Characterization and Optimization of Technology, Devices, and Systems

We are developing and applying physical models, algorithms, and simulation programs for semiconductor process steps, manufacturing equipment, semiconductor devices, as well as for integrated systems such as those encountered in power electronics. The overall goal is to support characterization and optimization of technology, devices, and systems.

Our methods range from first-principle calculations on the atomic or molecular scale to simulations for complete systems, for instance using heuristic models. We closely cooperate with companies in the field of semiconductors and power electronics, material and equipment suppliers, software houses, and research institutions.

In recent years the activities of the department have been strongly expanding into the area of “More than Moore”, which consists of fields such as analog electronics, low-power electronics, power electronics, and microsystems technology.


Doping and Device Simulation

Theoretical and experimental investigation of diffusion processes as encountered in semiconductor technology. Our aim is to improve process characterization and optimization by simulation. Among others, we work on the the development and application of simulation programs that predict dopant concentrations and on the simulation of electrical properties of devices.


Lithography and Optics

Physical and chemical models, numerical algorithms and software for the simulation of lithographic processes – bundled together in IISB’s in-house software ‘Dr.LiTHO’. Next to model and software development, we offer support for industrial and governmental partners in process development and feasibility studies.


Structure Simulation

We work on the development and application of simulation programs on structures, such as microelectronic devices or interconnects, as well as macroscopic structure, as can be found in power electronic systems. Our simulations address the manufacturing processes as well as the operation of these structures with respect to electrical, thermal and mechanical behavior.



Equipment Simulation

Simulation of thermal and plasma processes for semiconductor technology and other fields of applications.


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