Fraunhofer Institute for Integrated Systems and Device Technology IISB| Year | Title/Author | Document Type |
|---|---|---|
| 2021 | Investigation of waveguide modes in EUV mask absorbers
Mesilhy, H.; Evanschitzky, P.; Bottiglieri, G.; Lare, C. Van; Setten, E. Van; Erdmann, A. | Journal Article |
| 2021 | Modeling the impact of shrinkage effects on photoresist development
D'Silva, S.; Mülders, T.; Stock, H.-J.; Erdmann, A. | Journal Article |
| 2021 | Stochastic simulation and calibration of organometallic photoresists for extreme ultraviolet lithography
Belete, Z.; Bisschop, P. de; Welling, U.; Erdmann, A. | Journal Article |
| 2021 | Study of novel EUVL mask absorber candidates
Wu, M.; Thakare, D.; Marneffe, J.-F. de; Jaenen, P.; Souriau, L.; Opsomer, K.; Soulié, J.-P.; Erdmann, A.; Mesilhy, H.; Naujok, P.; Foltin, M.; Soltwisch, V.; Saadeh, Q.; Philipsen, V. | Journal Article |
| 2020 | Mask absorber for next generation EUV lithography
Wu, M.; Thakare, D.; Marneffe, J.-F. de; Jaenen, P.; Souriau, L.; Opsomer, K.; Soulié, J.-P.; Erdmann, A.; Mesilhy, H.; Naujok, P.; Foltin, M.; Soltwisch, V.; Saadeh, Q.; Philipsen, V. | Conference Paper |
| 2020 | Pathfinding the perfect EUV mask: The role of the multilayer
Mesilhy, H.; Evanschitzky, P.; Bottiglieri, G.; Setten, E. van; Fliervoet, T.; Erdmann, A. | Conference Paper |
| 2020 | Perspectives and tradeoffs of absorber materials for high NA EUV lithography
Erdmann, A.; Mesilhy, H.; Evanschitzky, P.; Philipsen, V.; Timmermans, F.; Bauer, M. | Journal Article |
| 2019 | 3D mask effects in high NA EUV imaging
Erdmann, A.; Evanschitzky, P.; Bottiglieri, G.; Setten, E. van; Fliervoet, T. | Conference Paper |
| 2019 | Attenuated phase shift mask for extreme ultraviolet: Can they mitigate three-dimensional mask effects?
Erdmann, A.; Evanschitzky, P.; Mesilhy, H.; Philipsen, V.; Hendrickx, E.; Bauer, M. | Journal Article |
| 2019 | Learned sensing: Jointly optimized microscope hardware for accurate image classification
Muthumbi, A.; Chaware, A.; Kim, K.; Zhou, K.C.; Konda, P.C.; Chen, R.; Judkewitz, B.; Erdmann, A.; Kappes, B.; Horstmeyer, R. | Journal Article |
| 2019 | Lithographic effects due to particles on high-NA EUV mask pellicle
Devaraj, L.; Bottiglieri, G.; Erdmann, A.; Wählisch, F.; Kupers, M.; Setten, E. van; Fliervoet, T. | Conference Paper |
| 2019 | Mask absorber development to enable next-generation EUVL
Philipsen, V.; Luong, K.V.; Opsomer, K.; Souriau, L.; Rip, J.; Detavernier, C.; Erdmann, A.; Evanschitzky, P.; Laubis, C.; Honicke, P.; Soltwisch, V.; Hendrickx, E. | Conference Paper |
| 2018 | Accurate determination of 3D PSF and resist effects in grayscale laser lithography
Onanuga, T.; Kaspar, C.; Sailer, H.; Erdmann, A. | Conference Paper |
| 2018 | Application of deep learning algorithms for Lithographic mask characterization
Woldeamanual, D.S.; Erdmann, A.; Maier, A. | Conference Paper |
| 2018 | Attenuated PSM for EUV: Can they mitigate 3D mask effects?
Erdmann, A.; Evanschitzky, P.; Mesilhy, H.; Philipsen, V.; Hendrickx, E.; Bauer, M. | Conference Paper |
| 2018 | Fourier ptychography for lithography high NA systems
Dejkameh, A.; Erdmann, A.; Evanschitzky, P.; Ekinci, Y. | Conference Paper |
| 2018 | Modeling of block copolymer dry etching for directed self-assembly lithography
Belete, Zelalem; Bär, Eberhard; Erdmann, Andreas | Conference Paper |
| 2018 | Novel EUV mask absorber evaluation in support of next-generation EUV imaging
Philipsen, V.; Luong, K.V.; Opsomer, K.; Detavernier, C.; Hendrickx, E.; Erdmann, A.; Evanschitzky, P.; Kruijs, R.W.E. van de; Heidarnia-Fathabad, Z.; Scholze, F.; Laubis, C. | Conference Paper |
| 2018 | Simulation study of illumination effects in high-NA EUV lithography
Ismail, M.; Evanschitzky, P.; Erdmann, A.; Bottiglieri, G.; Setten, E. van; Fliervoet, T.F. | Conference Paper |
| 2017 | Characterization and mitigation of 3D mask effects in extreme ultraviolet lithography
Erdmann, A.; Xu, D.; Evanschitzky, P.; Philipsen, V.; Luong, V.; Hendrickx, E. | Journal Article |
| 2017 | Efficient simulation of EUV pellicles
Evanschitzky, P.; Erdmann, A. | Conference Paper |
| 2017 | Levet-set-based inverse lithography under random field shape uncertainty in a vector Hopkins imaging model
Wu, X.; Fühner, T.; Erdmann, A.; Lam, E.Y. | Conference Paper |
| 2017 | A physical model for innovative laser direct write lithography
Onanuga, T.; Rumler, M.; Erdmann, A. | Conference Paper |
| 2017 | Reducing EUV mask 3D effects by alternative metal absorbers
Philipsen, V.; Luong, K.V.; Souriau, L.; Hendrickx, E.; Erdmann, A.; Xu, D.; Evanschitzky, P.; Kruijs, R.W.E. van de; Edrisi, A.; Scholze, F.; Laubis, C.; Irmscher, M.; Naasz, S.; Reuter, C. | Conference Paper |
| 2017 | Reducing extreme ultraviolet mask three-dimensional effects by alternative metal absorbers
Philipsen, V.; Luong, K.V.; Souriau, L.; Erdmann, A.; Xu, D.; Evanschitzky, P.; Kruijs, R.W.E. van de; Edrisi, A.; Scholze, F.; Laubis, C.; Irmscher, M.; Naasz, S.; Reuter, C.; Hendrickx, E. | Journal Article |
| 2017 | Simulation flow and model verification for laser direct-write lithography
Onanuga, T.; Rumler, M.; Erdmann, A. | Journal Article |
| 2017 | Special issue on ptychography
Erdmann, A.; Situ, G. | Journal Article |
| 2016 | 3D simulation of light exposure and resist effects in laser direct write lithography
Onanuga, Temitope; Erdmann, Andreas | Conference Paper |
| 2016 | Automated source/mask/directed self-assembly optimization using a self-adaptive hierarchical modeling approach
Fühner, T.; Michalak, P.; Wu, X.; Erdmann, A. | Conference Paper |
| 2016 | Challenges for predictive EUV mask modeling: Presentation held at International Workshop on EUV Lithography 2016, June 13-16, 2016, Berkeley, CA
Evanschitzky, Peter; Erdmann, Andreas | Presentation |
| 2016 | Efficient simulation of EUV pellicles: Presentation held at 14th Fraunhofer IISB Lithography Simulation Workshop, September 22 - 24, 2016, Hersbruck, Germany
Evanschitzky, Peter; Erdmann, Andreas | Presentation |
| 2016 | Extending VLSI and alternative technology with optical and complementary lithography: Special Section Guest Editorial
Lai, K.; Erdmann, A. | Editorial |
| 2016 | Extreme ultraviolet multilayer defect analysis and geometry reconstruction
Xu, D.; Evanschitzky, P.; Erdmann, A. | Journal Article |
| 2016 | Incorporating photomask shape uncertainty in computational lithography
Wu, X.; Liu, S.; Erdmann, A.; Lam, E.Y. | Conference Paper |
| 2016 | Inverse image modeling for defect detection and optical system characterization
Xu, Dongbo; Erdmann, Andreas | Dissertation |
| 2016 | Mask-induced best-focus shifts in deep ultraviolet and extreme ultraviolet lithography
Erdmann, A.; Evanschitzky, P.; Neumann, J.T.; Gräupner, P. | Journal Article |
| 2016 | Resolution enhancements for semiconductor lithography: A computational perspective
Erdmann, A. | Conference Paper |
| 2015 | Application of principal component analysis to EUV multilayer defect printing
Xu, D.; Evanschitzky, P.; Erdmann, A. | Conference Paper |
| 2015 | Application of the transport of intensity equation to EUV multilayer defect analysis
Xu, D.; Evanschitzky, P.; Erdmann, A. | Conference Paper |
| 2015 | Continuation of scaling with optical and complementary lithography. Editorial
Lai, K.F.; Erdmann, A. | Editorial |
| 2015 | Introduction to the special issue on optical lithography
Erdmann, A.; Shibuya, M. | Journal Article |
| 2015 | Mask-induced best-focus-shifts in DUV and EUV lithography
Erdmann, A.; Evanschitzky, P.; Neumann, J.T.; Gräupner, P. | Conference Paper |
| 2015 | Optical and EUV projection lithography: A computational view
Erdmann, A.; Fühner, T.; Evanschitzky, P.; Agudelo, V.; Freund, C.; Michalak, P.; Xu, D.B. | Journal Article |
| 2014 | Aberration measurement technique based on an analytical linear model of a through-focus aerial image
Yan, G.; Wang, X.; Li, S.; Yang, J.; Xu, D.; Erdmann, A. | Journal Article |
| 2014 | Advances in lithography: Introduction to the feature. Editorial
Erdmann, A.; Liang, R.G.; Sezginer, A.; Smith, B. | Editorial |
| 2014 | Advances in lithography: Introduction to the feature. Editorial
Erdmann, A.; Liang, R.G.; Sezginer, A.; Smith, B. | Editorial |
| 2014 | Application of artificial neural networks to compact mask models in optical lithography simulation
Agudelo, V.; Fühner, T.; Erdmann, A.; Evanschitzky, P. | Journal Article |
| 2014 | Artificial evolution for the optimization of lithographic process conditions
Fühner, Tim; Erdmann, Andreas | Dissertation |
| 2014 | Challenges and opportunities for process modeling in the nanotechnology era
Lorenz, J.K.; Baer, E.; Burenkov, A.; Erdmann, A.; Evanschitzky, P.; Pichler, P. | Journal Article |
| 2014 | Compact mask models for optical projection lithography
Agudelo Moreno, Viviana; Erdmann, Andreas | Dissertation |
| 2014 | A defocus measurement method for an in situ aberration measurement method using a phase-shift ring mask
Li, S.; Wang, X.; Yang, J.; Tang, F.; Yan, G.; Erdmann, A. | Conference Paper |
| 2014 | Fast model for mask spectrum simulation and analysis of mask shadowing effects in extreme ultraviolet lithography
Liu, Xiaolei; Wang, Xiangzhao; Li, Sikun; Yan, Guanyong; Erdmann, A. | Journal Article |
| 2014 | Fast rigorous model for mask spectrum simulation and analysis of mask shadowing effects in EUV lithography
Liu, X.; Wang, X.; Li, S.; Yan, G.; Erdmann, A. | Conference Paper |
| 2014 | In situ aberration measurement method using a phase-shift ring mask
Wang, X.; Li, S.; Yang, J.; Tang, F.; Yan, G.; Erdmann, A. | Conference Paper |
| 2014 | Lithographic process window optimization for mask aligner proximity lithography
Voelkel, R.; Vogler, U.; Bramati, A.; Erdmann, A.; Ünal, N.; Hofmann, U.; Hennemeyer, M.; Zoberbier, R.; Nguyen, D.; Brugger, J. | Conference Paper |
| 2014 | Pixel-based defect detection from high-NA optical projection images
Xu, D.B.; Fühner, T.; Erdmann, A. | Journal Article |
| 2014 | Rigorous simulation and optimization of the lithography/directed self-assembly co-process
Fühner, T.; Welling, U.; Müller, M.; Erdmann, A. | Conference Paper |
| 2013 | Adaptive denoising method to improve aberration measurement performance
Yang, J.; Wang, X.; Li, S.; Duan, L.; Bourov, A.Y.; Erdmann, A. | Journal Article |
| 2013 | Application of artificial neural networks to compact mask models in optical lithography simulation
Agudelo, V.; Fühner, T.; Erdmann, A.; Evanschitzky, P. | Conference Paper |
| 2013 | Defect inspection and detection using optical image projection: Presentation held at China Semiconductor Technology International Conference (CSTIC), March 17-18, 2013, Shanghai, China
Xu, D.; Li, S.; Wang, X.; Erdmann, A. | Presentation |
| 2013 | Defect parameters retrieval based on optical projection images
Xu, D.; Li, S.; Wang, X.; Fühner, T.; Erdmann, A. | Conference Paper |
| 2013 | Efficient simulation of extreme ultraviolet multilayer defects with rigorous data base approach
Evanschitzky, Peter; Shao, Feng; Erdmann, Andreas | Journal Article |
| 2013 | High-order aberration measurement technique based on quadratic Zernike model with optimized source
Yang, J.; Wang, X.; Li, S.; Duan, L.; Yan, G.; Xu, D.; Bourov, A.Y.; Erdmann, A. | Journal Article |
| 2013 | In situ aberration measurement technique based on an aerial image with an optimized source
Yan, G.; Wang, X.; Li, S.; Yang, J.; Xu, D.; Duan, L.; Bourov, A.Y.; Erdmann, A. | Journal Article |
| 2013 | Modeling strategies for EUV mask multilayer defect dispositioning and repair
Erdmann, A.; Evanschitzky, P.; Bret, T.; Jonckheere, R. | Conference Paper |
| 2013 | Modeling studies on alternative EUV mask concepts for higher NA
Erdmann, A.; Fühner, T.; Evanschitzky, P.; Neumann, J.T.; Ruoff, J.; Gräupner, P. | Conference Paper |
| 2013 | Source mask optimization using real-coded genetic algorithms
Yang, C.; Wang, X.; Li, S.; Erdmann, A. | Conference Paper |
| 2012 | Advanced mask aligner lithography (AMALITH)
Völkel, R.; Vogler, U.; Bramati, A.; Weichelt, T.; Stürzebecher, L.; Zeitner, U.D.; Motzek, K.; Erdmann, A.; Hornung, M.; Zoberbier, R. | Conference Paper |
| 2012 | Analysis of EUV mask multilayer defect printing characteristics
Erdmann, A.; Evanschitzky, P.; Bret, T.; Jonckheerec, R. | Conference Paper |
| 2012 | Efficient simulation of EUV multilayer defects with rigorous data base approach
Evanschitzky, Peter; Shao, Feng; Erdmann, Andreas | Conference Paper |
| 2012 | Evaluation of various compact mask and imaging models for the efficient simulation of mask topography effects in immersion lithography
Agudelo, V.; Evanschitzky, P.; Erdmann, A.; Fühner, T. | Conference Paper |
| 2012 | Imaging characteristics of binary and phase shift masks for EUV projection lithography
Erdmann, A.; Evanschitzky, P. | Conference Paper |
| 2012 | In situ aberration measurement technique based on quadratic Zernike model
Yang, J.; Wang, X.; Li, S.; Duan, L.; Yan, G.; Xu, D.; Bourov, A.Y.; Erdmann, A. | Conference Paper |
| 2012 | In-situ aberration measurement technique based on aerial image with optimized source
Yan, G.; Wang, X.; Li, S.; Yang, J.; Xu, D.; Duan, L.; Bourov, A.Y.; Erdmann, A. | Conference Paper |
| 2012 | Influence of two typical defects on the near-field optical properties of multilayer dielectric compression gratings
Jin, Y.X.; Guan, H.Y.; Kong, F.Y.; Wang, J.P.; Erdmann, A.; Liu, S.J.; Du, Y.; Shao, J.D.; He, H.B.; Yi, K. | Journal Article |
| 2012 | Mask aligner lithography simulation - From lithography simulation to process validation
Motzek, K.; Partel, S.; Bramati, A.; Hofmann, U.; Unal, N.; Hennemeyer, M.; Hornung, M.; Heindl, A.; Ruhland, M.; Erdmann, A.; Hudek, P. | Journal Article |
| 2012 | Mutual source, mask and projector pupil optimization
Fühner, T.; Evanschitzky, P.; Erdmann, A. | Conference Paper |
| 2012 | Resist properties required for 6.67 nm extreme ultraviolet lithography
Kozawa, T.; Erdmann, A. | Journal Article |
| 2012 | Resonant metamaterials for contrast enhancement in optical lithography
Dobmann, S.; Shyroki, D.; Banzer, P.; Erdmann, A.; Peschel, U. | Journal Article |
| 2012 | Rigorous electromagnetic field simulation of the impact of photomask line-edge and line-width roughness on lithographic processes
Rudolph, O.; Evanschitzky, P.; Erdmann, A.; Bär, E.; Lorenz, J. | Journal Article |
| 2012 | Simulation of 3D inclined/rotated UV lithography and its application to microneedles
Liu, S.; Roeder, G.; Aygun, G.; Motzek, K.; Evanschitzky, P.; Erdmann, A. | Journal Article |
| 2011 | Accuracy and performance of 3D mask models in optical projection lithography
Agudelo, V.; Evanschitzky, P.; Erdmann, A.; Fühner, T.; Shao, F.; Limmer, S.; Fey, D. | Conference Paper |
| 2011 | Analytical model for EUV mask diffraction field calculation
Cao, Y.; Wang, X.; Erdmann, A.; Bu, P.; Bu, Y. | Conference Paper |
| 2011 | Compensation of mask induced aberrations by projector wavefront control
Evanschitzky, Peter; Shao, Feng; Fühner, Tim; Erdmann, Andreas | Conference Paper |
| 2011 | Computational algorithms for optimizing mask layouts in proximity printing
Motzek, K.; Vogler, U.; Hennemeyer, M.; Hornung, M.; Voelkel, R.; Erdmann, A.; Meliorisz, B. | Journal Article |
| 2011 | Determination of the dill parameters of thick positive resist for use in modeling applications
Roeder, G.; Liu, S.; Aygun, G.; Evanschitzky, P.; Erdmann, A.; Schellenberger, M.; Pfitzner, L. | Conference Paper |
| 2011 | Feasibility study of chemically amplified resists for short wavelength extreme ultraviolet lithography
Kozawa, T.; Erdmann, A. | Journal Article |
| 2011 | Image simulation of projection systems in photolithography
Evanschitzky, Peter; Fühner, Tim; Erdmann, Andreas | Conference Paper |
| 2011 | Influence of geometry variations and defects on the near-field optical properties of pulsed compression gratings
Wang, J.; Erdmann, A.; Liu, S.; Shao, J.; Jin, Y.; He, H.; Yi, K. | Conference Paper |
| 2011 | Innovations in structured thin film design and fabrication for optical applications
Qi, H.; Wang, J.; Erdmann, A.; Jin, Y.; Shao, J.; Fan, Z. | Conference Paper |
| 2011 | Modeling of mask diffraction and projection imaging for advanced optical and EUV lithography
Erdmann, A.; Shao, F.; Agudelo, V.; Fühner, T.; Evanschitzky, P. | Journal Article |
| 2011 | Modellierung und Simulation bei Mask Aligner Lithographie (Source-Mask Optimization)
Vogler, U.; Bramati, A.; Völkel, R.; Hornung, M.; Zoberbier, R.; Motzek, M.; Erdmann, A.; Stürzebecher, L.; Zeitner, U. | Journal Article |
| 2011 | Numerical optimization of illumination and mask layout for the enlargement of process windows and for the control of photoresist profiles in proximity printing
Motzek, Kristian; Partel, Stefan; Vogler, Uwe; Erdmann, Andreas | Conference Paper |
| 2011 | Predictive modeling of EUV-lithography: The role of mask, optics, and photoresist effects
Erdmann, A.; Evanschitzky, P.; Shao, F.; Fühner, T.; Lorusso, G.; Hendrickx, E.; Goethals, A.M.; Jonckheere, R.; Bret, T.; Hofmann, T. | Conference Paper |
| 2011 | Rigorous EMF simulation of the impact of photomask line-edge and line-width roughness on lithographic processes
Rudolph, O.H.; Evanschitzky, P.; Erdmann, A.; Bär, E.; Lorenz, J. | Conference Paper |
| 2011 | Rigorous EMF simulation of the impact of photomask line-edge and line-width roughness on lithographic processes: Poster at SPIE Photomask Technology, September, Monterey, California
Rudolph, Oliver; Evanschitzky, Peter; Erdmann, Andreas; Bär, Eberhard; Lorenz, Jürgen | Poster |
| 2010 | Acid diffusion effects between resists in freezing processes used for contact hole patterning
Fuhrmann, J.; Fiebach, A.; Erdmann, A.; Trefonas, P. | Conference Paper |
| 2010 | Characterization of the scattering effect of complex mask geometries with surface roughness
Rahimi, Z.; Erdmann, A.; Pflaum, C. | Conference Paper |
| 2010 | Efficient simulation of three-dimensional EUV masks for rigorous source mask optimization and mask induced imaging artifact analysis
Evanschitzky, P.; Fühner, T.; Shao, F.; Erdmann, A. | Conference Paper |
| 2010 | Extraordinary low transmission of a metamaterial for application in lithography
Dobmann, S.; Ploss, D.; Reibold, D.; Erdmann, A.; Peschel, U. | Conference Paper |
| 2010 | Fast and highly accurate simulation of the printing behavior of EUV multilayer defects based on different models
Shao, F.; Evanschitzky, P.; Motzek, K.; Erdmann, A. | Conference Paper |
| 2010 | Mask and wafer topography effects in optical and EUV-lithography
Erdmann, A.; Shao, F.; Evanschitzky, P.; Fühner, T. | Conference Paper |
| 2010 | Mask diffraction analysis and optimization for extreme ultraviolet masks
Erdmann, A.; Evanschitzky, P.; Fühner, T. | Journal Article |
| 2010 | Mask-topography-induced phase effects and wave aberrations in optical and extreme ultraviolet lithography
Erdmann, A.; Shao, F.; Evanschitzky, P.; Fühner, T. | Conference Paper |
| 2010 | Modeling of double patterning interactions in litho-cure-litho-etch (LCLE) processes
Erdmann, A.; Shao, F.; Fuhrmann, J.; Fiebach, A.; Patsis, G.P.; Trefonas, P. | Conference Paper |
| 2010 | Modeling of exploration of reversible contrast enhacement layers for double exposure lithography
Shao, F.; Cooper, G.D.; Chen, Z.; Erdmann, A. | Conference Paper |
| 2010 | Optimization of illumination pupils and mask structures for proximity printing
Motzek, K.; Bich, A.; Erdmann, A.; Hornung, M.; Hennemeyer, M.; Meliorisz, B.; Hofmann, U.; Ünal, N.; Völkel, R.; Partel, S.; Hudek, P. | Conference Paper |
| 2010 | Rigorous EMF simulation of absorber shape variations and their impact on lithographic processes
Rahimi, Z.; Erdmann, A.; Evanschitzky, P.; Pflaum, C. | Conference Paper |
| 2010 | Topography-aware BARC optimization for double patterning
Liu, S.; Fühner, T.; Shao, F.; Barenbaum, A.; Jahn, J.; Erdmann, A. | Conference Paper |
| 2009 | Advanced lithography models for strict process control in the 32 nm technology node
Patsis, G.P.; Drygiannakis, D.; Raptis, I.; Gogolides, E.; Erdmann, A. | Conference Paper |
| 2009 | Efficient analysis of three dimensional EUV mask imaging artifacts using the waveguide decomposition method
Shao, F.; Evanschitzky, P.; Fühner, T.; Erdmann, A. | Conference Paper |
| 2009 | Efficient simulation and optimization of wafer topographies in double patterning
Shao, F.; Evanschitzky, P.; Fühner, T.; Erdmann, A. | Conference Paper |
| 2009 | Exploration of linear and non-linear double exposure techniques by simulation
Petersen, J.S.; Greenway, R.T.; Fühner, T.; Evanschitzky, P.; Shao, F.; Erdmann, A. | Conference Paper |
| 2009 | Extended Abbe approach for fast and accurate lithography imaging simulations
Evanschitzky, P.; Erdmann, A.; Fühner, T. | Conference Paper |
| 2009 | Extraordinary low transmission effects for ultra-thin patterned metal films
Reibold, D.; Shao, F.; Erdmann, A.; Peschel, U. | Journal Article |
| 2009 | Finite Integration (FI) method for modelling optical waves in lithography masks
Rahimi, Z.; Erdmann, A.; Pflaum, C. | Conference Paper |
| 2009 | Lithographic importance of base diffusion in chemically amplified photoresists
Schnattinger, T.; Erdmann, A. | Conference Paper |
| 2009 | Lithography simulation: Modeling techniques and selected applications
Erdmann, A.; Fühner, T.; Shao, F.; Evanschitzky, P. | Conference Paper |
| 2009 | Mask diffraction analysis and optimization for EUV masks
Erdmann, A.; Evanschitzky, P.; Fühner, T. | Conference Paper |
| 2009 | A model of self-limiting residual acid diffusion for pattern doubling
Fuhrmann, J.; Fiebach, A.; Uhle, M.; Erdmann, A.; Szmanda, C.R.; Truong, C. | Conference Paper |
| 2009 | Photomasks for semiconductor lithography: From simple shadow casters to complex 3D scattering objects
Erdmann, A.; Reibold, D.; Fühner, T.; Evanschitzky, P. | Conference Paper |
| 2009 | Rigorous diffraction simulations of topographic wafer stacks in double patterning
Feng, S.; Evanschitzky, P.; Fühner, T.; Erdmann, A. | Conference Paper |
| 2008 | Benchmark of rigorous methods for electromagnetic field simulations
Burger, S.; Zschiedrich, L.; Schmidt, F.; Evanschitzky, P.; Erdmann, A. | Conference Paper |
| 2008 | A comprehensive resist model for the prediction of line-edge roughness material and process dependencies in optical lithography
Schnattinger, T.; Erdmann, A. | Conference Paper |
| 2008 | Fast rigorous simulation of mask diffraction using the waveguide method with parallelized decomposition technique
Shao, F.; Evanschitzky, P.; Reibold, D.; Erdmann, A. | Conference Paper |
| 2008 | Increasing the predictability of AIMSTM measurements by coupling to resist simulations
Meliorisz, B.; Erdmann, A.; Schnattinger, T.; Strößner, U.; Scherübl, T.; Bisschop, P. de; Philipsen, V. | Conference Paper |
| 2008 | Investigation of high-resolution contact printing
Meliorisz, B.; Partel, S.; Schnattinger, T.; Fühner, T.; Erdmann, A.; Hudek, P. | Conference Paper |
| 2008 | On the stability of fully depleted SOI MOSFETs under lithography process variations
Kampen, C.; Fühner, T.; Burenkov, A.; Erdmann, A.; Lorenz, J.; Ryssel, H. | Conference Paper |
| 2008 | Optimization of mask absorber stacks and illumination settings for contact hole imaging
Erdmann, A.; Fühner, T.; Evanschitzky, P. | Conference Paper |
| 2008 | Photomasks for semiconductor lithography: From simple shadow casters to complex 3D scattering objects
Erdmann, A.; Reibold, D.; Fühner, T.; Evanschitzky, P. | Conference Paper |
| 2008 | Rigorous electromagnetic field simulation of two-beam interference exposures for the exploration of double patterning and double exposure scenarios
Erdmann, A.; Evanschitzky, P.; Fühner, T.; Schnattinger, T.; Xu, C.B.; Szmanda, C. | Conference Paper |
| 2008 | A simulation study on the impact of lithographic process variations on CMOS device performance
Fühner, T.; Kampen, C.; Kodrasi, I.; Burenkov, A.; Erdmann, A. | Conference Paper |
| 2008 | Simulation-based EUV source and mask optimization
Fühner, T.; Erdmann, A.; Evanschitzky, P. | Conference Paper |
| 2007 | Direct optimization approach for lithographic process conditions
Fühner, T.; Erdmann, A.; Seifert, S. | Journal Article |
| 2007 | Dr.LiTHO - a development and research lithography simulator
Fühner, T.; Schnattinger, T.; Ardelean, G.; Erdmann, A. | Conference Paper |
| 2007 | Fast near field simulation of optical and EUV masks using the waveguide method
Evanschitzky, P.; Erdmann, A. | Conference Paper |
| 2007 | Impact of alternative mask stacks on the imaging performance at NA 1.20 and above
Philipsen, V.; Mesuda, K.; Bisschop, P. de; Erdmann, A.; Citarella, G.; Evanschitzky, P.; Birkner, R.; Richter, R.; Scherübl, T. | Conference Paper |
| 2007 | The impact of the mask stack and its optical parameters on the imaging performance
Erdmann, A.; Fühner, T.; Seifert, S.; Popp, S.; Evanschitzky, P. | Conference Paper |
| 2007 | Memetic algorithms: Parametric optimization for microlithography
Dürr, C.; Fühner, T.; Tollkühn, B.; Erdmann, A.; Kokai, G. | Book Article |
| 2007 | Rigorous electromagnetic field mask modeling and related lithographic effects in the low k(1) and ultrahigh numerical aperture regime
Erdmann, A.; Evanschitzky, P. | Journal Article |
| 2007 | Simulation of larger mask areas using the waveguide method with fast decomposition technique
Evanschitzky, P.; Shao, F.; Erdmann, A.; Reibold, D. | Conference Paper |
| 2007 | Simulation of mask proximity printing
Meliorisz, B.; Erdmann, A. | Journal Article |
| 2007 | Simulation of proximity and contact lithography
Meliorisz, B.; Evanschitzky, P.; Erdmann, A. | Journal Article |
| 2006 | Accurate extraction of maximum current densities from the layout
Seidl, A.; Schnattinger, T.; Erdmann, A.; Hartmann, H.; Petrashenko, A. | Conference Paper |
| 2006 | Benchmark of a lithography simulation tool for next generation applications
Tollkühn, B.; Uhle, M.; Fuhrmann, J.; Gärtner, K.; Heubner, A.; Erdmann, A. | Conference Paper |
| 2006 | Defect printability study using EUV lithography
Holfeld, C.; Bubke, K.; Lehmann, F.; La Fontaine, B.; Pawloski, A.R.; Schwarzl, S.; Kamm, F.M.; Graf, T.; Erdmann, A. | Conference Paper |
| 2006 | Efficient optimization of lithographic process conditions using a distributed, combined global/local search approach
Fühner, T.; Popp, S.; Dürr, C.; Erdmann, A. | Conference Paper |
| 2006 | A fast development simulation algorithm for discrete resist models
Schnattinger, T.; Bär, E.; Erdmann, A. | Conference Paper |
| 2006 | Mask defect printing mechanisms for future lithography generations
Erdmann, A.; Graf, T.; Bubke, K.; Höllein, I.; Teuber, S. | Conference Paper |
| 2006 | Mesoscopic resist processing simulation in optical lithography
Schnattinger, T.; Bär, E.; Erdmann, A. | Conference Paper |
| 2006 | Rigorous mask modeling beyond the Hopkins approach
Schermer, J.; Evanschitzky, P.; Erdmann, A. | Conference Paper |
| 2006 | Rigorous mask modeling using waveguide and FDTD methods. An assessment for typical hyper NA imaging problems
Erdmann, A.; Evanschitzky, P.; Citarella, G.; Fühner, T.; Bisschop, P. de | Conference Paper |
| 2006 | Rigorous mask modelling beyond the hopkins approach
Schermer, J.; Evanschitzky, P.; Erdmann, A. | Conference Paper |
| 2006 | Three-dimensional resist development simulation with discrete models
Schnattinger, T.; Baer, E.; Erdmann, A. | Journal Article |
| 2006 | Validity of the Hopkins approximation in simulations of hyper-NA (NA>1) line-space structures for an attenuated PSM mask
Erdmann, A.; Citarella, G.; Evanschitzky, P.; Schermer, H.; Philipsen, V.; Bisschop, P. de | Conference Paper |
| 2005 | Aerial image analysis for defective masks in optical lithography
Graf, T.; Erdmann, A.; Evanschitzky, P.; Tollkühn, B.; Eggers, K.; Ziebold, R.; Teuber, S.; Höllein, I. | Conference Paper |
| 2005 | Correlation analysis: A fast and reliable method for a better understanding of simulation models in optical lithography
Tollkühn, B.; Heubner, A.; Elian, K.; Ruppenstein, B.; Erdmann, A. | Conference Paper |
| 2005 | Improved mask and source representations for automatic optimization of lithographic process conditions using a genetic algorithm
Fühner, T.; Erdmann, A. | Conference Paper |
| 2005 | Mask and wafer topography effects in immersion lithography
Erdmann, A.; Evanschitzky, P.; Bisschop, P. de | Conference Paper |
| 2005 | Mask modeling in the low k1 and ultrahigh NA regime: phase and polarization effects
Erdmann, A. | Conference Paper |
| 2005 | Mask modeling in the low k(1) and ultrahigh NA regime: Phase and polarization effects
Erdmann, A. | Conference Paper |
| 2005 | Modeling and simulation
Erdmann, A. | Book Article |
| 2005 | Simplified resist models for efficient simulation of contact holes and line ends
Tollkühn, B.; Erdmann, A.; Semmler, A.; Nölscher, C. | Conference Paper |
| 2005 | Simulation of the effect of a resist-surface bound air bubble on imaging in immersion lithography
Bisschop, P. de; Erdmann, A.; Rathsfeld, A. | Conference Paper |
| 2005 | Three dimensional EUV simulations: a new mask near field and imaging simulation system
Evanschitzky, P.; Erdmann, A. | Conference Paper |
| 2004 | Do we need complex resist models for predictive simulation of lithographic process performance?
Tollkühn, B.; Erdmann, A.; Lammers, J.; Nolscher, C.; Semmler, A. | Conference Paper |
| 2004 | Enhanced model for the efficient 2D and 3D simulation of defective EUV masks
Evanschitzky, P.; Erdmann, A. | Conference Paper |
| 2004 | Genetic algorithm for optimization and calibration in process simulation
Fühner, T.; Erdmann, A.; Ortiz, C.J.; Lorenz, J. | Conference Paper |
| 2004 | Genetic algorithms for geometry optimization in lithographic imaging systems
Fühner, T.; Erdmann, A.; Schnattinger, T. | Conference Paper |
| 2004 | Genetic algorithms to improve mask and illumination geometries in lithographic imaging systems
Fühner, T.; Erdmann, A.; Farkas, R.; Tollkühn, B.; Kokai, G. | Conference Paper |
| 2004 | The impact of EUV mask defects on lithographic process performance
Evanschitzky, P.; Erdmann, A. | Conference Paper |
| 2004 | Process optimization using lithography simulation
Erdmann, A. | Conference Paper |
| 2004 | Simulation is essential to successful design of modern semiconductors
Erdmann, A. | Journal Article |
| 2004 | Towards automatic mask and source optimization for optical lithography
Erdmann, A.; Fühner, T.; Schnattinger, T.; Tollkühn, B. | Conference Paper |
| 2004 | Verfahren zur Bestimmung von Strukturparametern einer Oberflaeche
Weidner, A.; Erdmann, A.; Schneider, C. | Patent |
| 2003 | Efficient simulation of light diffraction from 3-dimensional EUV-masks using field decomposition techniques
Erdmann, A.; Kalus, C.K.; Schmöller, T.; Wolter, A. | Conference Paper |
| 2003 | EUV mask simulation for AIMS
Windpassinger, R.; Rosenkranz, N.; Scherübl, T.; Evanschitzky, P.; Erdmann, A.; Zibold, A. | Conference Paper |
| 2003 | Mask and source optimization for lithographic imaging systems
Erdmann, A.; Farkas, R.; Fühner, T.; Tollkühn, B.; Kokai, G. | Conference Paper |
| 2003 | New models for the simulation of post-exposure bake of chemically amplified resist
Matiut, D.; Erdmann, A.; Tollkühn, B.; Semmler, A. | Conference Paper |
| 2003 | Optical lithography for future technology generations
Erdmann, A. | Journal Article |
| 2003 | Rigorous simulation of alignment for microlithography
Nikolaev, N.I.; Erdmann, A. | Journal Article |
| 2003 | Rigorous simulation of defective EUV multilayer masks
Sambale, C.; Schmöller, T.; Erdmann, A.; Evanschitzky, P.; Kalus, C. | Conference Paper |
| 2003 | Rigorous simulation of exposure over nonplanar wafers
Erdmann, A.; Kalus, C.K.; Schmöller, T.; Klyonova, Y.; Sato, T.; Endo, A.; Shibata, T.; Kobayashi, Y. | Conference Paper |
| 2003 | Simulation of extreme ultraviolet masks with defective multilayers
Evanschitzky, P.; Erdmann, A.; Besacier, M.; Schiavone, P. | Conference Paper |
| 2003 | Will Darwin's law help us to improve our resist models?
Tollkühn, B.; Fühner, T.; Matiut, D.; Erdmann, A.; Semmler, A.; Kuchler, B.; Kokai, B. | Conference Paper |
| 2002 | Enhancements in rigorous simulation of light diffraction from phase-shift masks
Erdmann, A.; Kachwala, N. | Conference Paper |
| 2002 | Herstellung von optisch abgebildeten Strukturen mit einer Phasenschiebung von transmittierten Lichtanteilen
Erdmann, A.; Vial, A. | Patent |
| 2002 | Modification of boundaries conditions in the FDTD algorithm for EUV masks modeling
Vial, A.; Erdmann, A.; Schmoeller, T.; Kalus, C. | Conference Paper |
| 2002 | New methods to calibrate simulation parameters for chemically amplified resists
Tollkuehn, B.; Erdmann, A.; Kivel, N.; Robertson, S.A.; Kang, D.; Hansen, S.G.; Fumar, P.A.; Tsann, B.C.; Hoppe, W. | Conference Paper |
| 2001 | 3D-electromagnetic field simulation for Low-k1 lithography applications
Erdmann, A.; Gordon, R.; McCallum, M.; Rosenbusch, A. | Journal Article |
| 2001 | Automatic resist parameter calibration procedure for lithography simulation
Tollkuehn, B.; Hoepfl, M.; Erdmann, A.; Majoni, S.; Jess, M. | Conference Paper |
| 2001 | Benchmarking of available rigorous electromagnetic field (EMF) simulators for phase-shift mask applications
Kalus, C.; List, S.; Erdmann, A.; Gordon, R.; McCallum, M.; Semmler, A. | Journal Article |
| 2001 | Comparison of simulation approaches for chemically amplified resists
Erdmann, A.; Henke, W.; Robertson, S.; Richter, E.; Tollkühn, B.; Hoppe, W. | Conference Paper |
| 2001 | Effect of copper on the breakthrough voltage of Poly-Si - Poly-Si capacitors
Boehringer, M.; Pillion, J.E.; Erdmann, V.; Rygula, M.; Winz, K.; Brauchle, P.; Aquino, D.; Zhang, H.; Zahka, J.; Zielonka, G.; Hauber, J. | Conference Paper |
| 2001 | The impact of exposure induced refractive index changes of photoresists on the photolithographic process
Erdmann, A.; Henderson, C.L.; Willson, C.G. | Journal Article |
| 2001 | Optical simulation of 3D Mask effects
Rosenbusch, A.; Erdmann, A.; Friedrich, C. | Journal Article |
| 2001 | Topography effects and wave aberrations in advanced PSM technology
Erdmann, A. | Conference Paper |
| 2001 | Trace analysis for 300 mm wafers and processes with total- reflection x-ray-fluorescence
Nutsch, A.; Erdmann, V.; Zielonka, G.; Pfitzner, L.; Ryssel, H. | Journal Article |
| 2000 | Optimizing edge topography of alternating phase shift masks using rigorous mask modelling
Friedrich, C.; Mader, L.; Erdmann, A.; List, S.; Gordon, R.; Kalus, C.; Griesinger, U.; Pforr, R.; Mathuni, J.; Ruhl, G.; Maurer, W. | Conference Paper |
| 2000 | Rigorous diffraction analysis for future mask technology
Erdmann, A.; Friedrich, C. | Conference Paper |
| 1999 | FIRM: a new software tool for calibration of lithography simulation
Krüger, D.; Kalus, C.K.; Erdmann, A.; Friedrich, C.; Käsmaier, R.; Feike, A. | Conference Paper |
| 1998 | Simulation and optimization of holographically exposed photoresist gratings
Zanke, C.; Gombert, A.; Erdmann, A.; Weiss, M. | Conference Paper |
| 1998 | Simulation of optical lithography
Erdmann, A.; Henke, W. | Conference Paper |
| 1997 | Metrology and analytics for the optimization of CMP processing
Huber, A.; Erdmann, V.; Zielonka, G.; Schneider, C.; Pfitzner, L.; Ryssel, H.; Rohde, A. | Conference Paper |
This publication list has been generated from the publication database Fraunhofer-Publica.