Modeling and Artificial Intelligence

Design and Optimization of Technology, Devices, and Systems

Our goal is to support the development and optimization of technology, devices, and systems. To this end we use and combine physical modeling and Artificial Intelligence approaches. Our activities cover a wide range of research fields and applications – from “More Moore” technologies, e.g. regarding EUV lithography, through “More than Moore” technologies, such as microsystems, to multiphysics simulations, for example of power electronic systems, batteries, and electricity networks.

We work on the development and application of physical models, algorithms, and simulation programs for semiconductor processing, semiconductor devices, as well as for integrated systems such as those used in the field of power electronics. The methods we employ range from calculations on atomic scale to simulations of complete systems, for instance using heuristic models. In particular, we select, adapt and apply Artificial Intelligence for the development and optimization of systems. This includes approaches like Genetic Optimization and Neural Networks, for which physical modeling is partly used to augment experimental training data. Our work is carried out in close cooperation with companies in the field of semiconductors and power electronics, material and equipment suppliers, software houses, and research institutions.

 

TCAD

We use technology computer-aided design (TCAD) to study the impact of fabrication processes on electrical device characteristics

 

Computational
Lithography and Optics

Development and application of physical/chemical models, numerical algorithms, and software for the simulation of lithographic processes

 

AI-augmented Simulation

Enhancement of simulation methods by artificial intelligence and machine learning

 

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