Conference / September 28, 2026 - September 30, 2026
International Conference on Simulation of Semiconductor Processes and Devices (SISPAD) 2026
SISPAD provides an international forum for the presentation of leading-edge research and development results in the area of process and device simulation. SISPAD is one of the longest-running conferences devoted to technology computer-aided design (TCAD) and advanced modeling of novel semiconductor devices and nano electronic structures.
In the Fraunhofer IISB presentation
Multi-phase-field Modeling of Thin-film Silicidation
by C. Pixius et al.
we apply a new model based on the multi-phase-field method to simulate the evolution of thin silicide layers during high-temperature annealing in semiconductor processing.
Fraunhofer Institute for Integrated Systems and Device Technology IISB