Publications Semiconductor Devices

Jahr
Year
Titel/Autor:in
Title/Author
Publikationstyp
Publication Type
2022 Aluminum Activation in 4H-SiC Measured on Laterally Contacted MOS Capacitors with a Buried Current-Spreading Layer
Mletschnig, Kristijan Luka; Rommel, Mathias; Pobegen, Gregor; Schustereder, Werner; Pichler, Peter
Konferenzbeitrag
Conference Paper
2022 Integrated Digital and Analog Circuit Blocks in a Scalable Silicon Carbide CMOS Technology
Romijn, J.; Vollebregt, S.; Middelburg, L.M.; El Mansouri, B.; Zeijl, H.W. van; May, Alexander; Erlbacher, Tobias; Zhang, G.; Sarro, P.M.
Zeitschriftenaufsatz
Journal Article
2022 Low-Temperature and UV Irradiation Effect on Transformation of Zirconia -MPS nBBs-Based Gels into Hybrid Transparent Dielectric Thin Films
Musat, V.; Herbei, E.E.; Anghel, E.M.; Jank, Michael; Oertel, Susanne; Timpu, D.; Frangu, L.
Zeitschriftenaufsatz
Journal Article
2022 Visible Blind Quadrant Sun Position Sensor in a Silicon Carbide Technology
Romijn, Joost; Vollebregt, Sten; May, Alexander; Erlbacher, Tobias; Zeijl, Henk W. van; Leijtens, Johan; Zhang, Guoqi; Sarro, Pasqualina M.
Konferenzbeitrag
Conference Paper
2022 Sub-Kelvin thermometry for evaluating the local temperature stability within in situ TEM gas cells
Fritsch, Birk; Wu, Mingjian; Hutzler, Andreas; Zhou, Dan; Spruit, Ronald; Vogl, Lilian; Will, Johannes; Perez Garza, H. Hugo; März, Martin; Jank, Michael; Spiecker, Erdmann
Zeitschriftenaufsatz
Journal Article
2022 Mechanisms of ohmic contact formation of Ti/Al-based metal stacks on p-doped 4H-SiC
Kocher, Matthias; Rommel, Mathias; Michalowski, P.; Erlbacher, Tobias
Zeitschriftenaufsatz
Journal Article
2022 Homoepitaxial growth and defect characterization of 4H-SiC
Kallinger, Birgit; Kranert, Christian; Schade, Zara Mercedes; Rommel, Mathias; Berwian, Patrick
Meeting Abstract
Diese Liste ist ein Auszug aus der Publikationsplattform Fraunhofer-Publica

This list has been generated from the publication platform Fraunhofer-Publica

Jahr
Year
Titel/Autor:in
Title/Author
Publikationstyp
Publication Type
2021 Reliability of Silicon-Nitride based High-Voltage Monolithic Capacitors
Becker, Tom; Matlok, Stefan; Heckel, Thomas; Böttcher, Norman; Leib, Jürgen; Erlbacher, Tobias
Vortrag
Presentation
2021 Smart Platform for Rapid Prototyping: Solutions in the Dilemma of Flexibility and Standardization
Anger, Sabrina; Klingert, Felix; Häublein, Volker; Pfeffer, Markus; Schellenberger, Martin
Konferenzbeitrag
Conference Paper
2021 Device Design and Process Integration of SiC Trench MOSFETs
Lim, Minwho; Rusch, Oleg; Erlbacher, Tobias; Bauer, Anton
Vortrag
Presentation
2021 Accessing local electron-beam induced temperature changes during In situ liquid-phase transmission electron microscopy
Fritsch, B.; Hutzler, A.; Wu, M.; Khadivianazar, S.; Vogl, L.; Jank, M.; März, M.; Spiecker, E.
Zeitschriftenaufsatz
Journal Article
2021 Frabrication and Evaluation of 4H-SiC Double Trench MOSFETs on 6-inch Wafer
Lim, Minwho; Kim, Seongjun; Rusch, Oleg; Kang, Min-Jae; Sung, Mi-Je; Kwak, Juyoung; Lee, Nam-Suk; Shin, Hoon-Kyu; Erlbacher, Tobias; Bauer, Anton
Vortrag
Presentation
2021 Fully convolutional networks for chip-wise defect detection employing photoluminescence images
Stern, M.L.; Schellenberger, M.
Zeitschriftenaufsatz
Journal Article
2021 Monolithisch integrierter Lasttrennschalter in SiC JFET Technologie
Boettcher, Norman; Erlbacher, Tobias
Vortrag
Presentation
2021 MD simulation study on defect evolution and doping efficiency of p-type doping of 3C-SiC by Al ion implantation with subsequent annealing
Wu, J.; Xu, Z.; Liu, L.; Hartmaier, A.; Rommel, M.; Nordlund, K.; Wang, T.; Janisch, R.; Zhao, E.
Zeitschriftenaufsatz
Journal Article
2021 A Monolithically Integrated SiC Circuit Breaker
Böttcher, Norman; Erlbacher, Tobias
Zeitschriftenaufsatz
Journal Article
2021 Beam-induced heating at low electron fluxes during liquid phase transmission electron microscopy
Fritsch, Birk; Hutzler, Andreas; Wu, Mingjian; Vogl, Lilian; Jank, Michael; März, Martin; Spiecker, Erdmann
Zeitschriftenaufsatz
Journal Article
2021 A Fully Integrated Ferroelectric Thin-Film-Transistor - Influence of Device Scaling on Threshold Voltage Compensation in Displays
Lehninger, D.; Ellinger, M.; Ali, T.; Li, S.; Mertens, K.; Lederer, M.; Olivio, R.; Kampfe, T.; Hanisch, N.; Biedermann, K.; Rudolph, M.; Brackmann, V.; Sanctis, C.; Jank, M.; Seidel, K.
Zeitschriftenaufsatz
Journal Article
2021 Modelling the Radiolysis of Silver Nitrate Solutions in presence of Bromide Ions in Liquid-Phase Transmission Electron Microscopy
Taherkhani, Mehran; Fritsch, Birk; Jank, Michael; Spiecker, Erdmann; Hutzler, Andreas
Zeitschriftenaufsatz
Journal Article
2021 Experimental wafer carrier contamination analysis and monitoring in fully automated 300 mm power production lines
Zängle, C.; Pfeffer, M.; Franze, P.; Schneider, G.; Bauer, A.
Konferenzbeitrag
Conference Paper
2021 Process-based Modeling of 4H-SiC Double-trench MOSFETs with Reshaped Trench Geometries
Lim, Minwho; Rusch, Oleg; Erlbacher, Tobias; Beuer, Susanne; Rommel, Mathias; Bauer, Anton; Kim, S.; Kang, M.; Shin, H.-K.
Poster
2021 From Cyclopentasilane to Thin-Film Transistors
Gerwig, M.; Ali, A.S.; Neubert, D.; Polster, S.; Bohme, U.; Franze, G.; Rosenkranz, M.; Popov, A.; Ponomarev, I.; Jank, M.; Vieweger, C.; Brendler, E.; Frey, L.; Kroll, P.; Kroke, E.
Zeitschriftenaufsatz
Journal Article
2021 Lifetime limiting defects in 4H-SiC epitaxial layers: The influence of substrate originated defects
Erlekampf, Jürgen; Rommel, Mathias; Rosshirt-Lilla, Katharina; Kallinger, Birgit; Berwian, Patrick; Friedrich, Jochen; Erlbacher, Tobias
Zeitschriftenaufsatz
Journal Article
2021 MD simulation of two-temperature model in ion irradiation of 3C-SiC: Effects of electronic and nuclear stopping coupling, ion energy and crystal orientation
Wu, J.; Xu, Z.; Zhao, J.; Rommel, M.; Nordlund, K.; Ren, F.; Fang, F.
Zeitschriftenaufsatz
Journal Article
2021 SiC for Power Electronics and More - 150mm and 200mm Technologies on the Move
Erlbacher, Tobias
Vortrag
Presentation
2021 SiC Power MOS technology evolution. Sustainable and efficient energy conversion in DC grids
Erlbacher, Tobias
Vortrag
Presentation
2021 Molecular dynamics simulation of color centers in silicon carbide by helium and dual ion implantation and subsequent annealing
Fan, Y.; Song, Y.; Xu, Z.; Dong, B.; Wu, J.; Rommel, Mathias; Zhang, K.; Zhao, J.; Zhu, R.; Li, B.; Li, Q.; Fang, F.
Zeitschriftenaufsatz
Journal Article
2021 Doping-related photoluminescence spectroscopy in 4H-SiC
Kallinger, Birgit; Schlichting, Holger; Kocher, Matthias; Rommel, Mathias; Berwian, Patrick
Poster
Diese Liste ist ein Auszug aus der Publikationsplattform Fraunhofer-Publica

This list has been generated from the publication platform Fraunhofer-Publica

Jahr
Year
Titel/Autor:in
Title/Author
Publikationstyp
Publication Type
2020 Highly accurate determination of heterogeneously stacked Van-der-Waals materials by optical microspectroscopy
Hutzler, Andreas; Fritsch, Birk; Matthus, Christian D.; Jank, Michael P.M.; Rommel, Mathias
Zeitschriftenaufsatz
Journal Article
2020 Elektrisches Kabel oder elektrische Litze sowie drahtförmiges elektrisches Verbindungselement mit halbleitendem Funktionsabschnitt
Bayer, Christoph; Schletz, Andreas; Erlbacher, Tobias
Patent
2020 Beyond SIC Power Devices and Technology - Novel High Temperature SIC CMOS 1 Micron Technology
Erlbacher, T.
Vortrag
Presentation
2020 Confocal photoluminescence characterization of silicon-vacancy color centers in 4H-SiC fabricated by a femtosecond laser
Liu, J.; Xu, Z.; Song, Y.; Wang, H.; Dong, B.; Li, S.; Ren, J.; Li, Q.; Rommel, M.; Gu, X.; Liu, B.; Hu, M.; Fang, F.
Zeitschriftenaufsatz
Journal Article
2020 An Iterative Surface Potential Algorithm including Interface Traps for Compact Modeling of SiC-MOSFETs
Albrecht, M.; Klüpfel, F.J.; Erlbacher, T.
Zeitschriftenaufsatz
Journal Article
2020 Verfahren zur Herstellung von Halbleiterkondensatoren unterschiedlicher Kapazitätswerte in einem Halbleitersubstrat
Erlbacher, Tobias
Patent
2020 Leistungsmodul mit unipolarem Halbleiterbauelement für hohe Lebensdauer
Erlbacher, Tobias; Schletz, Andreas
Patent
2020 The impact of dislocations on AlGaN/GaN Schottky diodes and on gate failure of high electron mobility transistors
Besendörfer, S.; Meissner, E.; Medjoub, F.; Derluyn, J.; Friedrich, J.; Erlbacher, T.
Zeitschriftenaufsatz
Journal Article
2020 Photoluminescence and Raman Spectroscopy Study on Color Centers of Helium Ion-Implanted 4H-SiC
Song, Ying; Xu, Zongwei; Li, Rongrong; Wang, Hong; Fan, Yexin; Rommel, Mathias; Liu, Jiayu; Astakhov, Georgy V.; Hlawacek, Gregor; Li, Bingsheng; Xu, Jun; Fang, Fengzhou
Zeitschriftenaufsatz
Journal Article
2020 Sub-20 nm multilayer nanopillar patterning for hybrid SET/CMOS integration
Porteau, M.-L.; Gharbi, A.; Brianceau, P.; Dallery, J.-A.; Laulagnet, F.; Rademaker, G.; Tiron, R.; Engelmann, Hans-Jürgen; Borany, Johannes von; Heinig, Karl-Heinz; Rommel, Mathias; Baier, Leander
Zeitschriftenaufsatz
Journal Article
2020 Integrated Passive Devices and Switching Circuit Design for a 3D DC/DC Converter up to 60 V
Saponara, S.; Ciarpi, G.; Erlbacher, Tobias; Rattmann, Gudrun
Zeitschriftenaufsatz
Journal Article
2020 Cognitive Power Electronics for Intelligent Drive Technology
Roeder, Georg; Liu, Xinjun; Hofmann, Maximilian; Schellenberger, Martin; Hilpert, Florian; März, Martin
Konferenzbeitrag
Conference Paper
2020 Recent progress of high temperature vapor phase epitaxy for the growth of GaN layers - Controlled coalescence of nucleation layers
Schneider, T.; Förste, M.; Lukin, G.; Fischer, P.; Barchuk, M.; Schimpf, C.; Niederschlag, E.; Pätzold, O.; Rafaja, D.; Stelter, M.
Zeitschriftenaufsatz
Journal Article
2020 Smart Platform for Rapid Prototyping: A First Solution Approach to Improve Time-to-Market and Process Control in Low-Volume Device Fabrication
Schellenberger, M.; Anger, S.; Pfeffer, M.; Häublein, V.; Roeder, G.; Bauer, A.
Konferenzbeitrag
Conference Paper
2020 Nanocutting mechanism of 6H-SiC investigated by scanning electron microscope online observation and stress-assisted and ion implant-assisted approaches
Xu, Zongwei; Liu, Lei; He, Zhongdu; Tian, Dongyu; Hartmaier, Alexander; Zhang, Junjie; Luo, Xichun; Rommel, Mathias; Nordlund, Kai; Zhang, Guoxiong; Fang, Fengzhou
Zeitschriftenaufsatz
Journal Article
2020 Design Considerations on a Monolithically Integrated, Self Controlled and Regenerative 900 V SiC Circuit Breaker
Böttcher, Norman; Erlbacher, Tobias
Konferenzbeitrag
Conference Paper
2020 RESURF n-LDMOS Transistor for Advanced Integrated Circuits in 4H-SiC
Weiße, J.; Matthus, C.; Schlichting, H.; Mitlehner, H.; Erlbacher, T.
Zeitschriftenaufsatz
Journal Article
2020 Perspectives and tradeoffs of absorber materials for high NA EUV lithography
Erdmann, A.; Mesilhy, H.; Evanschitzky, P.; Philipsen, V.; Timmermans, F.; Bauer, M.
Zeitschriftenaufsatz
Journal Article
2020 Impact of Channel Implantation on a 4H-SiC CMOS Operational Amplifier for High Temperature Applications
Albrecht, M.; Perez, D.; Martens, R.C.; Bauer, A.J.; Erlbacher, T.
Konferenzbeitrag
Conference Paper
2020 Impact of the transition region between active area and edge termination on electrical performance of SiC MOSFET
Liu, S.; Cheng, X.; Zheng, L.; Sledziewski, T.; Erlbacher, T.; Sheng, L.; Yu, Y.
Zeitschriftenaufsatz
Journal Article
2020 Low-Resistance Ohmic Contact Formation by Laser Annealing of N-Implanted 4H-SiC
Hellinger, Carsten; Rusch, Oleg; Rommel, Mathias; Bauer, Anton J.; Erlbacher, Tobias
Konferenzbeitrag
Conference Paper
2020 RC-Snubberglied mit hoher Spannungsfestigkeit
Erlbacher, Tobias; Schletz, Andreas; Rattmann, Gudrun
Patent
2020 Density functional theory calculation of the properties of carbon vacancy defects in silicon carbide
Wang, X.; Zhao, J.; Xu, Z.; Djurabekova, F.; Rommel, M.; Song, Y.; Fang, F.
Zeitschriftenaufsatz
Journal Article
2020 Reducing On-Resistance for SiC Diodes by Thin Wafer and Laser Anneal Technology
Rusch, Oleg; Hellinger, Carsten; Moult, Jonathan; Corcoran, Yunji; Erlbacher, Tobias
Konferenzbeitrag
Conference Paper
2020 Pre-Deposition Interfacial Oxidation and Post-Deposition Interface Nitridation of LPCVD TEOS Used as Gate Dielectric on 4H-SiC
Lim, Minwho; Sledziewski, Tomasz; Rommel, Mathias; Erlbacher, Tobias; Kim, Hong-Ki; Kim, Seongjun; Shin, Hoon-Kyu; Bauer, Anton J.
Konferenzbeitrag
Conference Paper
2020 Depth Profiling of Ion-Implanted 4H-SiC Using Confocal Raman Spectroscopy
Song, Ying; Xu, Zongwei; Liu, Tao; Rommel, Mathias; Wang, Hong; Wang, Yufang; Fang, Fengzhou
Zeitschriftenaufsatz
Journal Article
2020 Design and fabrication of 4h-Sic Mosfets with optimized JFET and p-body design
Ni, W.; Wang, X.; Feng, C.; Xiao, H.; Jiang, L.; Li, W.; Wang, Q.; Li, M.; Schlichting, H.; Erlbacher, T.
Konferenzbeitrag
Conference Paper
2020 Real embedding process of SiC devices in a monolithic ceramic package using LTCC technology
Lenz, Christian; Ziesche, Steffen; Schletz, Andreas; Bach, Hoang Linh; Erlbacher, Thomas
Konferenzbeitrag
Conference Paper
2020 Screen-Printed Sensor for Low-Cost Chloride Analysis in Sweat for Rapid Diagnosis and Monitoring of Cystic Fibrosis
Hauke, A.; Oertel, S.; Knoke, L.; Fein, V.; Maier, C.; Brinkmann, F.; Jank, M.P.M.
Zeitschriftenaufsatz
Journal Article
2020 Vertical breakdown of GaN on Si due to V-pits
Besendörfer, S.; Meissner, E.; Tajalli, A.; Meneghini, M.; Freitas, J.A.; Derluyn, J.; Medjdoub, F.; Meneghesso, G.; Friedrich, J.; Erlbacher, T.
Zeitschriftenaufsatz
Journal Article
2020 SiC MOSFET with a Self-Aligned Channel Defined by Shallow Source-JFET Implantation: A Simulation Study
Sledziewski, T.; Erlbacher, T.
Konferenzbeitrag
Conference Paper
2020 A 4H-SiC UV Phototransistor with Excellent Optical Gain Based on Controlled Potential Barrier
Benedetto, L. di; Licciardo, G.D.; Erlbacher, T.; Bauer, A.J.; Rubino, A.
Zeitschriftenaufsatz
Journal Article
2020 Foreword to the special issue on wide-bandgap (WBG) semiconductors: from fundamentals to applications
Xu, Z.; Tang, Y.; Rommel, M.
Zeitschriftenaufsatz
Journal Article
2020 Influence of Shallow Pits and Device Design of 4H-SiC VDMOS Transistors on In-Line Defect Analysis by Photoluminescence and Differential Interference Contrast Mapping
Kocher, Matthias; Schlichting, Holger; Kallinger, Birgit; Rommel, Mathias; Bauer, Anton J.; Erlbacher, Tobias
Konferenzbeitrag
Conference Paper
2020 Advancing the sensitivity of integrated epoxy-based Bragg grating refractometry by high-index nanolayers
Hessler, Steffen; Knopf, Stefan; Rommel, Mathias; Girschikofsky, Maiko; Schmauss, Bernhard; Hellmann, Ralf
Zeitschriftenaufsatz
Journal Article
2020 Influence of Aluminum Compensation Effects in 4H-SiC on the Performance of VDMOS Transistors
Schlichting, Holger; Kocher, Matthias; Weiße, Julietta; Erlbacher, Tobias; Bauer, Anton J.
Konferenzbeitrag
Conference Paper
2020 Integration of Printed Electronics in Potted Power Electronic Modules
Zimmermann, Victoria; Zoerner, Alicia; Yu, Zechun; Jank, Michael; Bayer, Christoph Friedrich; Schletz, Andreas; März, Martin
Konferenzbeitrag
Conference Paper
2020 Interplay between C-doping, threading dislocations, breakdown, and leakage in GaN on Si HEMT structures
Besendörfer, S.; Meissner, E.; Zweipfennig, T.; Yacoub, H.; Fahle, D.; Behmenburg, H.; Kalisch, H.; Vescan, A.; Friedrich, J.; Erlbacher, T.
Zeitschriftenaufsatz
Journal Article
Diese Liste ist ein Auszug aus der Publikationsplattform Fraunhofer-Publica

This list has been generated from the publication platform Fraunhofer-Publica

Jahr
Year
Titel/Autor:in
Title/Author
Publikationstyp
Publication Type
2019 Preparation of graphene-supported microwell liquid cells for in situ transmission electron microscopy
Hutzler, A.; Fritsch, B.; Jank, M.P.M.; Branscheid, R.; Spiecker, E.; März, M.
Zeitschriftenaufsatz
Journal Article
2019 Raman Characterization of Carrier Concentrations of Al-implanted 4H-SiC with Low Carrier Concentration by Photo-Generated Carrier Effect
Liu, Tao; Xu, Zongwei; Rommel, Mathias; Wang, Hong; Song, Ying; Wang, Yufang; Fang, Fengzhou
Zeitschriftenaufsatz
Journal Article
2019 Improving 5V Digital 4H-SiC CMOS ICs for Operating at 400°C Using PMOS Channel Implantation
Albrecht, M.; Erlbacher, T.; Bauer, A.J.; Frey, L.
Konferenzbeitrag
Conference Paper
2019 Publisher's Note: "Aluminum acceptor activation and charge compensation in implanted p-type 4H-SiC" [AIP Advances 9, 055308 (2019)]
Weiße, J.; Hauck, M.; Krieger, M.; Bauer, A.J.; Erlbacher, T.
Zeitschriftenaufsatz
Journal Article
2019 Verfahren zur Bestimmung mindestens eines elektrischen oder optischen Parameters einer Vielzahl von Halbleiterchips auf einem Wafer
Lindberg, Hans; Schellenberger, Martin; Stern, Maike
Patent
2019 Reducing On-Resistance for SiC Diodes by Thin Wafer and Laser Anneal Technology
Rusch, O.; Hellinger, C.; Moult, J.; Corcoran, Y.; Erlbacher, T.
Poster
2019 Pre-deposition interfacial oxidation and post-deposition interface nitridation of LPCVD TEOS used as gate dielectric on 4H-SiC
Lim, Minwho; Sledziewski, Tomasz; Rommel, Mathias; Erlbacher, Tobias; Kim, Hong-Ki; Kim, Seongjun; Shin, Hoon-Kyu; Bauer, Anton
Poster
2019 A TCAD Process Model with Monte Carlo Ion Implantation for 4H-SiC JBS Diode Analysis and Design
Büttner, J.; Beuer, S.; Petersen, S.; Rommel, M.; Erlbacher, T.; Bauer, A.
Poster
2019 Methodology for the investigation of threading dislocations as a source of vertical leakage in AlGaN/GaN-HEMT heterostructures for power devices
Besendörfer, S.; Meissner, E.; Lesnik, A.; Friedrich, J.; Dadgar, A.; Erlbacher, T.
Zeitschriftenaufsatz
Journal Article
2019 3D-Integrated Multi-Sensor Demonstrator System for Environmental Monitoring
Köck, A.; Wimmer-Teubenbacher, R.; Sosada-Ludwikovska, F.; Rohracher, K.; Wachmann, E.; Herold, M.; Welden, T. an; Kim, J.M.; Ali, Z.; Poenninger, A.; Stahl-Offergeld, M.; Hohe, H.-P.; Lorenz, J.; Erlbacher, T.; Dolmans, G.; Offermans, P.; Vandecasteele, M.; Yurchenko, O.; Sicard, O. von; Pohle, R.; Udrea, F.; Falco, C.; Flandre, D.; Bol, D.; Comini, E.; Zappa, D.; Gardner, J.; Cole, M.; Theunis, J.; Peters, J.; Baldwin, A.
Konferenzbeitrag
Conference Paper
2019 Surface Characterization of Ion Implanted 4H-SiC Epitaxial Layers with Ion Energy and Concentration Variations
Kim, Hong-Ki; Kim, Seongjun; Buettner, Jonas; Lim, Minwho; Erlbacher, Tobias; Bauer, Anton J.; Koo, Sang-Mo; Lee, Nam-Suk; Shin, Hoon-Kyu
Konferenzbeitrag
Conference Paper
2019 Resistless Ga+ beam lithography for flexible prototyping of nanostructures
Rommel, Mathias
Vortrag
Presentation
2019 NanoElectronics roadmap for Europe: From nanodevices and innovative materials to system integration
Ahopelto, J.; Ardila, G.; Baldi, L.; Balestra, F.; Belot, D.; Fagas, G.; Gendt, S. de; Demarchi, D.; Fernandez-Bolaños, M.; Holden, D.; Ionescu, A.M.; Meneghesso, G.; Mocuta, A.; Pfeffer, M.; Popp, R.M.; Sangiorgi, E.; Sotomayor Torres, C.M.
Zeitschriftenaufsatz
Journal Article
2019 Feasibility of 4H-SiC p-i-n diode for sensitive temperature measurements between 20.5 K and 802 K
Matthus, C.D.; Benedetto, L. di; Kocher, M.; Bauer, A.J.; Licciardo, G.D.; Rubino, A.; Erlbacher, T.
Zeitschriftenaufsatz
Journal Article
2019 Electron paramagnetic resonance characterization of aluminum ion implantation induced defects in 4H-SiC
Wang, Xiuhong; Xu, Zongwei; Rommel, Mathias; Dong, Bing; Song, Le; Tee, Clarence Augustine T.H.; Fang, Fengzhou
Zeitschriftenaufsatz
Journal Article
2019 Deeper insight into lifetime-engineering in 4H-SiC by ion implantation
Erlekampf, J.; Kallinger, B.; Weiße, J.; Rommel, M.; Berwian, P.; Friedrich, J.; Erlbacher, T.
Zeitschriftenaufsatz
Journal Article
2019 Monolithisch integrierter Halbleiterschalter, insbesondere Leistungstrennschalter
Erlbacher, Tobias; Hürner, Andreas
Patent
2019 Elektrische Schaltungsanordnung mit einer aktiven Entladeschaltung
Erlbacher, Tobias; Matlok, Stefan
Patent
2019 Influence of Trench Design on the Electrical Properties of 650V 4H-SiC JBS Diodes
Rusch, Oleg; Moult, Jonathan; Erlbacher, Tobias
Konferenzbeitrag
Conference Paper
2019 On the Origin of Charge Compensation in Aluminum-Implanted n-Type 4H-SiC by Analysis of Hall Effect Measurements
Weisse, Julietta; Hauck, Martin; Sledziewski, Tomasz; Krieger, Michael; Bauer, Anton J.; Mitlehner, Heinz; Frey, Lothar; Erlbacher, Tobias
Konferenzbeitrag
Conference Paper
2019 Ohmic Contact Mechanism for Ni/C-Faced 4H-n-SiC Substrate
Kim, Seongjun; Kim, Hong-Ki; Lim, Minwho; Jeong, Seonghoon; Kang, Min-Jae; Kang, Min-Sik; Lee, Nam-Suk; Coung, Tran Viet; Kim, Hyunsoo; Erlbacher, Tobias; Bauer, Anton J.; Shin, Hoon-Kyu
Zeitschriftenaufsatz
Journal Article
2019 First Experimental Test on Bipolar Mode Field Effect Transistor Prototype in 4H-SiC. A Proof of Concept
Benedetto, L. di; Licciardo, G.D.; Huerner, A.; Erlbacher, T.; Bauer, A.J.; Rubino, A.
Konferenzbeitrag
Conference Paper
2019 Surface-enhanced Raman scattering on nanodiamond-derived carbon onions
Song, Ying; Xu, Zongwei; Rosenkranz, Andreas; Rommel, Mathias; Shi, Changkun; Fang, Fengzhou
Zeitschriftenaufsatz
Journal Article
2019 Design of a 4H-SiC RESURF n-LDMOS Transistor for High Voltage Integrated Circuits
Weisse, Julietta; Mitlehner, Heinz; Frey, Lothar; Erlbacher, Tobias
Konferenzbeitrag
Conference Paper
2019 Low-resistance ohmic contact formation by laser annealing of N-implanted 4H-SiC
Hellinger, Carsten; Rusch, Oleg; Rommel, Mathias; Bauer, Anton J.; Erlbacher, Tobias
Poster
2019 Heteroepitaxial growth of GaN on sapphire substrates by high temperature vapor phase epitaxy
Lukin, G.; Schneider, T.; Förste, M.; Barchuk, M.; Schimpf, C.; Röder, C.; Zimmermann, F.; Niederschlag, E.; Pätzold, O.; Beyer, F.C.; Rafaja, D.; Stelter, M.
Zeitschriftenaufsatz
Journal Article
2019 TSV-based passive networks for monolithic integration in smartpower ICS for automotive applications
Erlbacher, Tobias; Rattmann, Gudrun
Vortrag
Presentation
2019 1700V 34mO 4H-SiC MOSFET With Retrograde Doping in Junction Field-Effect Transistor Region
Ni, W.; Wang, X.; Xiao, H.; Xu, M.; Li, M.; Schlichting, H.; Erlbacher, T.
Konferenzbeitrag
Conference Paper
2019 Influence of shallow pits and device design of 4H-SiC VDMOS transistors on in-line defect analysis by using PL scanning
Kocher, Matthias; Schlichting, Holger; Kallinger, Birgit; Rommel, Mathias; Bauer, Anton J.; Erlbacher, Tobias
Poster
2019 Process and design optimization of SiC MOSFET for low on-state resistance
Sledziewski, Tomasz; Erlbacher, Tobias; Bauer, Anton
Vortrag
Presentation
2019 Design and fabrication of 3300V 100mO 4H-SiC MOSFET with Stepped p-body structure
Ni, W.; Wang, X.; Xu, M.; Li, M.; Feng, C.; Xiao, H.; Li, W.; Wang, Q.; Schlichting, H.; Erlbacher, T.
Konferenzbeitrag
Conference Paper
2019 UV-Strahlungssensor auf Basis von Diamant
Erlbacher, Tobias
Patent
2019 In Situ Liquid Cell TEM Studies on Etching and Growth Mechanisms of Gold Nanoparticles at a Solid-Liquid-Gas Interface
Hutzler, A.; Fritsch, B.; Jank, M.P.M.; Branscheid, R.; Martens, R.C.; Spiecker, E.; März, M.
Zeitschriftenaufsatz
Journal Article
2019 Hochvolt-Kondensator zur Integration in elektrische Leistungsmodule sowie Verfahren zur Herstellung
Erlbacher, Tobias
Patent
2019 Determination of Compensation Ratios of Al-Implanted 4H-SiC by TCAD Modelling of TLM Measurements
Kocher, Matthias; Yao, Boteng; Weisse, Julietta; Rommel, Mathias; Xu, Zong Wei; Erlbacher, Tobias; Bauer, Anton J.
Konferenzbeitrag
Conference Paper
2019 Performance of 4H-SiC Bipolar Diodes as Temperature Sensor at Low Temperatures
Benedetto, L. di; Matthus, C.D.; Erlbacher, T.; Bauer, A.J.; Licciardo, G.D.; Rubino, A.; Frey, L.
Konferenzbeitrag
Conference Paper
2019 Comparison between Ni-SALICIDE and Self-Aligned Lift-Off Used in Fabrication of Ohmic Contacts for SiC Power MOSFET
Sledziewski, Tomasz; Erlbacher, Tobias; Bauer, Anton J.; Frey, Lothar; Chen, Ximing; Zhao, Yanli; Li, Chengzhan; Dai, Xiaoping
Konferenzbeitrag
Conference Paper
2019 SiC MOSFET with a self-aligned channel defined by shallow source-JFET implantation: A simulation study
Sledziewski, Tomasz; Erlbacher, Tobias
Poster
2019 Design Considerations for Robust Manufacturing and High Yield of 1.2 kV 4H-SiC VDMOS Transistors
Schlichting, H.; Sledziewski, T.; Bauer, A.J.; Erlbacher, T.
Konferenzbeitrag
Conference Paper
2019 Technological advances towards 4H-SiC JBS diodes for wind power applications
Buettner, Jonas; Erlbacher, Tobias; Bauer, Anton
Konferenzbeitrag
Conference Paper
2019 On a Novel Source Technology for Deep Aluminum Diffusion for Silicon Power Electronics
Rattmann, Gudrun; Pichler, Peter; Erlbacher, Tobias
Zeitschriftenaufsatz
Journal Article
2019 Large-Area Layer Counting of Two-Dimensional Materials Evaluating the Wavelength Shift in Visible-Reflectance Spectroscopy
Hutzler, Andreas; Matthus, Christian D.; Dolle, Christian; Rommel, Mathias; Jank, Michael P.M.; Spiecker, Erdmann; Frey, Lothar
Zeitschriftenaufsatz
Journal Article
2019 Characterization of a silicon carbide BCD process for 300°C circuits
Abbasi, A.; Roy, S.; Murphree, R.; Rashid, A.-U.; Hossain, M.M.; Lai, P.; Fraley, J.; Erlbacher, T.; Chen, Z.; Mantooth, A.
Konferenzbeitrag
Conference Paper
2019 Influence of Aluminum Compensation Effects in 4H-SiC on the Performance of VDMOS Transistors
Schlichting, Holger; Kocher, Matthias; Weiße, Julietta; Erlbacher, Tobias; Bauer, Anton J.
Poster
2019 Silicon RC-Snubber for 900 V Applications Utilising non-Stoichiometric Silicon Nitride
Boettcher, N.; Heckel, T.; Erlbacher, T.; Pelaic, K.
Konferenzbeitrag
Conference Paper
2019 SIC device manufacturing using ion implantation. Opportunities and challenges
Erlbacher, Tobias
Vortrag
Presentation
2019 Channeling in 4H-SiC from an Application Point of View
Pichler, Peter; Sledziewski, Tomasz; Häublein, Volker; Bauer, Anton J.; Erlbacher, Tobias
Konferenzbeitrag
Conference Paper
2019 Depth profiling of ion-implanted 4H-SiC using confocal Raman spectroscopy
Song, Ying; Xu, Zongwei; Liu, Tao; Rommel, Mathias; Wang, Hong; Fang, Fengzhou
Poster
2019 Wavelength-selective 4H-SiC UV-sensor array
Matthus, C.D.; Bauer, A.J.; Frey, L.; Erlbacher, T.
Zeitschriftenaufsatz
Journal Article
2019 Aluminum acceptor activation and charge compensation in implanted p-type 4H-SiC
Weiße, J.; Hauck, M.; Krieger, M.; Bauer, A.J.; Erlbacher, T.
Zeitschriftenaufsatz
Journal Article
2019 Attenuated phase shift mask for extreme ultraviolet: Can they mitigate three-dimensional mask effects?
Erdmann, A.; Evanschitzky, P.; Mesilhy, H.; Philipsen, V.; Hendrickx, E.; Bauer, M.
Zeitschriftenaufsatz
Journal Article
2019 Decoration of Al Implantation Profiles in 4H-SiC by Bevel Grinding and Dry Oxidation
Kocher, Matthias; Erlbacher, Tobias; Rommel, Mathias; Bauer, Anton J.
Konferenzbeitrag
Conference Paper
2019 Raman Spectroscopy Characterization of Ion Implanted 4H-SiC and its Annealing Effects
Xu, Zongwei; Song, Ying; Rommel, Mathias; Liu, T.; Kocher, Matthias; He, Z.D.; Wang, H.; Yao, B.T.; Liu, L.; Fang, Fengzhou
Konferenzbeitrag
Conference Paper
2019 Lifetime engineering in 4H-SiC materials and devices
Rommel, Mathias; Erlekampf, Jürgen; Kallinger, Birgit; Weiße, Julietta; Berwian, Patrick; Friedrich, Jochen; Erlbacher, Tobias
Vortrag
Presentation
Diese Liste ist ein Auszug aus der Publikationsplattform Fraunhofer-Publica

This list has been generated from the publication platform Fraunhofer-Publica

Jahr
Year
Titel/Autor:in
Title/Author
Publikationstyp
Publication Type
2018 Elektronik
Bauer, Anton; Bär, Eberhard; Erlbacher, Tobias; Friedrich, Jochen; Lorenz, Jürgen; Rommel, Mathias; Schellenberger, Martin
Aufsatz in Buch
Book Article
2018 Influence and mutual interaction of process parameters on the Z1/2 defect concentration during epitaxy of 4H-SiC
Erlekampf, Jürgen; Kaminzky, Daniel; Rosshirt, Katharina; Kallinger, Birgit; Rommel, Mathias; Berwian, Patrick; Friedrich, Jochen; Frey, Lothar
Konferenzbeitrag
Conference Paper
2018 Dose dependent profile deviation of implanted aluminum in 4H-SiC during high temperature annealing
Kocher, Matthias; Rommel, Mathias; Sledziewski, Tomasz; Häublein, Volker; Bauer, Anton
Poster
2018 Topic review: Application of raman spectroscopy characterization in micro/nano-machining
Xu, Zongwei; He, Zhongdu; Song, Ying; Fu, Xiu; Rommel, Mathias; Luo, Xichun; Hartmaier, Alexander; Zhang, Junjie; Fang, Fengzhou
Zeitschriftenaufsatz
Journal Article
2018 Large-area layer counting of 2D materials via visible reflection spectroscopy
Hutzler, Andreas; Matthus, C.D.; Dolle, C.; Rommel, M.; Jank, M.P.M.; Spiecker, E.; Frey, L.
Poster
2018 Mass Separation Issues for the Implantation of Doubly Charged Aluminum Ions
Häublein, V.; Bauer, A.J.; Ryssel, H.; Frey, L.
Konferenzbeitrag
Conference Paper
2018 Principle of lifetime-engineering in 4H-SiC by ion implantation
Erlekampf, Jürgen; Kallinger, Birgit; Berwian, Patrick; Rommel, Mathias; Friedrich, Jochen; Frey, Lothar; Erlbacher, Tobias
Poster
2018 Unravelling the Mechanisms of Gold-Silver Core-Shell Nanostructure Formation by in Situ TEM Using an Advanced Liquid Cell Design
Hutzler, A.; Schmutzler, T.; Jank, M.P.M.; Branscheid, R.; Unruh, T.; Spiecker, E.; Frey, L.
Zeitschriftenaufsatz
Journal Article
2018 Detailed characterisation of focused ion beam induced lateral damage on silicon carbide samples by electrical scanning probe microscopy and transmission electron microscopy
Stumpf, Florian; Abu Quba, A.A.; Singer, Philip; Rumler, Maximilian; Cherkashin, Nikolay; Schamm-Chardon, Sylvie; Cours, Robin; Rommel, Mathias
Zeitschriftenaufsatz
Journal Article
2018 Strukturierungsverfahren
Fader, Robert; Lorenz, Jürgen; Rommel, Mathias; Baum, Mario; Danylyuk, Serhiy; Gillner, Arnold; Stollenwerk, Jochen; Bläsi, Benedikt
Aufsatz in Buch
Book Article
2018 Nano- and micro-patterned S-, H- and X-PDMS for cell-based applications: Comparison of wettability, roughness and cell-derived parameters
Scharin-Mehlmann, Marina; Häring, Aaron; Rommel, Mathias; Dirnecker, Tobias; Friedrich, Oliver; Frey, Lothar; Gilbert, Daniel F.
Zeitschriftenaufsatz
Journal Article
2018 Schottky diode and method for its manufacturing
Erlbacher, Tobias; Hürner, Andreas
Patent
2018 Influence of triangular defects on the electrical characteristics of 4H-SiC devices
Schoeck, J.; Schlichting, H.; Kallinger, B.; Erlbacher, T.; Rommel, M.; Bauer, A.J.
Konferenzbeitrag
Conference Paper
2018 Novel approach based on continuous trench modelling to predict focused ion beam prepared freeform surfaces
Bilbao-Guillerna, A.; Eachambadi, R.T.; Cadot, G.B.J.; Axinte, D.A.; Billingham, J.; Stumpf, F.; Beuer, S.; Rommel, M.
Zeitschriftenaufsatz
Journal Article
2018 Dose Dependent Profile Deviation of Implanted Aluminum in 4H-SiC During High Temperature Annealing
Kocher, Matthias; Rommel, Mathias; Sledziewski, Tomasz; Häublein, Volker; Bauer, Anton J.
Konferenzbeitrag
Conference Paper
2018 TLS-dicing for SiC - Latest assessment results
Lewke, D.; Cerezuela Barreto, M.; Dohnke, K.; Zühlke, H.-U.; Belgardt, C.; Schellenberger, M.
Konferenzbeitrag
Conference Paper
2018 Determination of compensation ratios of Al-implanted 4H-SiC by TCAD modelling of TLM measurements
Kocher, Matthias; Yao, Boteng; Weisse, Julietta; Rommel, Mathias; Xu, Zongwei; Erlbacher, Tobias; Bauer, Anton
Poster
2018 Lifetime testing method for ceramic capacitors for power electronics applications
Dresel, Fabian; Tham, Nils; Erlbacher, Tobias; Schletz, Andreas
Konferenzbeitrag
Conference Paper
2018 Influence of Al doping concentration and annealing parameters on TiAl based Ohmic contacts on 4H-SiC
Kocher, Matthias; Rommel, Mathias; Erlbacher, Tobias; Bauer, Anton J.
Konferenzbeitrag
Conference Paper
2018 Design of a Power Flow Control Converter for Bipolar Meshed LVDC Distribution Grids
Purgat, P.; MacKay, L.; Schulz, M.; Han, Y.; Qin, Z.; März, M.; Bauer, P.
Konferenzbeitrag
Conference Paper
2018 Laser Surface Microstructuring of a Bio-Resorbable Polymer to Anchor Stem Cells, Control Adipocyte Morphology, and Promote Osteogenesis
Ortiz, Rocio; Aurrekoetxea-Rodríguez, Iskander; Rommel, Mathias; Quintana, Iban; Vivanco, Maria; Toca-Herrera, Jose Luis
Zeitschriftenaufsatz
Journal Article
2018 Analysis of compensation effects in aluminum-implanted 4H-SiC devices
Weisse, J.; Hauck, M.; Sledziewski, T.; Tschiesche, M.; Krieger, M.; Bauer, A.; Mitlehner, H.; Frey, L.; Erlbacher, T.
Konferenzbeitrag
Conference Paper
2018 Decoration of Al implantation profiles in 4H-SiC by bevel grinding and dry oxidation
Kocher, Matthias; Erlbacher, Tobias; Rommel, Mathias; Bauer, Anton
Poster
2018 Symmetry and structure of carbon-nitrogen complexes in gallium arsenide from infrared spectroscopy and first-principles calculations
Künneth, C.; Kölbl, S.; Wagner, H.E.; Häublein, V.; Kersch, A.; Alt, H.C.
Zeitschriftenaufsatz
Journal Article
2018 Electrical properties of schottky-diodes based on B doped diamond
Erlbacher, T.; Huerner, A.; Zhu, Y.; Bach, L.; Schletz, A.; Zürbig, Verena; Pinti, Lucas; Kirste, Lutz; Giese, Christian; Nebel, Christoph E.; Bauer, A.J.; Frey, L.
Konferenzbeitrag
Conference Paper
2018 Evidence of low injection efficiency for implanted p-emitters in bipolar 4H-SiC high-voltage diodes
Matthus, C.D.; Huerner, A.; Erlbacher, T.; Bauer, A.; Frey, L.
Zeitschriftenaufsatz
Journal Article
2018 Raman spectroscopy characterization of ion implanted 4H-SiC and its annealing effects
Xu, Zongwei; Song, Y.; Rommel, Mathias; Liu, T.; Kocher, Matthias; He, Z.D.; Wang, H.; Yao, B.T.; Liu, L.; Fang, F.Z.
Poster
2018 Flexible thin film bending sensor based on Bragg gratings in hybrid polymers
Girschikofsky, Maiko; Rosenberger, Manuel; Förthner, Michael; Rommel, Mathias; Frey, Lothar; Hellmann, Ralf
Konferenzbeitrag
Conference Paper
2018 Strahlungssensor zur Detektion schwacher Strahlungssignale
Erlbacher, Tobias; Matthus, Christian
Patent
2018 The GaN trench gate MOSFET with floating islands
Shen, L.; Müller, S.; Cheng, X.; Zhang, D.; Zheng, L.; Xu, D.; Yu, Y.; Meissner, E.; Erlbacher, T.
Zeitschriftenaufsatz
Journal Article
2018 Human Sweat Analysis Using a Portable Device Based on a Screen‐printed Electrolyte Sensor
Zoerner, A.; Oertel, S.; Jank, M.P.M.; Frey, L.; Langenstein, B.; Bertsch, T.
Zeitschriftenaufsatz
Journal Article
2018 Defect functional structures of 4H-SiC and diamond induced by ion implantation: MD simulation and spectral characterization
Xu, Zongwei; Zhao, Junlei; Djurabekova, Flyura; Rommel, Mathias; Nordlund, Kai
Vortrag
Presentation
2018 Analytical model for the influence of the gate-voltage on the forward conduction properties of the body-diode in SiC-MOSFETs
Huerner, A.; Heckel, T.; Enduschat, A.; Erlbacher, T.; Bauer, A.J.; Frey, L.
Konferenzbeitrag
Conference Paper
2018 Impact of Al-ion implantation on the formation of deep defects in n-type 4H-SiC
Weiße, Julietta; Hauck, Martin; Krieger, Michael; Erlekampf, Jürgen; Mitlehner, Heinz; Bauer, Anton J.; Rommel, Mathias; Häublein, Volker; Erlbacher, Tobias; Csato, Constantin; Rüb, Michael; Akhmadaliev, Shavkat; Frey, Lothar
Konferenzbeitrag
Conference Paper
2018 One-step nanoimprinted Bragg grating sensor based on hybrid polymers
Förthner, Michael; Girschikofsky, Maiko; Rumler, Maximilian; Stumpf, Florian; Rommel, Mathias; Hellmann, Ralf; Frey, Lothar
Zeitschriftenaufsatz
Journal Article
2018 On the limits of scalpel AFM for the 3D electrical characterization of nanomaterials
Chen, Shaochuan; Jiang, Lanlan; Buckwell, Mark; Jing, Xu; Ji, Yanfeng; Grustan-Gutierrez, Enric; Hui, Fei; Shi, Yuanyuan; Rommel, Mathias; Paskaleva, Albena; Benstetter, Günther; Ng, Wing. H.; Mehonic, Adnan; Kenyon, Anthony J.; Lanza, Mario
Zeitschriftenaufsatz
Journal Article
2018 Comparative Study of 4H-SiC UV-Sensors with Ion Implanted and Epitaxially Grown p-Emitter
Matthus, C.D.; Erlbacher, T.; Bauer, A.J.; Frey, L.
Konferenzbeitrag
Conference Paper
2018 Investigation of Ga ion implantation-induced damage in single-crystal 6H-SiC
He, Zhongdu; Xu, Zongwei; Rommel, Mathias; Yao, Boteng; Liu, Tao; Song, Ying; Fang, Fengzhou
Zeitschriftenaufsatz
Journal Article
2018 Heterogeneous integration of vertical GaN power transistor on Si capacitor for DC-DC converters
Yu, Zechun; Zeltner, Stefan; Boettcher, Norman; Rattmann, Gudrun; Leib, Jürgen; Bayer, Christoph Friedrich; Schletz, Andreas; Erlbacher, Tobias; Frey, Lothar
Vortrag
Presentation
2018 Future technology trends
Lorenz, Leo; Erlbacher, Tobias; Hilt, Oliver
Aufsatz in Buch
Book Article
2018 Advances in thermal laser separation: Process monitoring in a kerf-free laser-based cutting technology to ensure high yield
Barreto, M.C.; Roeder, G.; Steinhoff, M.; Schellenberger, M.; Bauer, A.
Zeitschriftenaufsatz
Journal Article
2018 Normalized differential conductance to study current conduction mechanisms in MOS structures
Nouibat, T.H.; Messai, Z.; Chikouch, D.; Ouennoughi, Z.; Rouag, N.; Rommel, Mathias; Frey, Lothar
Zeitschriftenaufsatz
Journal Article
2018 Attenuated PSM for EUV
Erdmann, A.; Evanschitzky, P.; Mesilhy, H.; Philipsen, V.; Hendrickx, E.; Bauer, M.
Konferenzbeitrag
Conference Paper
2018 Defects and carrier lifetime in 4H-Silicon Carbide
Kallinger, Birgit; Erlekampf, Jürgen; Rommel, Mathias; Berwian, Patrick; Friedrich, J.; Matthus, Christian D.
Vortrag
Presentation
2018 TiO2 surface functionalization of COC based planar waveguide Bragg gratings for refractive index sensing
Rosenberger, Manuel; Girschikofsky, Maiko; Förthner, Michael; Belle, Stefan; Rommel, Mathias; Frey, Lothar; Schmauß, Bernhard; Hellmann, Ralf
Zeitschriftenaufsatz
Journal Article
Diese Liste ist ein Auszug aus der Publikationsplattform Fraunhofer-Publica

This list has been generated from the publication platform Fraunhofer-Publica

Jahr
Year
Titel/Autor:in
Title/Author
Publikationstyp
Publication Type
2017 Influence of triangular defects on the electrical characteristics of 4H-SiC devices
Schöck, Johannes; Schlichting, Holger; Kallinger, Birgit; Erlbacher, Tobias; Rommel, Mathias; Bauer, Anton J.
Poster
2017 Switching SiC devices faster and more efficient using a DBC mounted terminal decoupling Si-RC element
Matlok, S.; Erlbacher, T.; Krach, F.; Eckardt, B.
Konferenzbeitrag
Conference Paper
2017 Waveguide bragg gratings in Ormocer®s for temperature sensing
Girschikofsky, Maiko; Rosenberger, Manuel; Förthner, Michael; Rommel, Mathias; Frey, Lothar; Hellmann, Ralf
Zeitschriftenaufsatz
Journal Article
2017 Experimental verification of a self-triggered solid-state circuit breaker based on a SiC BIFET
Albrecht, M.; Hürner, A.; Erlbacher, T.; Bauer, A.J.; Frey, L.
Konferenzbeitrag
Conference Paper
2017 Polymerization related deformations in multilayer soft stamps for nanoimprint
Förthner, Michael; Papenheim, Marc; Rumler, Maximilian; Stumpf, Florian; Baier, Leander; Rommel, Mathias; Scheer, Hella-Christin; Frey, Lothar
Zeitschriftenaufsatz
Journal Article
2017 Determination of the selectivity of printed wearable sweat sensors
Zörner, A.; Oertel, S.; Schmitz, B.; Lang, N.; Jank, M.P.M.; Frey, L.
Konferenzbeitrag
Conference Paper
2017 Tiegel zur Herstellung von Silicium-Ingots, Verfahren zu dessen Herstellung sowie Silicium-Ingot
Schneider, Veronika; Reimann, Christian; Friedrich, Jochen; Sans, Jürgen; Kuczynski, Maciej
Patent
2017 Verfahren zur Überprüfung eines Trennschrittes bei der Zerteilung eines flachen Werkstückes in Teilstücke
Tobisch, Alexander; Schellenberger, Martin; Lewke, Dirk
Patent
2017 Investigation of high-k dielectric stacks by C-AFM: Advantages, limitations, and possible applications
Rommel, Mathias; Paskaleva, Albena
Aufsatz in Buch
Book Article
2017 Enhanced contamination control methods in advanced wafer processing
Pfeffer, M.; Richter, H.; Altmann, R.; Leibold, A.; Bauer, A.
Konferenzbeitrag
Conference Paper
2017 Advanced 4H-SiC p-i-n Diode as Highly Sensitive High-Temperature Sensor Up To 460 degrees C
Matthus, C.D.; Erlbacher, T.; Hess, A.; Bauer, A.J.; Frey, L.
Zeitschriftenaufsatz
Journal Article
2017 Implementation of 4H-SiC PiN-diodes as nearly linear temperature sensors up to 800 K towards SiC multi-sensor integration
Matthus, C.D.; Erlbacher, T.; Schöfer, B.; Bauer, A.J.; Frey, L.
Konferenzbeitrag
Conference Paper
2017 Large area manufacturing of plasmonic colour filters using substrate conformal imprint lithography
Rumler, Maximilian; Foerthner, M.; Baier, L.; Evanschitzky, P.; Becker, M.; Rommel, M.; Frey, L.
Zeitschriftenaufsatz
Journal Article
2017 One-step fabrication of hierarchical structures by direct laser writing through PDMS molds
Rumler, Maximilian; Förthner, Michael; Baier, Leander; Marhenke, Julius; Kollmuss, Manuel; Michel, Felix; Becker, Marco; Rommel, Mathias
Vortrag
Presentation
2017 Monolithically integrated solid-state-circuit-breaker for high power applications
Huerner, A.; Erlbacher, T.; Bauer, A.J.; Frey, L.
Konferenzbeitrag
Conference Paper
2017 Nanoimprinted surface relief Bragg gratings for sensor applications
Förthner, Michael; Girschikofsky, Maiko; Rumler, Maximilian; Rommel, Mathias; Hellmann, Ralf; Frey, Lothar
Poster
2017 Fabrication of Bragg grating sensors in UV-NIL structured Ormocer waveguides
Girschikofsky, Maiko; Förthner, Michael; Rommel, Mathias; Frey, Lothar; Hellmann, Ralf
Vortrag
Presentation
2017 System integration of printed biosensors for sweat electrolytes with data acquisition via Bluetooth to App
Oertel, S.; Jank, M.; Zörner, A.; Schmitz, B.; Lang, N.
Konferenzbeitrag
Conference Paper
2017 Fabrication of Bragg grating sensors in UV-NIL structured Ormocer waveguides
Girschikofsky, Maiko; Förthner, Michael; Rommel, Mathias; Frey, Lothar; Hellmann, Ralf
Konferenzbeitrag
Conference Paper
2017 Point contact current voltage measurements of 4H-SiC samples with different doping profiles
Kocher, Matthias; Niebauer, Michael; Rommel, Mathias; Haeublein, Volker; Bauer, Anton
Konferenzbeitrag
Conference Paper
2017 One-step fabrication of hierarchical structures
Rumler, Maximilian; Förthner, Michael; Kollmuss, Manuel; Baier, Leander; Stumpf, Florian; Becker, Marco; Rommel, Mathias; Frey, Lothar
Poster
2017 Generalized approach to design multi-layer stacks for enhanced optical detectability of ultrathin layers
Hutzler, Andreas; Matthus, Christian D.; Rommel, Mathias; Frey, Lothar
Zeitschriftenaufsatz
Journal Article
2017 Resistless Ga+ beam lithography for flexible prototyping of nanostructures in different materials by reactive ion etching
Rommel, Mathias; Rumler, Maximilian; Haas, Anke; Beuer, Susanne
Vortrag
Presentation
2017 Raman micro-spectroscopy as a non-destructive key analysis tool in current power semiconductor manufacturing
Biasio, M. de; Kraft, M.; Geier, E.; Goller, B.; Bergmann, C.; Esteve, R.; Cerezuela-Barreto, M.; Lewke, D.; Schellenberger, M.; Roesner, M.
Konferenzbeitrag
Conference Paper
2017 Influence of Al doping concentration and annealing parameters on TiAl based ohmic contacts on 4H-SiC
Kocher, Matthias; Rommel, Mathias; Erlbacher, Tobias; Bauer, Anton
Poster
2017 Complex 3D structures via double imprint of hybrid structures and sacrificial mould techniques
Steinberg, Christian; Rumler, Maximilian; Runkel, Manuel; Papenheim, Marc; Wang, Si; Mayer, Andre; Becker, Marco; Rommel, Mathias; Scheer, Hella-Christin
Zeitschriftenaufsatz
Journal Article
2017 Stress reduction in high voltage MIS capacitor fabrication
Banzhaf, S.; Kenntner, J.; Grieb, M.; Schwaiger, S.; Erlbacher, T.; Bauer, A.J.; Frey, L.; Frey, L.
Konferenzbeitrag
Conference Paper
2017 Optimization of 4H-SiC photodiodes as selective UV sensors
Matthus, C.D.; Burenkov, A.; Erlbacher, T.
Konferenzbeitrag
Conference Paper
2017 Novel advanced analytical design tool for 4H-SiC VDMOSFET devices
Benedetto, L. di; Licciardo, G.D.; Erlbacher, T.; Bauer, A.J.; Rubino, A.
Konferenzbeitrag
Conference Paper
2017 Bulk lifetime characterization of corona charged silicon wafers with high resistivity by means of microwave detected photoconductivity
Engst, Christian R.; Rommel, Mathias; Bscheid, Christian; Eisele, Ignaz; Kutter, Christoph
Zeitschriftenaufsatz
Journal Article
2017 4.5 kV SiC junction barrier schottky diodes with low leakage current and high forward current density
Schöck, Johannes; Büttner, Jonas; Rommel, Mathias; Erlbacher, Tobias; Bauer, Anton
Konferenzbeitrag
Conference Paper
2017 Influence and mutual interaction of process parameters on the Z1/2 defect concentration during epitaxy of 4H-SiC
Erlekampf, Jürgen; Kaminzky, Daniel; Roßhirt, Katharina; Kallinger, Birgit; Rommel, Mathias; Berwian, Patrick; Friedrich, Jochen; Frey, Lothar
Poster
Diese Liste ist ein Auszug aus der Publikationsplattform Fraunhofer-Publica

This list has been generated from the publication platform Fraunhofer-Publica

Jahr
Year
Titel/Autor:in
Title/Author
Publikationstyp
Publication Type
2016 Waveguide Bragg gratings in Ormocer hybrid polymers
Girschikofsky, Maiko; Förthner, Michael; Rommel, Mathias; Frey, Lothar; Hellmann, Ralf
Zeitschriftenaufsatz
Journal Article
2016 Wetting and infiltration of nitride bonded silicon nitride by liquid silicon
Schneider, V.; Reimann, C.; Friedrich, J.
Zeitschriftenaufsatz
Journal Article
2016 Systematic characterization of doping profiles in 4H-SiC by point contact current voltage measurements
Kocher, Matthias; Niebauer, Michael; Rommel, Mathias; Haeublein, Volker; Bauer, Anton
Poster
2016 Electrical properties of solution processed layers based on Ge-Si alloy nanoparticles
Meric, Z.; Mehringer, C.; Jank, M.P.M.; Peukert, W.; Frey, L.
Zeitschriftenaufsatz
Journal Article
2016 Materials integration for printed zinc oxide thin-film transistors: Engineering of a fully-printed semiconductor/contact scheme
Liu, X.; Wegener, M.; Polster, S.; Jank, M.P.M.; Roosen, A.; Frey, L.
Zeitschriftenaufsatz
Journal Article
2016 Ion implantation of polypropylene films for the manufacture of thin film capacitors
Häublein, V.; Birnbaum, E.; Ryssel, H.; Frey, L.; Djupmyr, M.
Konferenzbeitrag
Conference Paper
2016 Combination of direct laser writing and soft lithography molds for combined nano- and microfabrication
Rumler, Maximilian; Kollmuss, M.; Baier, L.; Michel, F.; Förthner, M.; Becker, M.; Rommel, M.; Frey, L.
Konferenzbeitrag
Conference Paper
2016 Post-trench processing of silicon deep trench capacitors for power electronic applications
Banzhaf, Stefanie; Schwaiger, Stefan; Erlbacher, Tobias; Bauer, Anton J.; Frey, Lothar
Konferenzbeitrag
Conference Paper
2016 Towards highly integrated, automotive power SoCs using capacitors operating at 100 V implemented in TSV
Grünler, S.; Rattmann, G.; Erlbacher, T.; Bauer, A.J.; Krach, F.; Frey, L.
Konferenzbeitrag
Conference Paper
2016 Optimized design for 4H-SiC power DMOSFETs
Benedetto, Luigi di; Licciardo, Gian D.; Erlbacher, Tobias; Bauer, Anton J.; Rubino, Alfredo
Zeitschriftenaufsatz
Journal Article
2016 Optimization of 4H-SiC UV photodiode performance using numerical process and device simulation
Burenkov, Alex; Matthus, Christian David; Erlbacher, Tobias
Zeitschriftenaufsatz
Journal Article
2016 Correlation of film morphology and defect content with the charge-carrier transport in thin-film transistors based on ZnO nanoparticles
Polster, S.; Jank, M.P.M.; Frey, L.
Zeitschriftenaufsatz
Journal Article
2016 Nitride bonded silicon nitride as a reusable crucible material for directional solidification of silicon
Schneider, V.; Reimann, C.; Friedrich, J.; Müller, G.
Zeitschriftenaufsatz
Journal Article
2016 Flexographic printing of nanoparticulate tin-doped indium oxide inks on PET foils and glass substrates
Wegener, M.; Spiehl, D.; Sauer, H.M.; Mikschl, F.; Liu, X.; Kölpin, N.; Schmidt, M.; Jank, M.P.M.; Dörsam, E.; Roosen, A.
Zeitschriftenaufsatz
Journal Article
2016 Hybrid polymers processed by substrate conformal imprint lithography for the fabrication of planar Bragg gratings
Förthner, Michael; Rumler, Maximilian; Stumpf, Florian; Fader, Robert; Rommel, Mathias; Frey, Lothar; Girschikofsky, Maiko; Belle, Stefan; Hellmann, Ralf; Klein, Jan Jasper
Zeitschriftenaufsatz
Journal Article
2016 TiO2 nanotubes: Nitrogen-ion implantation at low dose provides noble-metal-free photocatalytic H2-evolution activity
Zhou, X.; Häublein, V.; Liu, N.; Nguyen, N.T.; Zolnhofer, E.M.; Tsuchiya, H.; Killian, M.S.; Meyer, K.; Frey, L.; Schmuki, P.
Zeitschriftenaufsatz
Journal Article
2016 ATHENIS-3D: Automotive tested high-voltage and embedded non-volatile integrated SoC platform with 3D technology
Wachmann, Ewald; Saponara, Sergio; Zambelli, C.; Tisserand, Pierre; Charbonnier, Jean; Erlbacher, Tobias; Grünler, Saeideh; Hartler, C.; Siegert, J.; Chassard, P.; Ton, D.M.; Ferrari, L.; Fanucci, L.
Konferenzbeitrag
Conference Paper
2016 Enhancement of the partial discharge inception voltage of DBCs by adjusting the permittivity of the encapsulation
Bayer, Christoph Friedrich; Waltrich, Uwe; Soueidan, Amal; Schneider, Richard; Bär, Eberhard; Schletz, Andreas
Konferenzbeitrag
Conference Paper
2016 Prospects and issues of nanomaterials use in microelectronics
Jank, Michael; Bauer, Anton; Frey, Lothar
Poster
2016 Monitoring of biomarkers in sweat with printed sensors combined with sport wearables
Oertel, S.; Jank, M.; Schmitz, B.; Lang, N.
Konferenzbeitrag
Conference Paper
2016 Silicon integrated RC snubbers for applications up to 900V with reduced mechanical stress and high manufacturability
Krach, Florian; Thielen, Nils; Heckel, Thomas; Bauer, Anton J.; Erlbacher, Tobias; Frey, Lothar
Konferenzbeitrag
Conference Paper
2016 4.5 kV SiC junction barrier schottky diodes with low leakage current and high forward current density
Schöck, Johannes; Büttner, Jonas; Rommel, Mathias; Erlbacher, Tobias; Bauer, Anton
Poster
2016 Direct optical stress sensing in semiconductor manufacturing using raman micro-spectrometry
Biasio, M. de; Kraft, M.; Roesner, M.; Bergmann, C.; Cerezuela-Barreto, M.; Lewke, D.; Schellenberger, M.
Konferenzbeitrag
Conference Paper
2016 Monolithic 3D TSV-based high-voltage, high-temperature capacitors
Gruenler, S.; Rattmann, G.; Erlbacher, T.; Bauer, A.J.; Frey, L.
Zeitschriftenaufsatz
Journal Article
2016 Contamination control for wafer container used within 300 mm manufacturing for power microelectronics
Schneider, G.; Nguyen, T.Q.; Taubert, M.; Bounouar, J.; Le-Guet, C.; Leibold, A.; Richter, H.; Pfeffer, M.
Konferenzbeitrag
Conference Paper
2016 Simulating wafer bow for integrated capacitors using a multiscale approach
Wright, Alan; Krach, Florian; Thielen, Nils; Grünler, Saeideh; Erlbacher, Tobias; Pichler, Peter
Konferenzbeitrag
Conference Paper
2016 Innovative monolithic RC-snubber for fast switching power modules
Krach, F.; Heckel, T.; Frey, L.; Bauer, A.J.; Erlbacher, T.; März, M.
Konferenzbeitrag
Conference Paper
2016 A model of electric field distribution in gate oxide and JFET-region of 4H-SiC DMOSFETs
Benedetto, Luigi di; Licciardo, Gian D.; Erlbacher, Tobias; Bauer, Anton J.; Liguori, R.; Rubino, Alfredo
Zeitschriftenaufsatz
Journal Article
2016 A trade-off between nominal forward current density and surge current capability for 4.5kV SiC MPS diodes
Huang, Yaren; Erlbacher, Tobias; Buettner, Jonas; Wachutka, Gerhard
Konferenzbeitrag
Conference Paper
2016 Stamps for nanoimprint lithography - R&D at Fraunhofer IISB
Rommel, Mathias; Rumler, Maximilian; Förthner, Michael; Scharin, Marina; Fader, R.; Schmidt, H.
Vortrag
Presentation
2016 Conduction loss reduction for bipolar injection field-effect-transistors (BIFET)
Hürner, Andreas; Mitlehner, Heinz; Erlbacher, Tobias; Bauer, Anton J.; Frey, Lothar
Konferenzbeitrag
Conference Paper
2016 Combination of direct laser writing and soft lithography molds for combined nano- and microfabrication
Rumler, Maximilian; Kollmuss, Manuel; Baier, Leander; Michel, Felix; Förthner, Michael; Becker, Marco; Rommel, Mathias; Frey, Lothar
Poster
2016 Quantification and reduction of deformations in multilayer soft-NIL stamps
Förthner, Michael; Papenheim, Marc; Rumler, Maximilian; Stumpf, Florian; Baier, Leander; Rommel, Mathias; Schlachter, Florian; Hornung, Michael; Scheer, Hella-Christin; Frey, Lothar
Poster
2016 Particle free handling of substrates
Samadi, H.; Pfeffer, M.; Altmann, R.; Leibold, A.; Gumprecht, T.; Bauer, A.
Zeitschriftenaufsatz
Journal Article
2016 The efficiency of hydrogen-doping as a function of implantation temperature
Jelinek, Moriz; Laven, Johannes G.; Ganagona, Naveen Goud; Schustereder, Werner; Schulze, Hans-Joachim; Rommel, Mathias; Frey, Lothar
Konferenzbeitrag
Conference Paper
2016 Advanced detection method for polymer residues on semiconductor substrates
Richter, H.; Pfitzner, L.; Pfeffer, M.; Bauer, A.; Siegert, J.; Bodner, T.
Konferenzbeitrag
Conference Paper
2016 Ion implanted 4H-SiC UV pin-diodes for solar radiation detection - simulation and characterization
Matthus, Christian D.; Erlbacher, Tobias; Burenkov, Alexander; Bauer, Anton J.; Frey, Lothar
Konferenzbeitrag
Conference Paper
2016 Imaging defect luminescence of 4H-SiC by ultraviolet-photoluminescence
Berwian, Patrick; Kaminzky, Daniel; Roßhirt, Katharina; Kallinger, Birgit; Friedrich, Jochen; Oppel, Steffen; Schneider, Adrian; Schütz, Michael
Konferenzbeitrag
Conference Paper
2016 Potential of 4H-SiC CMOS for high temperature applications using advanced lateral p-MOSFETs
Albrecht, Matthäus; Erlbacher, Tobias; Bauer, Anton J.; Frey, Lothar
Konferenzbeitrag
Conference Paper
2016 Comparative spatially resolved characterization of a Czochralski-grown silicon crystal by different laser-based imaging techniques
Herms, Martin; Wagner, Matthias; Molchanov, Alexander; Rommel, Mathias; Zschorsch, Markus; Würzner, Sindy
Konferenzbeitrag
Conference Paper
2016 Quantification and reduction of deformations in multilayer soft-NIL stamps
Förthner, Michael; Papenheim, Marc; Rumler, Maximilian; Stumpf, Florian; Baier, Leander; Rommel, Mathias; Schlachter, Florian; Hornung, Michael; Scheer, Hella-Christin; Frey, Lothar
Poster
2016 Enhancing partial discharge inception voltage of DBCs by geometrical variations based on simulations of the electric field strength
Bayer, Christoph Friedrich; Waltrich, Uwe; Schneider, Richard; Soueidan, Amal; Bär, Eberhard; Schletz, Andreas
Konferenzbeitrag
Conference Paper
2016 Metastable defects in proton implanted and annealed silicon
Jelinek, Moriz; Laven, Johannes G.; Ganagona, Naveen Goud; Job, Reinhart; Schustereder, Werner; Schulze, Hans-Joachim; Rommel, Mathias; Frey, Lothar
Konferenzbeitrag
Conference Paper
2016 Modelling of effective minority carrier lifetime in 4H-SiC n-type epilayers
Kaminzky, Daniel; Kallinger, Birgit; Berwian, Patrick; Rommel, Mathias; Friedrich, Jochen
Konferenzbeitrag
Conference Paper
2016 Semiconductor equipment assessment - An enabler for production ready equipment
Pfeffer, M.; Pfitzner, L.; Bauer, A.
Konferenzbeitrag
Conference Paper
2016 Drill-down analysis with equipment health monitoring
Krauel, Christopher; Weishäupl, Laura; Pfeffer, Markus
Vortrag
Presentation
2016 Analytical Model and Design of 4H-SiC Planar and Trenched JBS Diodes
Di Benedetto, L.; Licciardo, G.D.; Erlbacher, T.; Bauer, A.J.; Bellone, S.
Zeitschriftenaufsatz
Journal Article
Diese Liste ist ein Auszug aus der Publikationsplattform Fraunhofer-Publica

This list has been generated from the publication platform Fraunhofer-Publica

Jahr
Year
Titel/Autor:in
Title/Author
Publikationstyp
Publication Type
2015 Modelling of effective minority carrier lifetimes in 4H-SiC n-type epilayers
Kaminzky, Daniel; Kallinger, Birgit; Berwian, Patrick; Rommel, Mathias; Friedrich, Jochen
Poster
2015 Metastable defects in proton implanted and annealed silicon
Jelinek, Moriz; Laven, Johannes G.; Ganagona, N.; Job, R.; Schustereder, Werner; Schulze, Hans-Joachim; Rommel, Mathias; Frey, Lothar
Poster
2015 A DLTS study of hydrogen doped czochralski-grown silicon
Jelinek, Moriz; Laven, Johannes G.; Kirnstoetter, Stefan; Schustereder, Werner; Schulze, Hans-Joachim; Rommel, Mathias; Frey, Lothar
Zeitschriftenaufsatz
Journal Article
2015 Thin film metallization of PDMS with improved adhesion properties for micro electrode arrays
Scharin, Marina; Newcomer, Kate; Dirnecker, Tobias; Al-Naimi, A.; Rumler, Maximilian; Rommel, Mathias; Frey, Lothar
Poster
2015 Bragg gratings in imprinted Ormocer waveguides
Girschikofsky, M.; Förthner, M.; Rommel, M.; Frey, L.; Hellmann, R.
Konferenzbeitrag
Conference Paper
2015 Tailoring the electrical properties of HfO2 MOS-devices by aluminum doping
Paskaleva, Albena; Rommel, Mathias; Hutzler, Andreas; Spassov, Dencho; Bauer, Anton J.
Zeitschriftenaufsatz
Journal Article
2015 Nanoelectronics research gaps and recommendations. Editorial
Galatsis, K.; Gargini, P.; Hiramoto, T.; Beernaert, D.; DeKeersmaecker, R.; Pelka, J.; Pfitzner, L.
Editorial
2015 Classification and key feature extraction for equipment health monitoring
Krauel, Christopher; Weishäupl, Laura; Petzold, Lisa; Pfeffer, Markus; Bauer, Anton
Vortrag
Presentation
2015 Comparison of surface relief Bragg gratings fabricated by UV-SCIL and volume index Bragg gratings based on hybrid polymers
Förthner, Michael; Rumler, Maximilian; Michel, Felix; Rommel, Mathias; Frey, Lothar; Girschikofsky, Maiko; Belle, Stefan; Hellmann, Ralf; Klein, Jan Jasper
Poster
2015 Large area fabrication of hybrid polymer waveguides for planar Bragg grating sensors using UV-enhanced Substrate Conformal Imprint Lithography (UV-SCIL)
Förthner, Michael; Fader, Robert; Rumler, Maximilian; Rommel, Mathias; Frey, Lothar; Girschikofsky, M.; Belle, S.; Hellmann, R.; Klein, Jan Jasper
Poster
2015 Comparison of surface relief Bragg gratings fabricated by UV-SCIL and volume index Bragg gratings based on hybrid polymers
Förthner, Michael; Rumler, Maximilian; Michel, Felix; Rommel, Mathias; Frey, Lothar; Girschikofsky, Maiko; Belle, Stefan; Hellmann, Ralf; Klein, Jan Jasper
Poster
2015 Nano- and micrometer scale surface topography modification of Si (100) by Ga focused ion beam irradiation
Rai, Deepa; Stumpf, Florian; Frey, Lothar; Rommel, Mathias
Poster
2015 Defect Luminescence Scanner (DLS): Scientific and industrial-scale defect analysis
Oppel, Steffen; Schneider, Adrian; Schütz, Michael; Kaminzky, Daniel; Kallinger, Birgit; Weber, Jonas; Krieger, Michael
Vortrag
Presentation
2015 In situ formation of tantalum oxide - PMMA hybrid dielectric thin films for transparent electronic application
Valcu, E.E.; Musat, V.; Oertel, S.; Jank, M.P.M.; Leedham, T.
Zeitschriftenaufsatz
Journal Article
2015 Temperature dependent characterization of bipolar injection field-effect-transistors (BiFET) for determining the short-circuit-capability
Hürner, A.; Erlbacher, T.; Mitlehner, H.; Bauer, A.J.; Frey, L.
Konferenzbeitrag
Conference Paper
2015 Comparison of silicon and 4H silicon carbide patterning using focused ion beams
Veerapandian, Savita Kaliya Perumal; Beuer, Susanne; Rumler, Maximilian; Stumpf, Florian; Thomas, Keith; Pillatsch, Lex; Michler, Johannes; Frey, Lothar; Rommel, Mathias
Zeitschriftenaufsatz
Journal Article
2015 Junction formation and current transport mechanisms in hybrid n-Si/PEDOT:PSS solar cells
Jäckle, Sara; Mattiza, Matthias; Liebhaber, Martin; Brönstrup, Gerald; Rommel, Mathias; Lips, Klaus; Christiansen, Silke
Zeitschriftenaufsatz
Journal Article
2015 Functionalization of PDMS surfaces through micro- or nano-patterning to control the cellular adhesion
Scharin, Marina; Häring, Aron; Dirnecker, Tobias; Rommel, Mathias; Marhenke, Julius; Friedrich, O.; Gilbert, D.F.; Herrmann, Martin; Frey, Lothar
Vortrag
Presentation
2015 Isotopic study of mid-infrared vibrational modes in GaAs related to carbon and nitrogen impurities
Alt, H.C.; Wagner, H.E.; Glacki, A.; Frank-Rotsch, C.; Häublein, V.
Zeitschriftenaufsatz
Journal Article
2015 Nitridgebundenes Siliziumnitrid: Wiederverwendbare Tiegel für die gerichtete Erstarrung von Silizium
Schneider, Veronika
Dissertation
Doctoral Thesis
2015 Imaging defect luminescence of 4H-SiC by UV-photoluminescence
Kaminzky, Daniel; Roßhirt, Katharina; Kallinger, Birgit; Berwian, Patrick; Friedrich, Jochen; Oppel, Steffen; Schneider, Adrian; Schütz, Michael
Vortrag
Presentation
2015 Impact of acceptor concentration on electrical properties and density of interface states of 4H-SiC n-metal-oxide-semiconductor field effect transistors studied by Hall effect
Ortiz, Guillermo; Strenger, Christian; Uhnevionak, Viktoryia; Burenkov, Alexander; Bauer, Anton J.; Pichler, Peter; Cristiano, Fuccio; Bedel-Pereira, Elena; Mortet, Vincent
Zeitschriftenaufsatz
Journal Article
2015 Current conduction mechanism of MIS devices using multidimensional minimization system program
Rouag, N.; Ouennoughi, Zahir; Rommel, Mathias; Murakami, Katsuhisa; Frey, Lothar
Zeitschriftenaufsatz
Journal Article
2015 Vorrichtung und Verfahren zur Überbrückung eines elektrischen Energiespeichers
Erlbacher, Tobias; Lorentz, Vincent; Waller, Reinhold; Rattmann, Gudrun
Patent
2015 Robust double-ring junction termination extension design for high voltage power semiconductor devices based on 4H-SiC
Hürner, A.; Benedetto, L. di; Erlbacher, T.; Mitlehner, H.; Bauer, A.J.; Frey, L.
Konferenzbeitrag
Conference Paper
2015 Advanced contamination control methods for yield enhancement. YE: Yield Enhancement/Learning
Richter, H.; Leibold, A.; Altmann, R.; Doffek, B.; Koebl, J.; Pfeffer, M.; Bauer, A.; Schneider, G.; Cheung, D.
Konferenzbeitrag
Conference Paper
2015 Characterization and application of nano- and microstructured silicon-polymer-based surfaces for manipulation of cells
Scharin, Marina; Haering, Aaron; Gilbert, D.; Dirnecker, Tobias; Stumpf, Florian; Rommel, Mathias; Friedrich, Oliver; Frey, Lothar
Poster
2015 Optical bragg gratings in inorganic-organic hybrid polymers for highly sensitive temperature measurements
Girschikofsky, Maiko; Belle, Stefan; Hellmann, Ralf; Förthner, Michael; Frey, Lothar; Rommel, Mathias; Fader, Robert
Konferenzbeitrag
Conference Paper
2015 Improved electrical behavior of ZrO2-based MIM structures by optimizing the O3 oxidation pulse time
Paskaleva, A.; Weinreich, W.; Bauer, A.J.; Lemberger, M.; Frey, L.
Zeitschriftenaufsatz
Journal Article
2015 Modelling of the electrochemical etch stop with high reverse bias across pn-junctions
Szwarc, R.; Frey, L.; Weber, H.; Moder, I.; Erlbacher, T.; Rommel, M.; Bauer, A.J.
Konferenzbeitrag
Conference Paper
2015 UV-NIL R&D at Fraunhofer IISB. Past examples and future challenges
Rommel, Mathias; Rumler, Maximilian; Förthner, Michael; Scharin, Marina; Fader, Robert; Schmitt, Holger
Vortrag
Presentation
2015 Impact of post-trench processing on the electrical characteristics of 4H-SiC trench-MOS structures with thick top and bottom oxides
Banzhaf, C.T.; Grieb, M.; Rambach, M.; Bauer, A.J.; Frey, L.
Konferenzbeitrag
Conference Paper
2015 Influence of annealing, oxidation and doping on conduction-band near interface traps in 4H-SiC characterized by low temperature conductance measurements
Noll, S.; Rambach, M.; Grieb, M.; Scholten, D.; Bauer, A.; Frey, L.
Konferenzbeitrag
Conference Paper
2015 Tunable conduction type of solution-processed germanium nanoparticle based field effect transistors and their inverter integration
Meric, Z.; Mehringer, C.; Karpstein, N.; Jank, M.P.M.; Peukert, W.; Frey, L.
Zeitschriftenaufsatz
Journal Article
2015 Comprehensive study of the electron scattering mechanisms in 4H-SiC MOSFETs
Uhnevionak, Viktoryia; Burenkov, Alexander; Strenger, Christian; Ortiz, Guillermo; Bedel-Pereira, Elena; Mortet, Vincent; Cristiano, Fuccio; Bauer, Anton J.; Pichler, Peter
Zeitschriftenaufsatz
Journal Article
2015 Experimental characterisation of FIB induced lateral damage on silicon carbide samples
Stumpf, Florian; Rumler, Maximilian; Abu Quba, Abd Alaziz; Singer, Philipp; Rommel, Mathias
Poster
2015 Device optimization and application study of low cost printed temperature sensor for mobile and stationary battery based Energy Storage Systems
Grosch, J.; Teuber, E.; Jank, M.; Lorentz, V.; März, M.; Frey, L.
Konferenzbeitrag
Conference Paper
2015 Semiconductor equipment assessment - an enabler for production ready equipment
Pfeffer, M.; Pfitzner, L.; Bauer, A.
Konferenzbeitrag
Conference Paper
2015 Bioactivation and functionalization of PDMS surfaces to control cellular adhesion behaviour by micro- or nanopatterning and plasma treatment
Scharin, Marina; Rommel, Mathias; Dirnecker, Tobias; Stumpf, Florian; Zipfel, J.; Marhenke, J.; Friedrich, O.; Gilbert, D.F.; Herrmann, M.; Frey, Lothar
Poster
2015 SuperLIB: Smart Battery Management of a Dual Cell Architecture for Electric Vehicles
Kurtulus, C.; Krabb, P.; Hennige, V.; Räsänen, M.; Salminen, J.; Nuutinen, M.; Grosch, J.; Jank, M.; Teuber, E.; Lorentz, V.; Petit, M.; Martin, J.; Silvi, J.-L.; Omar, N.; Widanage, D.
Konferenzbeitrag
Conference Paper
2015 Imaging defect luminescence measurements of 4H-SiC by UV-PL
Kaminzky, Daniel; Roßhirt, Katharina; Kallinger, Birgit; Berwian, Patrick; Friedrich, Jochen; Oppel, Steffen; Schneider, Adrian; Schütz, Michael
Vortrag
Presentation
2015 Improvement of 4H-SiC material quality
Kallinger, Birgit; Kaminzky, Daniel; Rommel, Mathias; Berwian, Patrick; Friedrich, Jochen
Vortrag
Presentation
2015 Modeling of ion drift in 4H-SiC-based chemical MOSFET sensors
Erlbacher, T.; Schwarzmann, H.; Bauer, A.J.; Döhler, G.H.; Schreivogel, M.; Lutz, T.; Guillén, F.H.; Graf, J.; Fix, R.; Frey, L.
Zeitschriftenaufsatz
Journal Article
2015 Particle free handling of substrates
Samadi, H.; Pfeffer, M.; Altmann, R.; Leibold, A.; Gumprecht, T.; Bauer, A.
Konferenzbeitrag
Conference Paper
2015 Silicon nitride, a high potential dielectric for 600 V integrated RC-snubber applications
Krach, F.; Schwarzmann, H.; Bauer, A.J.; Erlbacher, T.; Frey, L.
Zeitschriftenaufsatz
Journal Article
2015 Thin film metallization of PDMS with improved adhesion properties for micro electrode arrays
Scharin, Marina; Newcomer, Kate; Al-Naimi, Abd; Dirnecker, Tobias; Rumler, Maximilian; Rommel, Mathias; Frey, Lothar
Poster
2015 Controlling cellular adhesion through micro- or nanopatterning of silicone-based surfaces to improve biomedical devices for in vitro based applications
Scharin, Marina; Rommel, Mathias; Dirnecker, Tobias; Stumpf, Florian; Zipfel, J.; Marhenke, J.; Friedrich, O.; Glibert, D.F.; Herrmann, M.; Frey, Lothar
Poster
2015 Thermal laser separation - a novel dicing technology fulfilling the demands of volume manufacturing of 4H-SiC devices
Lewke, D.; Dohnke, K.O.; Zühlke, H.U.; Cerezuela Barret, M.; Schellenberger, M.; Bauer, A.; Ryssel, H.
Konferenzbeitrag
Conference Paper
2015 Characterization and application of nano- and microstructured PDMS surfaces for manipulation of cells
Scharin, Marina; Gilbert, D.; Rommel, Mathias; Dirnecker, Tobias; Stumpf, Florian; Haering, A.; Friedrich, O.; Frey, Lothar
Vortrag
Presentation
2015 Nachbearbeitung von teilgetrennten Bauelementen in der Halbleitertechnik
Lewke, Dirk; Schellenberger, Martin
Studie
Study
2015 Defined area polymer working stamp manufacture for S&R UV-NIL by direct laser writing
Rumler, Maximilian; Michel, Felix; Becker, Marco; Baier, Leander; Förthner, Michael; Rommel, Matthias; Schleunitz, Arne; Klein, Jan Jasper
Poster
2015 Atomic scale characterization of SiO2/4H-SiC interfaces in MOSFETs devices
Beltran, A.M.; Duguay, S.; Strenger, C.; Bauer, A.J.; Cristiano, F.; Schamm-Chardon, S.
Zeitschriftenaufsatz
Journal Article
2015 Modeling of the electrochemical etch stop with high reverse bias across pn-junctions
Szwarc, Robert; Frey, Lothar; Weber, Hans; Moder, Iris; Erlbacher, Tobias; Rommel, Mathias; Bauer, Anton J.
Vortrag
Presentation
2015 High-voltage monolithic 3D capacitors based on through-silicon-via technology
Grünler, Saeideh; Rattmann, Gudrun; Erlbacher, Tobias; Bauer, Anton; Frey, Lothar
Poster
Diese Liste ist ein Auszug aus der Publikationsplattform Fraunhofer-Publica

This list has been generated from the publication platform Fraunhofer-Publica

Jahr
Year
Titel/Autor:in
Title/Author
Publikationstyp
Publication Type
2014 Enabling large area and high throughput roll-to-roll NIL by novel inkjetable and photo-curable NIL-resists
Thesen, Manuel; Rumler, Maximilian; Schlachter, Florian; Grützner, Susanne; Moormann, Christian; Rommel, Mathias; Nees, Dieter; Ruttloff, Stephan; Pfirrmann, Stefan; Vogler, Marko; Schleunitz, Arne; Grützner, Gabi
Konferenzbeitrag
Conference Paper
2014 High-mobility metal-oxide thin-film transistors by spray deposition of environmentally friendly precursors
Oertel, S.; Jank, M.P.M.; Teuber, E.; Bauer, A.J.; Frey, L.
Konferenzbeitrag
Conference Paper
2014 Large area fabrication of plasmonic color filters using UV-SCIL
Rumler, Maximilian; Fader, R.; Förthner, M.; Haas, A.; Rommel, M.; Bauer, A.J.; Frey, L.
Vortrag
Presentation
2014 Sol-gel preparation of ZrO2-PMMA for thin films transistors
Valcu, E.E.; Musat, V.; Jank, M.; Oertel, S.
Zeitschriftenaufsatz
Journal Article
2014 Optical characterization of patterned thin films
Rosu, D.; Petrik, P.; Rattmann, G.; Schellenberger, M.; Beck, U.; Hertwig, A.
Zeitschriftenaufsatz
Journal Article
2014 Automated tool for measuring nanotopography of 300 mm wafers at early stages of wafer production
Tröger, B.; Mühlig, A.; Fries, T.; Bauer, S.; Wihr, H.; Riedel, F.; Lewke, D.; Schellenberger, M.
Konferenzbeitrag
Conference Paper
2014 MeV-proton channeling in crystalline silicon
Jelinek, Moriz; Schustereder, Werner; Kirnstoetter, S.; Laven, Johannes G.; Schulze, Hans-Joachim; Rommel, Mathias; Frey, Lothar
Konferenzbeitrag
Conference Paper
2014 Nanoscale characterization of high-k dielectrics by electrical SPM methods
Rommel, Mathias
Vortrag
Presentation
2014 HCl assisted growth of thick 4H-SiC epilayers for bipolar devices
Kallinger, Birgit; Ehlers, Christian; Berwian, Patrick; Rommel, Mathias; Friedrich, Jochen
Konferenzbeitrag
Conference Paper
2014 Temperature and electrical field dependence of the ambipolar mobility in n-doped 4H-SiC
Hürner, A.; Bonse, C.; Clemmer, G.; Kallinger, B.; Heckel, T.; Erlbacher, T.; Mitlehner, H.; Häublein, V.; Bauer, A.J.; Frey, L.
Konferenzbeitrag
Conference Paper
2014 Comparison of carrier lifetime measurements and mapping in 4H SiC using time resolved photoluminescence and m-PCD
Kallinger, Birgit; Rommel, Mathias; Lilja, Louise; Hassan, Jawad ul; Booker, Ian; Janzen, Erik; Bergman, Peder
Konferenzbeitrag
Conference Paper
2014 Lateral Power Transistors in Integrated Circuits
Erlbacher, T.
Buch
Book
2014 Thickness mapping of high-k dielectrics at the nanoscale
Trapnauskas, Justinas; Rommel, Mathias; Bauer, Anton J.; Frey, Lothar
Zeitschriftenaufsatz
Journal Article
2014 Deep-level defects in high-dose proton implanted and high-temperature annealed silicon
Jelinek, Moriz; Laven, Johannes G.; Rommel, Mathias; Schustereder, Werner; Schulze, Hans-Joachim; Frey, Lothar; Job, R.
Konferenzbeitrag
Conference Paper
2014 Modification of polypropylene films for thin film capacitors by ion implantation
Häublein, V.; Birnbaum, E.; Ryssel, H.; Frey, L.; Grimm, W.
Konferenzbeitrag
Conference Paper
2014 Structure placement accuracy of wafer level stamps for substrate conformal imprint lithography
Fader, Robert; Förthner, Michael; Rumler, Maximilian; Rommel, Mathias; Bauer, Anton J.; Frey, Lothar; Verschuuren, Marc; Butschke, Jörg; Irmscher, Mathias; Storace, Eleonora; Ji, Ran; Schömbs, Ulrike
Poster
2014 Pulsed direct flame deposition and thermal annealing of transparent amorphous indium zinc oxide films as active layers in field effect transistors
Kilian, D.; Polster, S.; Vogeler, I.; Jank, M.P.M.; Frey, L.; Peukert, W.
Zeitschriftenaufsatz
Journal Article
2014 Effect of shallow n-doping on field effect mobility in p-doped channels of 4H-SiC MOS field effect transistors
Noll, S.; Rambach, M.; Grieb, M.; Scholten, D.; Bauer, A.J.; Frey, L.
Konferenzbeitrag
Conference Paper
2014 Silicon carbide in power electronics: Overcoming the obstacle of bipolar degradation
Kallinger, Birgit; Ehlers, Christian; Berwian, Patrick; Friedrich, Jochen; Rommel, Mathias
Vortrag
Presentation
2014 Inkjetable and photo-curable resists for large-area and high-throughput roll-to-roll nanoimprint lithography
Thesen, M.W.; Nees, D.; Ruttloff, S.; Rumler, Maximilian; Rommel, Mathias; Schlachter, F.; Grützner, S.; Vogler, M.; Schleunitz, A.; Grützner, G.
Zeitschriftenaufsatz
Journal Article
2014 Large area fabrication of hybrid polymer waveguides for planar Bragg grating sensors using UV-enhanced Substrate Conformal Imprint Lithography (UV-SCIL)
Förthner, Michael; Fader, Robert; Rumler, Maximilian; Rommel, Mathias; Frey, Lothar; Girschikofsky, Maiko; Belle, Stefan; Hellmann, Ralf; Klein, Jan Jasper
Poster
2014 Out-diffusion of cesium and rubidium from amorphized silicon during solid-phase epitaxial regrowth
Maier, R.; Häublein, V.; Ryssel, H.
Konferenzbeitrag
Conference Paper
2014 Optical polymers with tunable refractive index for nanoimprint technologies
Landwehr, Johannes; Fader, Robert; Rumler, Maximilian; Rommel, Mathias; Bauer, Anton J.; Frey, Lothar; Simon, B.; Fodor, B.; Petrik, Peter; Schiener, A.; Winter, Benjamin; Spiecker, Erdmann
Zeitschriftenaufsatz
Journal Article
2014 Feasibility evaluation of virtual metrology for the example of a trench etch process
Roeder, G.; Winzer, S.; Schellenberger, M.; Jank, S.; Pfitzner, L.
Zeitschriftenaufsatz
Journal Article
2014 The Factory Integration Roadmap in Semiconductor manufacturing
Moyne, J.; Schellenberger, M.; Pfitzner, L.
Konferenzbeitrag
Conference Paper
2014 High quality and high speed cutting of 4H-SiC JFET wafers including PCM structures by using thermal laser separation
Lewke, D.; Koitzsch, M.; Dohnke, K.O.; Schellenberger, M.; Zuehlke, H.-U.; Rupp, R.; Pfitzner, L.; Ryssel, H.
Konferenzbeitrag
Conference Paper
2014 New Defect Luminescence Scanner for Inline Control of Material Quality
Kallinger, Birgit; Kaminzky, Daniel; Berwian, Patrick; Oppel, Steffen; Schütz, Michael; Schneider, Adrian; Krieger, Michael; Weber, Jonas; Friedrich, Jochen
Poster
2014 Verfahren zur Herstellung einer diffusionshemmenden Beschichtung, Tiegel zum Schmelzen und/oder Kristallisieren von Nicht-Eisen Metallen sowie Verwendungszwecke
Reimann, Christian; Obermeier, Sebastian; Trempa, Matthias; Schneider, Veronika; Friedrich, Jochen
Patent
2014 Impact of fabrication process on electrical properties and on interfacial density of states in 4H-SiC n-MOSFETs studied by hall effect
Ortiz, Guillermo; Mortet, Vincent; Strenger, Christian; Uhnevionak, Viktoryia; Burenkov, Alexander; Bauer, Anton J.; Pichler, Peter; Cristiano, Fuccio; Bedel-Pereira, Elena
Konferenzbeitrag
Conference Paper
2014 Bioactivation of plane and patterned PDMS thin films by wettability engineering
Scharin, Marina; Rommel, Mathias; Dirnecker, Tobias; Marhenke, Julius; Herrmann, Benjamin; Rumler, Maximilian; Fader, Robert; Frey, Lothar; Herrmann, Martin
Zeitschriftenaufsatz
Journal Article
2014 DLTS characterization of proton-implanted silicon under varying annealing conditions
Laven, J.G.; Jelinek, M.; Job, R.; Schustereder, W.; Schulze, H.-J.; Rommel, M.; Frey, L.
Zeitschriftenaufsatz
Journal Article
2014 A DLTS study of hydrogen doped Czochralski-grown silicon
Jelinek, Moriz; Laven, Johannes G.; Kirnstoetter, S.; Schustereder, Werner; Schulze, Hans-Joachim; Rommel, Mathias; Frey, Lothar
Poster
2014 NanoSPV - SPM Technique for the Quantitative Measurement of Minority Charge Carrier Diffusion Lengths with High Spatial Resolution
Stumpf, Florian; Rommel, Mathias; Bauer, Anton; Frey, Lothar; Hitzel, Frank; Stadelmann, Anja; Bartel, Til
Vortrag
Presentation
2014 Approaches to calculate the dielectric function of ZnO around the band gap
Agocs, E.; Fodor, B.; Pollakowski, B.; Beckhoff, B.; Nutsch, A.; Jank, M.; Petrik, P.
Zeitschriftenaufsatz
Journal Article
2014 Reliability of monolithic RC-snubbers in MOS-based power modules
Erlbacher, T.; Schwarzmann, H.; Krach, F.; Bauer, A.J.; Berberich, S.E.; Kasko, I.; Frey, L.
Konferenzbeitrag
Conference Paper
2014 Optical polymers with tunable refractive index for nanoimprint technologies
Fader, Robert; Landwehr, Johannes; Rumler, Maximilian; Förthner, Michael; Rommel, Mathias; Bauer, Anton J.; Frey, Lothar; Simon, B.; Fodor, B.; Petrik, Peter; Winter, Benjamin; Spiecker, Erdmann
Poster
2014 Systematic analysis of the high- and low-field channel mobility in lateral 4H-SiC MOSFETs
Strenger, C.; Uhnevionak, V.; Mortet, V.; Ortiz, G.; Erlbacher, T.; Burenkov, A.; Bauer, A.J.; Cristiano, F.; Bedel-Pereira, E.; Pichler, P.; Ryssel, H.; Frey, L.
Konferenzbeitrag
Conference Paper
2014 Comparison of patterning silicon and silicon carbide using focused ion beam
Veerapandian, S.K.P.; Beuer, Susanne; Rumler, Maximilian; Stumpf, Florian; Thomas, Keith; Pillatsch, L.; Michler, Johannes; Frey, Lothar; Rommel, Mathias
Poster
2014 Experimental analysis of bipolar SiC-devices for future energy distribution systems
Huerner, A.; Mitlehner, H.; Erlbacher, T.; Bauer, A.J.; Frey, L.
Konferenzbeitrag
Conference Paper
2014 Hall factor calculation for the characterization of transport properties in n-channel 4H-SiC MOSFETs
Uhnevionak, U.; Burenkov, A.; Strenger, C.; Mortet, V.; Bedel-Peireira, E.; Cristiano, F.; Bauer, A.J.; Pichler, Peter
Konferenzbeitrag
Conference Paper
2014 Large area fabrication of plasmonic color filters using UV-SCIL
Rumler, Maximilian; Fader, Robert; Förthner, Michael; Haas, Anke; Rommel, Mathias; Bauer, Anton; Frey, Lothar
Vortrag
Presentation
2014 Investigation of trenched and high temperature annealed 4H-SiC
Banzhaf, C.T.; Grieb, M.; Trautmann, A.; Bauer, A.J.; Frey, L.
Konferenzbeitrag
Conference Paper
2014 A new method to increase the doping efficiency of proton implantation in a high-dose regime
Jelinek, Moriz; Laven, Johannes G.; Job, R.; Schustereder, Werner; Schulze, Hans-Joachim; Rommel, Mathias; Frey, Lothar
Konferenzbeitrag
Conference Paper
2014 NanoSPV - SPM Technique for Measuring Minority Charge Carrier Diffusion Lengths with High Spatial Resolution
Stumpf, Florian; Rommel, M.; Bauer, A.J.; Frey, L.; Hitzel, F.; Stadelmann, A.
Vortrag
Presentation
2014 Optical polymers with tunable refractive index for nanoimprint technologies
Fader, Robert; Landwehr, Johannes; Rumler, Maximilian; Rommel, Mathias; Bauer, Anton J.; Frey, Lothar; Simon, B.; Fodor, B.; Petrik, Peter; Schiener, A.; Winter, Benjamin; Spiecker, Erdmann
Poster
2014 Nanoscale characterization of TiO2 films grown by atomic layer deposition on RuO2 electrodes
Murakami, Katsuhisa; Rommel, Mathias; Hudec, Boris; Rosová, Alica; Hus&ekova&, Krístina; Dobroc&ka, Edmund; Rammula, Raul; Kasikov, Arne; Han, Jeong Hwan; Lee, Woongkyu; Song, Seul Ji; Paskaleva, Albena; Bauer, Anton J.; Frey, Lothar; Fröhlich, Karol; Aarik, Jaan; Hwang, Cheol Seong
Zeitschriftenaufsatz
Journal Article
2014 Influence of diverse post-trench processes on the electrical performance of 4H-SiC MOS structures
Banzhaf, C.T.; Grieb, M.; Trautmann, A.; Bauer, A.J.; Frey, L.
Konferenzbeitrag
Conference Paper
2014 Process development for nanoimprint at Fraunhofer IISB
Fader, Robert; Rumler, Maximilian; Scharin, Marina; Förthner, Michael; Rommel, Mathias
Vortrag
Presentation
Diese Liste ist ein Auszug aus der Publikationsplattform Fraunhofer-Publica

This list has been generated from the publication platform Fraunhofer-Publica

Jahr
Year
Titel/Autor:in
Title/Author
Publikationstyp
Publication Type
2013 Accuracy of wafer level alignment with substrate conformal imprint lithography
Fader, Robert; Rommel, Mathias; Bauer, Anton J.; Rumler, Maximilian; Frey, Lothar; Verschuuren, Marcus Antonius; Laar, Robert van de; Ji, Ran; Schömbs, Ulrike
Zeitschriftenaufsatz
Journal Article
2013 Melt depth and time variations during pulsed laser thermal annealing with one and more pulses
Hackenberg, Moritz; Rommel, Mathias; Rumler, M; Lorenz, Jürgen; Pichler, Peter; Huet, Karim; Negru, Razvan; Fisicaro, Giuseppe; Magna, Antonino la; Taleb, Nadjib; Quillec, M.
Konferenzbeitrag
Conference Paper
2013 Correlation of interface characteristics to electron mobility in channel-implanted 4H-SiC MOSFETs
Strenger, C.; Uhnevionak, V.; Burenkov, A.; Bauer, A.J.; Mortet, V.; Bedel-Pereira, E.; Cristiano, F.; Krieger, M.; Ryssel, H.
Konferenzbeitrag
Conference Paper
2013 Improving electric behavior and simplifying production of Si-based diodes by using thermal laser separation
Koitzsch, M.; Lewke, D.; Schellenberger, M.; Pfitzner, L.; Ryssel, H.; Kolb, R.; Zühlke, H.-U.
Konferenzbeitrag
Conference Paper
2013 Bimodal CAFM TDDB distributions in polycrystalline HfO2 gate stacks: The role of the interfacial layer and grain boundaries
Iglesias, V.; Martin-Martinez, J.; Porti, M.; Rodriguez, R.; Nafria, M.; Aymerich, X.; Erlbacher, T.; Rommel, M.; Murakami, K.; Bauer, A.J.; Frey, L.; Bersuker, G.
Zeitschriftenaufsatz
Journal Article
2013 Comparison of carrier lifetime measurements and mapping using time resolved photoluminescence and µ-PCD
Kallinger, Birgit; Rommel, Mathias; Lilja, L.; Hassan, J.; Booker, Ian; Janzen, Erik; Bergman, J.P.
Poster
2013 Influence of epilayer thickness and structural defects on the minority carrier lifetime in 4H-SiC
Kallinger, Birgit; Berwian, Patrick; Friedrich, Jochen; Azizi, Maral; Rommel, Mathias; Hecht, Christian; Friedrichs, Peter
Konferenzbeitrag
Conference Paper
2013 Leistungselektronik und elektrische Antriebstechnik
März, Martin; Eilers, Dirk; Gillner, Arnold; Schliwinski, Hans-Jürgen; Schneider-Ramelow, Martin; Schubert, Thomas; Partsch, Uwe; Paschen, Uwe; Wilken, Ralph
Aufsatz in Buch
Book Article
2013 Micromolding of micropatterned PDMS surfaces to define the adhesive behavior of human cells in vitro
Scharin, Marina; Rommel, Mathias; Dirnecker, Tobias; Marhenke, J.; Rumler, Maximilian; Herrmann, Benjamin; Fader, Robert; Frey, Lothar; Herrmann, Martin
Poster
2013 Characterization of diverse gate oxides on 4H-SiC 3D trench-MOS structures
Banzhaf, C.T.; Grieb, M.; Trautmann, A.; Bauer, A.J.; Frey, L.
Konferenzbeitrag
Conference Paper
2013 Electrical impact of the aluminum p-implant annealing on lateral MOSFET transistors on 4H-SiC n-epi
Noll, S.; Scholten, D.; Grieb, M.; Bauer, A.J.; Frey, L.
Konferenzbeitrag
Conference Paper
2013 On the temperature dependence of the hall factor in n-channel 4H-SiC MOSFETs
Uhnevionak, V.; Burenkov, A.; Strenger, C.; Bauer, A.J.; Pichler, P.
Konferenzbeitrag
Conference Paper
2013 Influence of parasitic capacitances on conductive AFM I-V measurements and approaches for its reduction
Rommel, Mathias; Jambreck, Joachim D.; Lemberger, Martin; Bauer, Anton J.; Frey, Lothar; Murakami, Katsuhisa; Richter, Christoph; Weinzierl, Philipp
Zeitschriftenaufsatz
Journal Article
2013 Verfahren und Vorrichtung zum parallelen Trennen eines Werkstücks in mehrere Teilstücke
Lorenz, Jürgen; Koitzsch, Matthias; Schellenberger, Martin; Lewke, Dirk; Gumprecht, Thomas
Patent
2013 Functional epoxy polymer for direct nano-imprinting of micro-optical elements
Fader, R.; Landwehr, J.; Rumler, M.; Rommel, M.; Bauer, A.J.; Frey, L.; Völkel, R.; Brehm, M.; Kraft, A.
Zeitschriftenaufsatz
Journal Article
2013 Influence of ion implantation in SiC on the channel mobility in lateral n-channel MOSFETs
Strenger, C.; Uhnevionak, V.; Burenkov, A.; Bauer, A.J.; Pichler, P.; Erlbacher, T.; Ryssel, H.; Frey, L.
Konferenzbeitrag
Conference Paper
2013 Practical aspects of virtual metrology and predictive maintenance model development and optimization
Schöpka, U.; Roeder, G.; Mattes, A.; Schellenberger, M.; Pfeffer, M.; Pfitzner, L.; Scheibelhofer, P.
Konferenzbeitrag
Conference Paper
2013 Detailed leakage current analysis of metal-insulator-metal capacitors with ZrO2, ZrO2/SiO2/ZrO2, and ZrO2/Al2O3/ZrO2 as dielectric and TiN electrodes
Weinreich, W.; Shariq, A.; Seidel, K.; Sundqvist, J.; Paskaleva, A.; Lemberger, M.; Bauer, A.J.
Zeitschriftenaufsatz
Journal Article
2013 Simulation and design optimization of transparent heaters for spectroscopic micro cells
Völlm, H.; Herrmann, J.; Maier, R.; Feili, D.; Häublein, V.; Ryssel, H.; Seidel, H.
Konferenzbeitrag
Conference Paper
2013 Virtual metrology for prediction of etch depth in a trench etch process
Roeder, G.; Schellenberger, M.; Pfitzner, L.; Winzer, S.; Jank, S.
Konferenzbeitrag
Conference Paper
2013 Advanced Vacuum Wafer Drying for Thermal Laser Separation Dicing Assessment. Results from European collaborative SEAL project
Le Barillec, Olivier; Davenet, Magali; Bellet, B.; Koitzsch, Matthias; Lewke, Dirk; Schellenberger, Martin; Zühlke, Hans-Ulrich
Konferenzbeitrag
Conference Paper
2013 Laser alloying nickel on 4H-silicon carbide substrate to generate ohmic contacts
Adelmann, B.; Hürner, A.; Schlegel, T.; Bauer, A.J.; Frey, L.; Hellmann, R.
Zeitschriftenaufsatz
Journal Article
2013 Patterning flat and tilted 4H-SiC by Ga+ resistless lithography and subsequent reactive ion etching
Beuer, Susanne; Rommel, Mathias; Rumler, Maximilian; Haas, Anke; Bauer, Anton J.; Frey, Lothar
Poster
2013 Comparative study of n-LIGBT and n-LDMOS structures on 4H-SiC
Häublein, V.; Temmel, G.; Mitlehner, H.; Rattmann, G.; Strenger, C.; Hürner, A.; Bauer, A.J.; Ryssel, H.; Frey, L.
Konferenzbeitrag
Conference Paper
2013 HCl assisted growth of thick 4H-SiC epilayers for bipolar devices
Kallinger, Birgit; Ehlers, Christian; Berwian, Patrick; Rommel, Mathias; Friedrich, Jochen
Poster
2013 Surface modification of flexible plain and microstructured hard and soft PDMS-thin films by plasma treatment and layer deposition for improved usability for biomedical applications
Scharin, Marina; Rommel, Mathias; Dirnecker, Tobias; Rumler, Maximilian; Fader, Robert; Bauer, Anton J.; Frey, Lothar; Hermman, Martin
Poster
2013 Life time of flexible PDMS stamps for UV-enhanced substrate conformal imprint lithography (SCIL)
Fader, Robert; Rumler, M.; Rommel, M.; Bauer, A.J.; Frey, L.; Brehm, M.; Kraft, A.; Reboud, V.; Landis, S.
Vortrag
Presentation
2013 Evaluation of resistless Ga+ beam lithography for UV NIL stamp fabrication
Rumler, Maximilian; Fader, Robert; Haas, Anke; Rommel, Mathias; Bauer, Anton; Frey, Lothar
Zeitschriftenaufsatz
Journal Article
2013 Characterization of thin ZnO films by vacuum ultra-violet reflectometry
Gumprecht, T.; Petrik, P.; Roeder, G.; Schellenberger, M.; Pfitzner, L.; Pollakowski, B.; Beckhoff, B.
Konferenzbeitrag
Conference Paper
2013 Characterization of ZnO structures by optical and X-ray methods
Petrik, P.; Pollakowski, B.; Zakel, S.; Gumprecht, T.; Beckhoff, B.; Lemberger, M.; Labadi, Z.; Baji, Z.; Jank, M.; Nutsch, A.
Zeitschriftenaufsatz
Journal Article
2013 Accuracy of wafer level alignment with substrate conformal imprint lithography
Fader, Robert; Rumler, M.; Rommel, M.; Bauer, A.J.; Frey, L.; Verschuuren, M.A.; Laar, R. van de; Ji, R.; Schömbs, U.
Vortrag
Presentation
2013 Alloying of ohmic contacts to n-type 4H-SiC via laser irradiation
Hürner, A.; Schlegl, T.; Adelmann, B.; Mitlehner, H.; Hellmann, R.; Bauer, A.J.; Frey, L.
Konferenzbeitrag
Conference Paper
2013 Structural properties of as deposited and annealed ZrO2 influenced by atomic layer deposition, substrate, and doping
Weinreich, W.; Wilde, L.; Müller, J.; Sundqvist, J.; Erben, E.; Heitmann, J.; Lemberger, M.; Bauer, A.J.
Zeitschriftenaufsatz
Journal Article
2013 Laser melting of nanoparticulate transparent conductive oxide thin films
Baum, M.; Polster, S.; Jank, M.P.M.; Alexeev, I.; Frey, L.; Schmidt, M.
Zeitschriftenaufsatz
Journal Article
2013 Verification of near-interface traps models by electrical measurements on 4H-SiC n-channel MOSFETs
Uhnevionak, V.; Strenger, C.; Burenkov, A.; Mortet, V.; Bedel-Pereira, E.; Cristiano, F.; Bauer, A.; Pichler, P.
Konferenzbeitrag
Conference Paper
2013 Hall effect characterization of 4H-SiC MOSFETs: Influence of nitrogen channel implantation
Mortet, V.; Bedel-Pereira, E.; Bobo, J.F.; Cristiano, F.; Strenger, C.; Uhnevionak, V.; Burenkov, A.; Bauer, A.J.
Konferenzbeitrag
Conference Paper
2013 Processing of silicon nanostructures by Ga+ resistless lithography and reactive ion etching
Rommel, M.; Rumler, M.; Haas, A.; Bauer, A.J.; Frey, L.
Zeitschriftenaufsatz
Journal Article
2013 Full wafer nanotopography analysis on rough surfaces using stitched white light interferometry images
Lewke, D.; Schellenberger, M.; Pfitzner, L.; Fries, T.; Tröger, B.; Muehlig, A.; Riedel, F.; Bauer, S.; Wihr, H.
Konferenzbeitrag
Conference Paper
2013 Evaluation of UV-SCIL resists for structure transfer using plasma etching
Rumler, Maximilian; Rusch, O.; Fader, Robert; Haas, Anke; Rommel, Mathias; Bauer, Anton J.; Frey, Lothar; Brehm, Markus; Kraft, Andreas
Poster
2013 Innovative balancing, heating and temperature sensing element for automotive batteries
Filimon, R.; Grosch, J.; Teuber, E.; Jank, M.; Lorentz, V.; Wenger, M.; Giegerich, M.; März, M.; Frey, L.
Konferenzbeitrag
Conference Paper
Diese Liste ist ein Auszug aus der Publikationsplattform Fraunhofer-Publica

This list has been generated from the publication platform Fraunhofer-Publica

Jahr
Year
Titel/Autor:in
Title/Author
Publikationstyp
Publication Type
2012 Assessment of a FOUP conditioning equipment for advanced semiconductor application
Otto, M.; Rioufrays, S.; Favre, A.; Leibold, A.; Altmann, R.; Gennaro, S.; Dell'Anna, R.; Canteri, R.; Pfitzner, L.
Konferenzbeitrag
Conference Paper
2012 Comparative investigation on installation space requirements for input filters of DC-link- and matrix converters based on amplitude pseudo-spectra
Schramm, A.; Lanfer, H.; Petzoldt, J.; Rädel, U.; Schwarzmann, H.; Erlbacher, T.
Konferenzbeitrag
Conference Paper
2012 Eletrisches Überbrückungselement, insbesondere für Speicherzellen eines Energiespeichers
Dorp, Joachim vom; Erlbacher, Tobias; Frey, L.
Patent
2012 Nanoscale characterization of TiO2 films grown by atomic layer deposition
Murakami, Katsuhisa; Rommel, Mathias; Bauer, Anton J.; Frey, Lothar; Hudec, Boris; Rosova, A.; Hueková, K.; Fröhlich, Karol; Kasikov, A.; Ramula, R.; Aarik, J.; Han, J.H.; Han, S.; Lee, W.; Song, S.J.; Hwang, C.S.
Poster
2012 Hall effect characterizations of 4H-SiC MOSFETs: Influence of nitrogen channel implantation
Mortet, V.; Bedel-Pereira, E.; Bobo, J.; Strenger, C.; Uhnevionak, V.; Burenkov, A.; Cristiano, F.; Bauer, A.
Poster
2012 Life time evaluation of PDMS stamps for UV-enhanced substrate conformal imprint lithography
Schmitt, H.; Duempelmann, P.; Fader, R.; Rommel, M.; Bauer, A.J.; Frey, L.; Brehm, M.; Kraft, A.
Zeitschriftenaufsatz
Journal Article
2012 Reference samples for ultra trace analysis of organic compounds on substrate surfaces
Nutsch, A.; Beckhoff, B.; Borionetti, G.; Codegoni, D.; Grasso, S.; Hoenicke, P.; Leibold, A.; Müller, M.; Otto, M.; Pfitzner, L.; Polignano, M.-L.
Konferenzbeitrag
Conference Paper
2012 Virtual Equipment for benchmarking Predictive Maintenance algorithms
Mattes, A.; Schöpka, U.; Schellenberger, M.; Scheibelhofer, P.; Leditzky, G.
Konferenzbeitrag
Conference Paper
2012 Significant on-resistance reduction of LDMOS devices by intermitted trench gates integration
Erlbacher, Tobias; Bauer, Anton J.; Frey, Lothar
Zeitschriftenaufsatz
Journal Article
2012 Efficient laser induced consolidation of nanoparticulate ZnO thin films with reduced thermal budget
Baum, M.; Polster, S.; Jank, M.P.M.; Alexeev, I.; Frey, L.; Schmidt, M.
Zeitschriftenaufsatz
Journal Article
2012 Comparative study of electrical and microstructural properties of 4H-SiC MOSFETs
Strenger, C.; Häublein, V.; Erlbacher, T.; Bauer, A.J.; Ryssel, H.; Beltran, A.M.; Schamm-Chardon, S.; Mortet, V.; Bedel-Pereira, E.; Lefebvre, M.; Cristiano, F.
Konferenzbeitrag
Conference Paper
2012 Predictive sampling approach to dynamically optimize defect density control operations
Pfeffer, M.; Oechsner, R.; Pfitzner, L.; Eckert, S.; Hartmann, A.; Gold, H.; Biebl, G.; Kaspar, J.
Konferenzbeitrag
Conference Paper
2012 Framework for integration of virtual metrology and predictive maintenance
Roeder, G.; Mattes, A.; Pfeffer, M.; Schellenberger, M.; Pfitzner, L.; Knapp, A.; Mühlberger, H.; Kyek, A.; Lenz, B.; Frisch, M.; Bichlmeier, J.; Leditzky, G.; Lind, E.; Zoia, S.; Fazio, G.
Konferenzbeitrag
Conference Paper
2012 4H-SiC MOSFETs with a stable protective coating for harsh environment applications
Daves, W.; Krauss, A.; Häublein, V.; Bauer, A.J.; Frey, L.
Konferenzbeitrag
Conference Paper
2012 Resistive circuit, circuit layout and driver
Berberich, Sven E.; Wintrich, Arendt; Erlbacher, Tobias
Patent
2012 Plasma-assisted atomic layer deposition of alumina at room temperature
Lemberger, Martin; Fromm, Timo; Rommel, Mathias; Bauer, Anton J.; Frey, Lothar
Poster
2012 Approaches for the reduction of the influence of parasitic capacitances on local IV characteristics for conductive AFM
Rommel, Mathias; Jambreck, Joachim D.; Murakami, Katsuhisa; Lemberger, Martin; Richter, Christoph; Weinzierl, Philip; Bauer, Anton J.; Frey, Lothar
Vortrag
Presentation
2012 Improving module performance and reliability in power electronic applications by monolithic integration of RC-snubbers
Erlbacher, Tobias; Schwarzmann, Holger; Bauer, Anton J.; Berberich, Sven E.; Dorp, Joachim vom; Frey, Lothar
Konferenzbeitrag
Conference Paper
2012 Feasiblity and limitations of anti-fuses based on bistable non-volatile switches for power electronic applications
Erlbacher, Tobias; Hürner A.; Bauer, Anton J.; Frey, Lothar
Zeitschriftenaufsatz
Journal Article
2012 A generic approach for comparing input filter efforts of voltage- and current source converters
Schramm, A.; Lanfer, H.; Petzoldt, J.; Rädel, U.; Schwarzmann, H.; Erlbacher, T.
Konferenzbeitrag
Conference Paper
2012 IMPROVE - a joint European effort to boost efficiency in semiconductor manufacturing
Schellenberger, Martin; Koitzsch, Matthias; Roeder, Georg; Pfeffer, Markus; Schöpka, Ulrich; Mattes, Andreas; Pfitzner, Lothar
Vortrag
Presentation
2012 Electrical characterization of nanostructured p-silicon electrodes for bioimpedance measurements on single cell level
Pliquett, Uwe; Westenthanner, Maximilian; Rommel, Mathias; Bauer, Anton J.; Beckmann, Dieter
Konferenzbeitrag
Conference Paper
2012 Feasibility and limitations of anti-fuses based on bistable non-volatile switches for power electronic applications
Erlbacher, T.; Huerner, A.; Bauer, A.J.; Frey, L.
Zeitschriftenaufsatz
Journal Article
2012 TiO2-based metal-insulator-metal structures for future DRAM storage capacitors
Fröhlich, K.; Hudec, B.; Tapajna, M.; Hueková, K.; Rosova, A.; Eliá, P.; Aarik, J.; Rammula, R.; Kasikov, A.; Arroval, T.; Aarik, L.; Murakami, Katsuhisa; Rommel, Mathias; Bauer, Anton J.
Konferenzbeitrag
Conference Paper
2012 Enhancements in resizing single crystalline silicon wafers up to 450 mm by using thermal laser separation
Koitzsch, M.; Lewke, D.; Schellenberger, M.; Pfitzner, L.; Ryssel, H.; Zühlke, H.U.
Konferenzbeitrag
Conference Paper
2012 Simulationsgestützte Untersuchung von logistischen Optimierungsstrategien bei Halbleiterfertigungsprozessen
Pfeffer, M.
Dissertation
Doctoral Thesis
2012 Structural and reliability analysis of ohmic contacts to SiC with a stable protective coating for harsh environment applications
Daves, W.; Kraus, A.; Häublein, V.; Bauer, A.J.; Frey, L.
Zeitschriftenaufsatz
Journal Article
2012 Aufreinigung eines Tiegels für eine Halbleiterverarbeitung
Schneider, Veronika; Reimann, Christian; Friedrich, J.
Patent
2012 Nano-analytical and electrical characterization of 4H-SiC MOSFETs
Beltran, A.M.; Schamm-Chardon, S.; Mortet, V.; Lefebvre, M.; Bedel-Pereira, E.; Cristiano, F.; Strenger, C.; Häublein, V.; Bauer, A.J.
Konferenzbeitrag
Conference Paper
2012 Amplitude modulated resonant push-pull driver for piezoelectric transformers in switching power applications
Schwarzmann, Holger; Erlbacher, Tobias; Bauer, Anton J.; Ryssel, Heiner; Frey, Lothar
Konferenzbeitrag
Conference Paper
2012 Thermal laser separation and its applications
Lewke, Dirk; Koitzsch, Matthias; Schellenberger, Martin; Pfitzner, Lothar; Ryssel, Heiner; Zühlke, Hans-Ulrich
Zeitschriftenaufsatz
Journal Article
2012 Ablation Free Dicing of 4H-SiC Wafers with Feed Rates up to 200 mm/s by Using Thermal Laser Separation
Lewke, Dirk; Koitzsch, Matthias; Schellenberger, Martin; Pfitzner, Lothar; Ryssel, Heiner; Zühlke, Hans-Ulrich
Konferenzbeitrag
Conference Paper
2012 Der "Zauberspiegel" als Messprinzip
Tobisch, Alexander; Schellenberger, Martin; Pfitzner, Lothar
Zeitschriftenaufsatz
Journal Article
2012 Influence of epilayer thickness and structural defects on the minority carrier lifetime in 4H-SiC
Kallinger, Birgit; Berwian, Patrick; Friedrich, Jochen; Azizi, Maral; Rommel, Mathias; Hecht, Christian; Friedrichs, Peter
Poster
2012 Reliability characterization of dielectrics in 200V trench capacitors
Erlbacher, Tobias; Schwarzmann, Holger; Bauer, Anton J.; Dorp, Joachim vom; Frey, Lothar
Poster
2012 All electrochemical layer deposition for crystalline silicon solar cell manufacturing: Experiments and interpretation
Kröner, Friedrich; Kröner, Z.; Reichmann, Klaus; Rommel, Mathias
Zeitschriftenaufsatz
Journal Article
2012 Fabrication and application of shielded probes for conductive AFM measurements
Jambreck, Joachim D.; Rommel, Mathias; Richter, Christoph; Weinzierl, Philip; Bauer, Anton J.; Frey, Lothar
Poster
2012 Simple and efficient method to fabricate nano cone arrays by FIB milling demonstrated on planar substrates and on protruded structures
Rommel, M.; Bauer, A.J.; Frey, L.
Zeitschriftenaufsatz
Journal Article
2012 Purity of ion beams: Analysis and simulation of mass spectra and mass interferences in ion implantation
Häublein, V.; Ryssel, H.; Frey, L.
Zeitschriftenaufsatz
Journal Article
2012 Measurement strategy for dielectric ultra-thin film characterization by vacuum ultra-violet reflectometry
Gumprecht, T.; Roeder, G.; Schellenberger, M.; Pfitzner, L.
Konferenzbeitrag
Conference Paper
2012 Solid-phase epitaxy of silicon amorphized by implantation of the alkali elements rubidium and cesium
Maier, R.; Häublein, V.; Ryssel, H.; Völlm, H.; Feili, D.; Seidel, H.; Frey, L.
Konferenzbeitrag
Conference Paper
2012 Novel cost-efficient contactless distributed monitoring concept for smart battery cells
Lorentz, V.R.H.; Wenger, M.M.; Grosch, J.L.; Giegerich, M.; Jank, M.P.M.; März, M.; Frey, L.
Konferenzbeitrag
Conference Paper
2012 Ohmic and rectifying contacts on bulk AlN for radiation detector applications
Erlbacher, Tobias; Bickermann, Matthias; Kallinger, Birgit; Meissner, Elke; Bauer, Anton J.; Frey, Lothar
Zeitschriftenaufsatz
Journal Article
2012 Effect of HfO2 polycrystallinity on distribution of the CAFM-induced TDDB in high-k gate stacks
Iglesias, V.; Erlbacher, T.; Rommel, M.; Murakami, K.; Bauer, A.J.; Frey, L.; Porti, M.; Martin-Martinez, J.; Rodriguez, R.; Nafria, M.; Aymerich, X.; Bersuker, G.
Poster
2012 Functional epoxy polymer for direct nano-imprinting of micro optical elements
Fader, Robert; Landwehr Johannes; Rumler, Maximilian; Rommel, Mathias; Bauer, Anton J.; Frey, Lothar; Völkel, Reinhard; Brehm, Markus; Kraft, Andreas
Poster
2012 Wiederverwendbarer Tiegel aus einer Siliziumnitrid-Keramik sowie dessen Verwendung bei der Herstellung eines mono- oder multikristallinen Halbmetallkörpers aus einer Schmelze
Mono, T.; Schneider, Veronika; Martin, R.; Reimann, Christian; Friedrich, J.
Patent
2012 Evaluation of resistless Ga+ beam lithography for UV-NIL stamp fabrication
Rumler, Maximilian; Fader, Robert; Haas, Anke; Rommel, Matthias; Bauer, Anton J.; Frey, Lothar
Poster
2012 Characterization of grain boundaries in multicrystalline silicon with high lateral resolution using conductive atomic force microscopy
Rumler, Maximilian; Rommel, Mathias; Erlekampf, Jürgen; Azizi, Maral; Geiger, Tobias; Bauer, Anton J.; Meißner, Elke; Frey, Lothar
Zeitschriftenaufsatz
Journal Article
2012 Stationsanordnung zur Bearbeitung und/oder Vermessen von Halbleiterscheiben sowie Bearbeitungsverfahren
Schellenberger, Martin; Lewke, Dirk
Patent
2012 Verification of near-interface traps by electrical measurements on 4H-SiC n-channel MOSFETs
Uhnevionak, V.; Strenger, C.; Burenkov, A.; Mortet, V.; Bedel-Pereira, E.; Cristiano, F.; Bauer, A.; Pichler, P.
Vortrag
Presentation
2012 Novel organic polymer for UV-enhanced substrate conformal imprint lithography
Fader, R.; Schmitt, H.; Rommel, M.; Bauer, A.J.; Frey, L.; Ji, R.; Hornung, M.; Brehm, M.; Vogler, M.
Zeitschriftenaufsatz
Journal Article
Diese Liste ist ein Auszug aus der Publikationsplattform Fraunhofer-Publica

This list has been generated from the publication platform Fraunhofer-Publica

Jahr
Year
Titel/Autor:in
Title/Author
Publikationstyp
Publication Type
2011 Dielectric layers suitable for high voltage integrated trench capacitors
Dorp, J. vom; Erlbacher, T.; Bauer, A.J.; Ryssel, H.; Frey, L.
Zeitschriftenaufsatz
Journal Article
2011 Current voltage characteristics through grains and grain boundaries of high-k dielectric thin films measured by tunneling atomic force microscopy
Murakami, Katsuhisa; Rommel, Mathias; Yanev, Vasil; Bauer, Anton J.; Frey, Lothar
Konferenzbeitrag
Conference Paper
2011 Verfahren zur Herstellung eines Siliziumschicht
Jank, M.; Lukas, S.
Patent
2011 Novel polymers for UV-enhanced substrate conformal imprint lithography
Fader, R.; Schmitt, H.; Rommel, M.; Bauer, A.J.; Frey, L.; Ji, R.; Hornung, M.; Brehm, M.; Vogler, M.
Poster
2011 Traps and trapping phenomena and their implications on electrical behavior of high-k capacitor stacks
Paskaleva, A.; Lemberger, M.; Atanassova, E.; Bauer, A.J.
Zeitschriftenaufsatz
Journal Article
2011 Fluorine implantation for effective work function control in p-type metal-oxide-semiconductor high-k metal gate stacks
Fet, A.; Häublein, V.; Bauer, A.J.; Ryssel, H.; Frey, L.
Zeitschriftenaufsatz
Journal Article
2011 Effect of increased oxide hole trap density due to nitrogen incorporation at the SiO2/SiC interface on F-N current degradation
Strenger, C.; Bauer, A.J.; Ryssel, H.
Konferenzbeitrag
Conference Paper
2011 Manufacturing, characterization, and application of nanoimprinted metallic probe demonstrators for electrical scanning probe microscopy
Jambreck, J.D.; Yanev, V.; Schmitt, H.; Rommel, M.; Bauer, A.J.; Frey, L.
Zeitschriftenaufsatz
Journal Article
2011 Developing a framework for virtual metrology and predictive maintenance
Schellenberger, Martin; Roeder, Georg; Mattes, Andreas; Pfeffer, Markus; Pfitzner, Lothar; Knapp, Alexander; Mühlberger, Heribert; Bichlmeier, Josef; Valeanu, Christian; Kyek, Andreas; Lenz, Benjamin; Frisch, Markus; Leditzky, Günther
Zeitschriftenaufsatz
Journal Article
2011 4H-SiC n-MOSFET logic circuits for high temperature operation
Le-Huu, M.; Grieb, M.; Schrey, F.F.; Schmitt, H.; Häublein, V.; Bauer, A.J.; Ryssel, H.; Frey, L.
Konferenzbeitrag
Conference Paper
2011 Dopant profiles in silicon created by MeV hydrogen implantation: Influence of annealing parameters
Laven, J.G.; Schulze, H.-J.; Häublein, V.; Niedernostheide, F.-J.; Schulze, H.; Ryssel, H.; Frey, L.
Zeitschriftenaufsatz
Journal Article
2011 Virtual equipment. A test bench for virtual metrology algorithms
Mattes, Andreas; Lewke, Dirk; Schellenberger, Martin
Vortrag
Presentation
2011 Life time evaluation of PDMS stamps for UV-enhanced substrate conformal imprint lithography
Schmitt, H.; Duempelmann, P.; Fader, R.; Rommel, M.; Bauer, A.J.; Frey, L.; Brehm, M.; Kraft, A.
Poster
2011 Current voltage characteristics through grains and grain boundaries of high-k dielectric thin films measured by tunneling atomic force microscopy
Murakami, K.; Rommel, M.; Yanev, V.; Bauer, A.J.; Frey, L.
Poster
2011 Influence of annealing parameters on surface roughness, mobility, and contact resistance of aluminium implanted 4H SiC
Schmitt, H.; Häublein, V.; Bauer, A.J.; Frey, L.
Konferenzbeitrag
Conference Paper
2011 Modulares Steuerungskonzept für integrierte Messtechnik in der Halbleiterfertigung am Beispiel einer Mehrkammerprozessanlage
Schellenberger, Martin
Dissertation
Doctoral Thesis
2011 Implication of oxygen vacancies on current conduction mechanisms in TiN/Zr1-xAlxO2/TiN metal-insulator-metal structures
Paskaleva, A.; Lemberger, M.; Bauer, A.J.; Frey, L.
Zeitschriftenaufsatz
Journal Article
2011 Effects of oxygen and forming gas annealing on ZnO TFTs
Huang, J.; Radhakrishna, U.; Lemberger, M.; Jank, M.P.M.; Polster, S.; Ryssel, H.; Frey, L.
Konferenzbeitrag
Conference Paper
2011 Determination of the dill parameters of thick positive resist for use in modeling applications
Roeder, G.; Liu, S.; Aygun, G.; Evanschitzky, P.; Erdmann, A.; Schellenberger, M.; Pfitzner, L.
Konferenzbeitrag
Conference Paper
2011 Electrical characterization of lateral 4H-SiC MOSFETs in the temperature range of 25 to 600 °C for harsh environment applications
Daves, W.; Krauss, A.; Häublein, V.; Bauer, A.J.; Frey, L.
Konferenzbeitrag
Conference Paper
2011 A highly sensitive evaluation method for the determination of different current conduction mechanisms through dielectric layers
Murakami, M.; Rommel, M.; Yanev, V.; Erlbacher, T.; Bauer, A.J.; Frey, L.
Zeitschriftenaufsatz
Journal Article
2011 Thermal Laser Separation (TLS) for separating multi-crystalline silicon wafers: A comparison with state-of-the-art methods
Koitzsch, Matthias; Schellenberger, Martin
Poster
2011 Dünnfilmtransistor
Jank, Michael; Teuber, Erik; Lemberger, M.; Huang, J.
Patent
2011 Properties of SiO2 and Si3N4 as gate dielectrics for printed ZnO transistors
Walther, S.; Polster, S.; Meyer, B.; Jank, M.; Ryssel, H.; Frey, L.
Zeitschriftenaufsatz
Journal Article
2011 Enhancement of the stability of Ti and Ni ohmic contacts to 4H-SiC with a stable protective coating for harsh environment applications
Daves, W.; Krauss, A.; Häublein, V.; Bauer, A.J.; Frey, L.
Zeitschriftenaufsatz
Journal Article
2011 Germanium substrate loss during thermal processing
Kaiser, R.J.; Koffel, S.; Pichler, P.; Bauer, A.J.; Amon, B.; Frey, L.; Ryssel, H.
Zeitschriftenaufsatz
Journal Article
2011 Jet printing of colloidal solutions - numerical modeling and experimental verification of the influence of ink and surface parameters on droplet spreading
Schneider, O.; Epple, P.; Teuber, E.; Meyer, B.; Jank, M.P.M.; Rauh, C.; Delgado, A.
Zeitschriftenaufsatz
Journal Article
2011 EPR investigations of non-oxidized silicon nanoparticles from thermal pyrolysis of silane
Körmer, R.; Otto, M.; Wu, J.; Jank, M.P.M.; Frey, L.; Peukert, W.
Zeitschriftenaufsatz
Journal Article
2011 Amorphous silicon carbide thin films (a-SiC:H) deposited by plasma-enhanced chemical vapor deposition as protective coatings for harsh environment applications
Daves, W.; Krauss, A.; Behnel, N.; Häublein, V.; Bauer, A.; Frey, L.
Zeitschriftenaufsatz
Journal Article
2011 Comparative study on metallization and passivation materials for high temperature sensor applications
Daves, W.; Krauss, A.; Le-Huu, M.; Kronmüller, S.; Häublein, V.; Bauer, A.J.; Frey, L.
Konferenzbeitrag
Conference Paper
2011 Investigation of the reliability of 4H-SiC MOS devices for high temperature applications
Le-Huu, M.; Schmitt, H.; Noll, S.; Grieb, M.; Schrey, F.F.; Bauer, A.J.; Frey, L.; Ryssel, H.
Zeitschriftenaufsatz
Journal Article
2011 Tuning of charge carrier density of ZnO nanoparticle films by oxygen plasma treatment
Walther, S.; Polster, S.; Jank, M.P.M.; Thiem, H.; Ryssel, H.; Frey, L.
Zeitschriftenaufsatz
Journal Article
2011 Light confinement by structured metal tips for antenna-based scanning near-field optical microscopy
Jambreck, J.D.; Böhmler, M.; Rommel, M.; Hartschuh, A.; Bauer, A.J.; Frey, L.
Konferenzbeitrag
Conference Paper
2011 Gate oxide reliability at the nano-scale evaluated by combining cAFM and CVS
Erlbacher, T.; Yanev, V.; Rommel, M.; Bauer, A.J.; Frey, L.
Zeitschriftenaufsatz
Journal Article
2011 High pressure oxidation of 4H-SiC in nitric acid vapor
Kalai Selvi, K.; Sreenidhi, T.; Dasgupta, N.; Ryssel, H.; Bauer, A.
Zeitschriftenaufsatz
Journal Article
2011 Characterization of thickness variations of thin dielectric layers at the nanoscale using scanning capacitance microscopy
Yanev, V.; Rommel, M.; Bauer, A.J.; Frey, L.
Zeitschriftenaufsatz
Journal Article
2011 Reliability of nitrided gate oxides for N- and P-type 4H-SiC(0001) metal-oxide-semiconductor devices
Noborio, M.; Grieb, M.; Bauer, A.J.; Peters, D.; Friedrichs, P.; Suda, J.; Kimoto, T.
Zeitschriftenaufsatz
Journal Article
2011 A virtual equipment as a test bench for evaluating virtual metrology algorithms
Mattes, Andreas; Koitzsch, Matthias; Lewke, Dirk; Müller-Zell, Michael; Schellenberger, Martin
Konferenzbeitrag
Conference Paper
2011 Experiments and simulation of the diffusion and activation of the n-Type dopants P, As, and Sb implanted into germanium
Koffel, S.; Kaiser, R.J.; Bauer, A.J.; Amon, B.; Pichler, P.; Lorenz, J.; Frey, L.; Scheiblin, P.; Mazzocchi, V.; Barnes, J.-P.; Claverie, A.
Zeitschriftenaufsatz
Journal Article
2011 A novel PWM control for a bi-directional full-bridge DC-DC converter with smooth conversion mode transitions
Lorentz, V.R.H.; Schwarzmann, H.; März, M.; Bauer, A.J.; Ryssel, H.; Frey, L.; Poure, P.; Braun, F.
Zeitschriftenaufsatz
Journal Article
2011 Conduction mechanisms and environmental sensitivity of solution-processed silicon nanoparticle layers for thin-film transistors
Weis, S.; Körmer, R.; Jank, M.P.M.; Lemberger, M.; Otto, M.; Ryssel, H.; Peukert, W.; Frey, L.
Zeitschriftenaufsatz
Journal Article
2011 Simple and efficient method to fabricate nano-cone arrays by FIB milling demonstrated on planar substrates and on protruded structures
Rommel, M.; Bauer, A.J.; Frey, L.
Poster
2011 Monolithic RC-snubber for power electronic applications
Dorp, Joachim vom; Berberich, Sven E.; Erlbacher, Tobias; Bauer, Anton J.; Ryssel, Heiner; Frey, Lothar
Konferenzbeitrag
Conference Paper
2011 UV-enhanced substrate conformal imprint lithography using an epoxy based polymer
Fader, R.; Schmitt, H.; Rommel, M.; Bauer, A.J.; Frey, L.; Ji, R.; Hornung, M.; Brehm, M.; Kraft, A.
Poster
Diese Liste ist ein Auszug aus der Publikationsplattform Fraunhofer-Publica

This list has been generated from the publication platform Fraunhofer-Publica