Hornung, M.; Brehm, M.; Vogler, M.	Zeitschriftenaufsatz Journal Article
2012	Enhancements in resizing single crystalline silicon wafers up to 450 mm by using thermal laser separation Koitzsch, M.; Lewke, D.; Schellenberger, M.; Pfitzner, L.; Ryssel, H.; Zühlke, H.U.	Konferenzbeitrag Conference Paper
2012	Verification of near-interface traps by electrical measurements on 4H-SiC n-channel MOSFETs Uhnevionak, V.; Strenger, C.; Burenkov, A.; Mortet, V.; Bedel-Pereira, E.; Cristiano, F.; Bauer, A.; Pichler, P.	Vortrag Presentation

Diese Liste ist ein Auszug aus der Publikationsplattform Fraunhofer-Publica

This list has been generated from the publication platform Fraunhofer-Publica

2011

Jahr Year	Titel/Autor:in Title/Author	Publikationstyp Publication Type
2011	Light confinement by structured metal tips for antenna-based scanning near-field optical microscopy Jambreck, J.D.; Böhmler, M.; Rommel, Mathias; Hartschuh, A.; Bauer, A.J.; Frey, L.	Konferenzbeitrag Conference Paper
2011	Current voltage characteristics through grains and grain boundaries of high-k dielectric thin films measured by tunneling atomic force microscopy Murakami, Katsuhisa; Rommel, Mathias; Yanev, Vasil; Bauer, A.J.; Frey, Lothar	Konferenzbeitrag Conference Paper
2011	Verfahren zur Herstellung eines Siliziumschicht Jank, M.; Lukas, S.	Patent
2011	Reliability of nitrided gate oxides for N- and P-type 4H-SiC(0001) metal-oxide-semiconductor devices Noborio, M.; Grieb, M.; Bauer, A.J.; Peters, D.; Friedrichs, P.; Suda, J.; Kimoto, T.	Zeitschriftenaufsatz Journal Article
2011	Manufacturing, characterization, and application of nanoimprinted metallic probe demonstrators for electrical scanning probe microscopy Jambreck, J.D.; Yanev, V.; Schmitt, H.; Rommel, M.; Bauer, A.J.; Frey, L.	Zeitschriftenaufsatz Journal Article
2011	Novel polymers for UV-enhanced substrate conformal imprint lithography Fader, R.; Schmitt, H.; Rommel, Mathias; Bauer, A.J.; Frey, L.; Ji, R.; Hornung, M.; Brehm, M.; Vogler, M.	Poster
2011	Traps and trapping phenomena and their implications on electrical behavior of high-k capacitor stacks Paskaleva, A.; Lemberger, M.; Atanassova, E.; Bauer, A.J.	Zeitschriftenaufsatz Journal Article
2011	Dielectric layers suitable for high voltage integrated trench capacitors Dorp, J. vom; Erlbacher, T.; Bauer, A.J.; Ryssel, H.; Frey, L.	Zeitschriftenaufsatz Journal Article
2011	Germanium substrate loss during thermal processing Kaiser, R.J.; Koffel, S.; Pichler, P.; Bauer, A.J.; Amon, B.; Frey, L.; Ryssel, H.	Zeitschriftenaufsatz Journal Article
2011	Determination of the dill parameters of thick positive resist for use in modeling applications Roeder, G.; Liu, S.; Aygun, G.; Evanschitzky, P.; Erdmann, A.; Schellenberger, M.; Pfitzner, L.	Konferenzbeitrag Conference Paper
2011	Modulares Steuerungskonzept für integrierte Messtechnik in der Halbleiterfertigung am Beispiel einer Mehrkammerprozessanlage Schellenberger, Martin	Dissertation Doctoral Thesis
2011	Electrical characterization of lateral 4H-SiC MOSFETs in the temperature range of 25 to 600 °C for harsh environment applications Daves, W.; Krauss, A.; Häublein, V.; Bauer, A.J.; Frey, L.	Konferenzbeitrag Conference Paper
2011	Properties of SiO2 and Si3N4 as gate dielectrics for printed ZnO transistors Walther, S.; Polster, S.; Meyer, B.; Jank, M.; Ryssel, H.; Frey, L.	Zeitschriftenaufsatz Journal Article
2011	Effects of oxygen and forming gas annealing on ZnO TFTs Huang, J.; Radhakrishna, U.; Lemberger, M.; Jank, M.P.M.; Polster, S.; Ryssel, H.; Frey, L.	Konferenzbeitrag Conference Paper
2011	Implication of oxygen vacancies on current conduction mechanisms in TiN/Zr1-xAlxO2/TiN metal-insulator-metal structures Paskaleva, A.; Lemberger, M.; Bauer, A.J.; Frey, L.	Zeitschriftenaufsatz Journal Article
2011	Thermal Laser Separation (TLS) for separating multi-crystalline silicon wafers: A comparison with state-of-the-art methods Koitzsch, Matthias; Schellenberger, Martin	Poster
2011	Virtual equipment. A test bench for virtual metrology algorithms Mattes, Andreas; Lewke, Dirk; Schellenberger, Martin	Vortrag Presentation
2011	Influence of annealing parameters on surface roughness, mobility, and contact resistance of aluminium implanted 4H SiC Schmitt, H.; Häublein, V.; Bauer, A.J.; Frey, L.	Konferenzbeitrag Conference Paper
2011	Enhancement of the stability of Ti and Ni ohmic contacts to 4H-SiC with a stable protective coating for harsh environment applications Daves, W.; Krauss, A.; Haublein, V.; Bauer, A.J.; Frey, L.	Zeitschriftenaufsatz Journal Article
2011	Gate oxide reliability at the nano-scale evaluated by combining cAFM and CVS Erlbacher, T.; Yanev, V.; Rommel, M.; Bauer, A.J.; Frey, L.	Zeitschriftenaufsatz Journal Article
2011	4H-SiC n-MOSFET logic circuits for high temperature operation Le-Huu, M.; Grieb, M.; Schrey, F.F.; Schmitt, H.; Häublein, V.; Bauer, A.J.; Ryssel, H.; Frey, L.	Konferenzbeitrag Conference Paper
2011	Life time evaluation of PDMS stamps for UV-enhanced substrate conformal imprint lithography Schmitt, H.; Duempelmann, P.; Fader, R.; Rommel, Mathias; Bauer, A.J.; Frey, L.; Brehm, M.; Kraft, A.	Poster
2011	A virtual equipment as a test bench for evaluating virtual metrology algorithms Mattes, Andreas; Koitzsch, Matthias; Lewke, Dirk; Müller-Zell, Michael; Schellenberger, Martin	Konferenzbeitrag Conference Paper
2011	Developing a framework for virtual metrology and predictive maintenance Schellenberger, Martin; Roeder, Georg; Mattes, Andreas; Pfeffer, Markus; Pfitzner, Lothar; Knapp, Alexander; Mühlberger, Heribert; Bichlmeier, Josef; Valeanu, Christian; Kyek, Andreas; Lenz, Benjamin; Frisch, Markus; Leditzky, Günther	Zeitschriftenaufsatz Journal Article
2011	High pressure oxidation of 4H-SiC in nitric acid vapor Kalai Selvi, K.; Sreenidhi, T.; Dasgupta, N.; Ryssel, H.; Bauer, A.	Zeitschriftenaufsatz Journal Article
2011	Comparative study on metallization and passivation materials for high temperature sensor applications Daves, W.; Krauss, A.; Le-Huu, M.; Kronmüller, S.; Häublein, V.; Bauer, A.J.; Frey, L.	Konferenzbeitrag Conference Paper
2011	Jet printing of colloidal solutions - numerical modeling and experimental verification of the influence of ink and surface parameters on droplet spreading Schneider, O.; Epple, P.; Teuber, E.; Meyer, B.; Jank, M.P.M.; Rauh, C.; Delgado, A.	Zeitschriftenaufsatz Journal Article
2011	Investigation of the reliability of 4H-SiC MOS devices for high temperature applications Le-Huu, M.; Schmitt, H.; Noll, S.; Grieb, M.; Schrey, F.F.; Bauer, A.J.; Frey, L.; Ryssel, H.	Zeitschriftenaufsatz Journal Article
2011	Tuning of charge carrier density of ZnO nanoparticle films by oxygen plasma treatment Walther, S.; Polster, S.; Jank, M.P.M.; Thiem, H.; Ryssel, H.; Frey, L.	Zeitschriftenaufsatz Journal Article
2011	Amorphous silicon carbide thin films (a-SiC:H) deposited by plasma-enhanced chemical vapor deposition as protective coatings for harsh environment applications Daves, W.; Krauss, A.; Behnel, N.; Haublein, V.; Bauer, A.; Frey, L.	Zeitschriftenaufsatz Journal Article
2011	Current voltage characteristics through grains and grain boundaries of high-k dielectric thin films measured by tunneling atomic force microscopy Murakami, K.; Rommel, Mathias; Yanev, V.; Bauer, A.J.; Frey, L.	Poster
2011	EPR investigations of non-oxidized silicon nanoparticles from thermal pyrolysis of silane Körmer, R.; Otto, M.; Wu, J.; Jank, M.P.M.; Frey, L.; Peukert, W.	Zeitschriftenaufsatz Journal Article
2011	Characterization of thickness variations of thin dielectric layers at the nanoscale using scanning capacitance microscopy Yanev, V.; Rommel, M.; Bauer, A.J.; Frey, L.	Zeitschriftenaufsatz Journal Article
2011	A highly sensitive evaluation method for the determination of different current conduction mechanisms through dielectric layers Murakami, M.; Rommel, M.; Yanev, V.; Erlbacher, T.; Bauer, A.J.; Frey, L.	Zeitschriftenaufsatz Journal Article
2011	Effect of increased oxide hole trap density due to nitrogen incorporation at the SiO2/SiC interface on F-N current degradation Strenger, C.; Bauer, A.J.; Ryssel, H.	Konferenzbeitrag Conference Paper
2011	Fluorine implantation for effective work function control in p-type metal-oxide-semiconductor high-k metal gate stacks Fet, A.; Haublein, V.; Bauer, A.J.; Ryssel, H.; Frey, L.	Zeitschriftenaufsatz Journal Article
2011	Monolithic RC-snubber for power electronic applications Dorp, Joachim vom; Berberich, Sven E.; Erlbacher, Tobias; Bauer, A.J.; Ryssel, Heiner; Frey, Lothar	Konferenzbeitrag Conference Paper
2011	Dünnfilmtransistor Jank, Michael; Teuber, Erik; Lemberger, M.; Huang, J.	Patent
2011	Experiments and simulation of the diffusion and activation of the n-Type dopants P, As, and Sb implanted into germanium Koffel, S.; Kaiser, R.J.; Bauer, A.J.; Amon, B.; Pichler, P.; Lorenz, J.; Frey, L.; Scheiblin, P.; Mazzocchi, V.; Barnes, J.-P.; Claverie, A.	Zeitschriftenaufsatz Journal Article
2011	A novel PWM control for a bi-directional full-bridge DC-DC converter with smooth conversion mode transitions Lorentz, V.R.H.; Schwarzmann, H.; März, M.; Bauer, A.J.; Ryssel, H.; Frey, L.; Poure, P.; Braun, F.	Zeitschriftenaufsatz Journal Article
2011	UV-enhanced substrate conformal imprint lithography using an epoxy based polymer Fader, R.; Schmitt, H.; Rommel, Mathias; Bauer, A.J.; Frey, L.; Ji, R.; Hornung, M.; Brehm, M.; Kraft, A.	Poster
2011	Conduction mechanisms and environmental sensitivity of solution-processed silicon nanoparticle layers for thin-film transistors Weis, S.; Körmer, R.; Jank, M.P.M.; Lemberger, M.; Otto, M.; Ryssel, H.; Peukert, W.; Frey, L.	Zeitschriftenaufsatz Journal Article
2011	Simple and efficient method to fabricate nano-cone arrays by FIB milling demonstrated on planar substrates and on protruded structures Rommel, Mathias; Bauer, A.J.; Frey, L.	Poster

Diese Liste ist ein Auszug aus der Publikationsplattform Fraunhofer-Publica

This list has been generated from the publication platform Fraunhofer-Publica