Publications Intelligent Energy Systems

YearTitle/AuthorDocument Type
2020Dimensioning battery energy storage systems for peak shaving based on a real-time control algorithm
Lange, C.; Rueß, A.; Nuß, A.; Öchsner, R.; März, M.
Journal Article
2020Four switch buck/boost converter to handle bidirectional power flow in dc subgrids
Schulz, M.; Schleippmann, N.; Gosses, K.; Chacon, R.; Wunder, B.
Conference Paper
2020foxBMS - free and open BMS platform focused on functional safety and AI
Waldhör, Stefan; Bockrath, Steffen; Wenger, Martin; Schwarz, Radu; Lorentz, Vincent
Conference Paper
2020Smart Platform for Rapid Prototyping: A First Solution Approach to Improve Time-to-Market and Process Control in Low-Volume Device Fabrication
Schellenberger, M.; Anger, S.; Pfeffer, M.; Häublein, V.; Roeder, G.; Bauer, A.
Conference Paper
2020Spatial and Temporal Temperature Homogenization in an Automotive Lithium-Ion Pouch Cell Battery Module
Gepp, M.; Lorentz, V.; März, M.; Geffray, F.; Guyon, E.; Chopard, F.
Conference Paper
2019A bidirectional and isolated DC/DC converter connecting mobile battery systems to a DC grid in commercial buildings
Schulz, M.; Wild, M.; Chacon, R.; Wunder, B.; März, M.
Conference Paper
2019Hybrid Cooling Towers in a Free-Cooling Application: Modeling and Field Measurement Verification
Puls, P.; Lange, C.; Öchsner, R.
Journal Article
2019A hybrid frequency-time-domain approach to determine the vibration fatigue life of electronic devices
Schriefer, T.; Hofmann, M.
Journal Article
2019Innovative Technologien für intelligente dezentrale Energiesysteme
März, Martin; Öchsner, Richard
Book
2019Research Platform: Decentralized Energy System for Sector Coupling
Öchsner, R.; Nuß, A.; Lange, C.; Rueß, A.
Journal Article
2019Second use or recycling of hydrogen waste gas from the semiconductor industry - Economic analysis and technical demonstration of possible pathways
Rochlitz, L.; Steinberger, M.; Oechsner, R.; Weber, A.; Schmitz, S.; Schillinger, K.; Wolff, M.; Bayler, A.
Journal Article
2019Serienfähige Hochstromkontakte für integrierte elektrische Fahrzeugantriebe
Schriefer, T.; Rauh, H.; Hofmann, M.; Schreibmüller, N.; Nusser, T.; Horwath, C.; Moritz, W.; Moosmann, N.; Deibert, A.; Gerberich, T.; Schaumberger, K.; Kaufmann, F.; Schmidt, M.
Journal Article
2019Spatial and Temporal Temperature Homogenization in an Automotive Lithium-Ion Pouch Cell Battery Module: Paper presented at ELECTRIMACS 2019, Salerno, Italy, 21st - 23rd May 2019
Gepp, Markus; Lorentz, V.R.H.; März, M.; Geffray, F.; Guyon, E.; Chopard, F.
Conference Paper
2019State of Charge Estimation using Recurrent Neural Networks with Long Short-Term Memory for Lithium-Ion Batteries
Bockrath, Steffen; Rosskopf, Andreas; Koffel, Stéphane; Waldhör, Stefan; Srivastava, Kushal; Lorentz, Vincent
Conference Paper
2019Vorrichtung und Verfahren zur Frequenzcharaterisierung eines elektronischen Systems
Bodensteiner, Fabian; Ott, Leopold; Wunder, Bernd
Patent
2018A 3.6 kV full SiC fuel cell boost converter for high power electric aircraft
Kreutzer, O.; Gerner, M.; Billmann, M.; Maerz, M.
Conference Paper
2018Advances in Li-Ion battery management for electric vehicles
Morello, R.; Rienzo, R. di; Roncella, R.; Saletti, R.; Schwarz, R.; Lorentz, V.R.H.; Hoedemaekers, E.R.G.; Rosca, B.; Baronti, F.
Conference Paper
2018Advances in thermal laser separation: Process monitoring in a kerf-free laser-based cutting technology to ensure high yield
Barreto, M.C.; Roeder, G.; Steinhoff, M.; Schellenberger, M.; Bauer, A.
Journal Article
2018Analysis of a multiphase multi-star PMSM drive system with sic-based inverter for an automotive application
Piepenbreier, S.; Berlinecke, J.; Burani, N.; Bittnerbittner, R.; Matichyn, S.; Streit, F.; Hofmann, M.; Plikat, R.
Conference Paper
2018Anode recirculation and purge strategies for PEM fuel cell operation with diluted hydrogen feed gas
Steinberger, Michael; Geiling, Johannes; Öchsner, Richard; Frey, Lothar
Journal Article
2018Assessing the vibrational response and robustness of electronic systems by dissolving time and length scale
Schriefer, T.; Hofmann, M.
Conference Paper
2018Dynamic Mechanical Analysis of a Power Electronic Gate Driver Board
Schriefer, T.; Hofmann, M.
Conference Paper
2018Elektronik
Bauer, Anton; Bär, Eberhard; Erlbacher, Tobias; Friedrich, Jochen; Lorenz, Jürgen; Rommel, Mathias; Schellenberger, Martin
Book Article
2018Evaluation of DC-DC-converter impedance passivity using pseudo-random test signals
Ott, L.; Han, Y.; Wunder, B.; März, M.; Bodensteiner, F.
Conference Paper
2018Fault Considerations of Non-Isolated Electric Vehicle Chargers with a Mutual DC Supply
Gosses, K.; Kaiser, J.; Ott, L.; Schulz, M.; Fersterra, F.; Wunder, B.; Han, Y.; Lavery, M.; März, M.
Conference Paper
2018Hochvolt-Kraftfahrzeugbordnetz
Billmann, Markus; Lausser, Christof; Reifert, Eugen; Sutter, Ulrich; Tchobanov, Dimitar
Patent
2018Is an antiparallel SiC-Schottky diode necessary? Calorimetric analysis of SiC-MOSFETS switching behavior
Kreutzer, O.; Billmann, M.; März, M.
Conference Paper
2018Modular multilevel submodules for converters, from the state of the art to future trends
Billmann, M.
Conference Paper
2018Power antifuse device to bypass or turn-off battery cells in safety-critical and fail-operational systems
Lorentz, V.R.H.; Waller, R.; Waldhör, S.; Wenger, M.; Gepp, M.; Schwarz, R.; Koffel, S.; Wacker, S.; Akdere, M.; Giegerich, M.; März, M.
Conference Paper
2018TLS-dicing for SiC - Latest assessment results
Lewke, D.; Cerezuela Barreto, M.; Dohnke, K.; Zühlke, H.-U.; Belgardt, C.; Schellenberger, M.
Conference Paper
2018Verfahren und Vorrichtung zur Energieerzeugung aus wasserstoffreichem Industrie-Abgas
Frey, Lothar; König, Karl-Heinz; Steinberger, Michael; Öchsner, Richard
Patent
2017Anordnung mit multifuntionalem Anschluss für Energiespeicherzellen oder Energieverbraucher
Lorentz, Vincent; März, Martin; Wenger, Martin
Patent
2017A bidirectional approach for segregated DC microgrids
Fersterra, F.; Gosses, K.; Schulz, M.; Wunder, B.; März, M.
Conference Paper
2017Droop controlled cognitive power electronics for DC microgrids
Wunder, B.; Ott, L.; Kaiser, J.; Gosses, K.; Schulz, M.; Fersterra, F.; März, M.; Lavery, M.; Han, Y.
Conference Paper
2017Elektrische Energiespeicherzelle mit integrierter Überbrückungseinrichtung
Lorentz, Vincent; März, Martin; Waller, Reinhold
Patent
2017Elektrische Überbrückungseinrichtung zum Überbrücken einer elektrischen Energiequelle oder eines Energieverbrauchers
Lorentz, Vincent; März, Martin; Waller, Reinhold
Patent
2017Elektrische Überbrückungseinrichtung zum Überbrücken elektrischer Bauelemente, insbesondere einer Energiequelle oder eines Energieverbrauchs
Waller, Reinhold; Lorentz, Vincent; März, Martin
Patent
2017Enhancing chiller efficiencies via use of cold energy storage
Puls, Philipp; Linhardt, Simon; Öchsner, Richard
Conference Paper
2017Entwicklungsperspektiven für Zellformate von Lithium-Ionen-Batterien in der Elektromobilität
Hettesheimer, Tim; Thielmann, Axel; Neef, Christoph; Möller, Kai-Christian; Wolter, Mareike; Lorentz, Vincent; Gepp, Markus; Wenger, Martin; Prill, Torben; Zausch, Jochen; Kitzler, Peter; Montnacher, Joachim; Miller, Martin; Hagen, Markus; Fanz, Patrik; Tübke, Jens
Study
2017Grid behavior under fault situations in ±380 VDC distribution systems
Kaiser, J.; Gosses, K.; Ott, L.; Han, Y.; Wunder, B.; März, M.; Weiss, R.
Conference Paper
2017Introduction and application of formation methods based on serial-connected lithium-ion battery cells
Müller, V.; Kaiser, R.; Poller, S.; Sauerteig, D.; Schwarz, R.; Wenger, M.; Lorentz, V.R.H.; März, M.
Journal Article
2017Layout and Setup for a Conversion System of Hydrogen Exhaust Gas Streams into Electricity using a PEM Fuel Cell
Steinberger, Michael; Müller, Michael; Hoffmann, Patrick; Geiling, Johannes; Öchsner, Richard
Conference Paper
2017Parasitic inductance analysis of a fast switching 100 kW full SiC inverter
Kegeleers, M.; Koerner, J.; Matlok, S.; Hofmann, M.; Maerz, M.
Conference Paper
2017A passively cooled 15 kW, 800 V DCDC converter with a peak efficiency of 99.7 %
Kreutzer, O.; Billmann, M.; Maerz, M.
Conference Paper
2017Raman micro-spectroscopy as a non-destructive key analysis tool in current power semiconductor manufacturing
Biasio, M. de; Kraft, M.; Geier, E.; Goller, B.; Bergmann, C.; Esteve, R.; Cerezuela-Barreto, M.; Lewke, D.; Schellenberger, M.; Roesner, M.
Conference Paper
2017Safety considerations for the operation of bipolar DC-grids
Kaiser, J.; Gosses, K.; Ott, L.; Han, Y.; Wunder, B.; März, M.; Schork, F.; Bühler, K.; Böhm, T.
Conference Paper
2017Verfahren zur Überprüfung eines Trennschrittes bei der Zerteilung eines flachen Werkstückes in Teilstücke
Tobisch, Alexander; Schellenberger, Martin; Lewke, Dirk
Patent
2016Aviation battery monitoring electronics in lithium-ion based battery systems for electrified sailplanes and aircrafts
Schwarz, R.; Waller, R.; Wenger, M.; Akdere, M.; Neureuther, J.; Gepp, M.; Koffel, S.; Lorentz, V.R.H.; März, M.; Holtsmark, A.; Gribov, V.; Lange, A.
Conference Paper
2016Direct optical stress sensing in semiconductor manufacturing using raman micro-spectrometry
Biasio, M. de; Kraft, M.; Roesner, M.; Bergmann, C.; Cerezuela-Barreto, M.; Lewke, D.; Schellenberger, M.
Conference Paper
2016Einsatz von Kältespeichern zur Steigerung der Effizienz von Kälteversorgungssystemen: Poster präsentiert beim OTTI 5. Fachforum Thermische Energiespeicher, Neumarkt 2016
Puls, Philipp; Linhardt, Simon; Lange, C.; Öchsner, Richard
Poster
2016Hardware and software framework for an open battery management system in safety-critical applications
Akdere, M.; Giegerich, M.; Wenger, M.; Schwarz, R.; Koffel, S.; Fühner, T.; Waldhör, S.; Wachtler, J.; Lorentz, V.R.H.; März, M.
Conference Paper
2016Mechanical reliability of power electronic systems
Schriefer, T.; Hofmann, M.
Conference Paper
2016Model-based fault current estimation for low fault-energy 380VDC distribution systems
Ott, L.; Kaiser, J.; Gosses, K.; Han, Y.; Wunder, B.; März, M.; Strobl, C.
Conference Paper
2016Non-isolated three-port DC/DC converter for ±380V DC microgrids
Han, Y.; Kaiser, J.; Ott, L.; Schulz, M.; Fersterra, F.; Wunder, B.; Maerz, M.
Conference Paper
2016Non-isolating DC/DC converter for a fuel cell powered aircraft
Kreutzer, O.; Billmann, M.; Maerz, M.; Lange, A.
Conference Paper
2016Open, flexible and extensible battery management system for lithium-ion batteries in mobile and stationary applications
Giegerich, M.; Akdere, M.; Freund, C.; Fühner, T.; Grosch, J.L.; Koffel, S.; Schwarz, R.; Waldhör, S.; Wenger, M.; Lorentz, V.R.H.; März, M.
Conference Paper
2016Temperature gradient reduction in high-power battery systems using prismatic cells combined with Phase-Change Sheets and Graphite foils
Gepp, M.; Reisenweber, H.; Lorentz, V.R.H.; März, M.
Conference Paper
2015Advanced thermal management for temperature homogenization in high-power lithium-ion battery systems based on prismatic cells
Gepp, M.; Filimon, R.; Koffel, S.; Lorentz, V.R.H.; März, M.
Conference Paper
2015An advanced voltage droop control concept for grid-tied and autonomous DC microgrids
Ott, L.; Han, Y.; Wunder, B.; Kaiser, J.; Fersterra, F.; Schulz, M.; März, M.
Conference Paper
2015Device optimization and application study of low cost printed temperature sensor for mobile and stationary battery based Energy Storage Systems
Grosch, J.; Teuber, E.; Jank, M.; Lorentz, V.; März, M.; Frey, L.
Conference Paper
2015Energy distribution with DC microgrids in commercial buildings with power electronics
Wunder, B.; Kaiser, J.; Fersterra, F.; Ott, L.; Han, Y.; März, M.
Conference Paper
2015Entwicklung von Betriebsstrategien zur Verbesserung der Effizienz von Kälteversorgungssystemen mit thermischen Speichern
Puls, Philipp; Öchsner, Richard; Linhardt, Simon
Conference Paper
2015Flexible test and demonstration vehicle platform for electric drivetrain power electronics
Sültrop, C.; Hilpert, H.; Giegerich, M.; Wenger, M.; März, M.
Conference Paper
2015Integrated galvanically isolated MOSFET and IGBT gate-driver circuit with switching speed control
Lorentz, V.R.H.; Schwarz, R.; Heckel, T.; März, M.; Frey, L.
Conference Paper
2015Integrierte E-Antriebsstränge durch intelligente Einzelzähne
Rauh, Hubert; Hutzler, Aaron; Bayer, Christoph; Hofmann, Maximilian
Book Article
2015Modeling of ion drift in 4H-SiC-based chemical MOSFET sensors
Erlbacher, T.; Schwarzmann, H.; Bauer, A.J.; Döhler, G.H.; Schreivogel, M.; Lutz, T.; Guillén, F.H.; Graf, J.; Fix, R.; Frey, L.
Journal Article
2015Modelling and measuring complex impedances of power electronic converters for stability assessment of low-voltage DC-grids
Ott, L.; Han, Y.; Stephani, O.; Kaiser, J.; Wunder, B.; März, M.
Conference Paper
2015Nachbearbeitung von teilgetrennten Bauelementen in der Halbleitertechnik
Lewke, Dirk; Schellenberger, Martin
Study
2015Overview of different topologies and control strategies for DC micro grids
Wunder, B.; Ott, L.; Kaiser, J.; Han, Y.; Fersterra, F.; März, M.
Conference Paper
2015Sensorless battery cell temperature estimation circuit for enhanced safety in battery systems
Schwarz, R.; Semmler, K.; Wenger, M.; Lorentz, V.R.H.; März, M.
Conference Paper
2015Setup and state based energy control of a grid-connected multipurpose hybrid hydrogen system
Steinberger, Michael; Geiling, Johannes; Öchsner, Richard
Conference Paper
2015Silicon nitride, a high potential dielectric for 600 V integrated RC-snubber applications
Krach, F.; Schwarzmann, H.; Bauer, A.J.; Erlbacher, T.; Frey, L.
Journal Article
2015SuperLIB: Smart Battery Management of a Dual Cell Architecture for Electric Vehicles
Kurtulus, C.; Krabb, P.; Hennige, V.; Räsänen, M.; Salminen, J.; Nuutinen, M.; Grosch, J.; Jank, M.; Teuber, E.; Lorentz, V.; Petit, M.; Martin, J.; Silvi, J.-L.; Omar, N.; Widanage, D.
Conference Paper
2015Thermal laser separation - a novel dicing technology fulfilling the demands of volume manufacturing of 4H-SiC devices
Lewke, D.; Dohnke, K.O.; Zühlke, H.U.; Cerezuela Barret, M.; Schellenberger, M.; Bauer, A.; Ryssel, H.
Conference Paper
2015Verwertung von wasserstoffreichen Gasgemischen in PEM-Brennstoffzellensystemen
Steinberger, Michael; Öchsner, Richard
Conference Paper
2015Voltage control and stabilization of distributed and centralized DC micro grids
Wunder, B.; Ott, L.; Han, Y.; Kaiser, J.; März, M.
Conference Paper
2015Vorrichtung und Verfahren zur Überbrückung eines elektrischen Energiespeichers
Erlbacher, Tobias; Lorentz, Vincent; Waller, Reinhold; Rattmann, Gudrun
Patent
2014Automated tool for measuring nanotopography of 300 mm wafers at early stages of wafer production
Tröger, B.; Mühlig, A.; Fries, T.; Bauer, S.; Wihr, H.; Riedel, F.; Lewke, D.; Schellenberger, M.
Conference Paper
2014Energy efficient DC-grids for commercial buildings
Wunder, B.; Ott, L.; Szpek, M.; Boeke, U.; Weiß, R.
Conference Paper
2014The Factory Integration Roadmap in Semiconductor manufacturing
Moyne, J.; Schellenberger, M.; Pfitzner, L.
Conference Paper
2014Feasibility evaluation of virtual metrology for the example of a trench etch process
Roeder, G.; Winzer, S.; Schellenberger, M.; Jank, S.; Pfitzner, L.
Journal Article
2014Galvanically isolated differential data transmission using capacitive coupling and a modified Manchester algorithm for smart power converters
Niedermeier, M.T.; Wenger, M.M.; Filimon, R.; Sedlacek, V.O.; Lorentz, V.R.H.; Fort, C.; März, M.; Ferrieux, J.P.; Frey, L.
Conference Paper
2014High quality and high speed cutting of 4H-SiC JFET wafers including PCM structures by using thermal laser separation
Lewke, D.; Koitzsch, M.; Dohnke, K.O.; Schellenberger, M.; Zuehlke, H.-U.; Rupp, R.; Pfitzner, L.; Ryssel, H.
Conference Paper
2014Investigation of gas sensing in large lithium-ion battery systems for early fault detection and safety improvement
Wenger, M.; Waller, R.; Lorentz, V.R.H.; März, M.; Herold, M.
Conference Paper
2014Optical characterization of patterned thin films
Rosu, D.; Petrik, P.; Rattmann, G.; Schellenberger, M.; Beck, U.; Hertwig, A.
Conference Paper
2014Reliability of monolithic RC-snubbers in MOS-based power modules
Erlbacher, T.; Schwarzmann, H.; Krach, F.; Bauer, A.J.; Berberich, S.E.; Kasko, I.; Frey, L.
Conference Paper
2014 A robust contactless capacitive communication link for high power battery systems
Wenger, M.M.; Filimon, R.; Lorentz, V.R.H.; März, M.
Conference Paper
2013Advanced Vacuum Wafer Drying for Thermal Laser Separation Dicing Assessment. Results from European collaborative SEAL project
Le Barillec, Olivier; Davenet, Magali; Bellet, B.; Koitzsch, Matthias; Lewke, Dirk; Schellenberger, Martin; Zühlke, Hans-Ulrich
Conference Paper
2013Characterization of thin ZnO films by vacuum ultra-violet reflectometry
Gumprecht, T.; Petrik, P.; Roeder, G.; Schellenberger, M.; Pfitzner, L.; Pollakowski, B.; Beckhoff, B.
Conference Paper
2013Electrothermal modeling and characterization of high capacity lithium-ion battery systems for mobile and stationary applications
Giegerich, M.; Koffel, S.; Filimon, R.; Grosch, J.L.; Fühner, T.; Wenger, M.M.; Gepp, M.; Lorentz, V.R.H.
Conference Paper
2013Full wafer nanotopography analysis on rough surfaces using stitched white light interferometry images
Lewke, D.; Schellenberger, M.; Pfitzner, L.; Fries, T.; Tröger, B.; Muehlig, A.; Riedel, F.; Bauer, S.; Wihr, H.
Conference Paper
2013Improving electric behavior and simplifying production of Si-based diodes by using thermal laser separation
Koitzsch, M.; Lewke, D.; Schellenberger, M.; Pfitzner, L.; Ryssel, H.; Kolb, R.; Zühlke, H.-U.
Conference Paper
2013Innovative balancing, heating and temperature sensing element for automotive batteries
Filimon, R.; Grosch, J.; Teuber, E.; Jank, M.; Lorentz, V.; Wenger, M.; Giegerich, M.; März, M.; Frey, L.
Conference Paper
2013Practical aspects of virtual metrology and predictive maintenance model development and optimization
Schöpka, U.; Roeder, G.; Mattes, A.; Schellenberger, M.; Pfeffer, M.; Pfitzner, L.; Scheibelhofer, P.
Conference Paper
2013Tunnel field-effect transistors with graphene channels
Svintsov, D.A.; Vyurkov, V.V.; Lukichev, V.F.; Orlikovsky, A.A.; Burenkov, A.; Oechsner, R.
Journal Article
2013Verfahren und Vorrichtung zum parallelen Trennen eines Werkstücks in mehrere Teilstücke
Lorenz, Jürgen; Koitzsch, Matthias; Schellenberger, Martin; Lewke, Dirk; Gumprecht, Thomas
Patent
2013Virtual metrology for prediction of etch depth in a trench etch process
Roeder, G.; Schellenberger, M.; Pfitzner, L.; Winzer, S.; Jank, S.
Conference Paper
2012Ablation Free Dicing of 4H-SiC Wafers with Feed Rates up to 200 mm/s by Using Thermal Laser Separation
Lewke, Dirk; Koitzsch, Matthias; Schellenberger, Martin; Pfitzner, Lothar; Ryssel, Heiner; Zühlke, Hans-Ulrich
Conference Paper
2012Amplitude modulated resonant push-pull driver for piezoelectric transformers in switching power applications
Schwarzmann, Holger; Erlbacher, Tobias; Bauer, Anton J.; Ryssel, Heiner; Frey, Lothar
Conference Paper
2012Batteries and battery management systems for electric vehicles
Brandl, M.; Gall, H.; Wenger, M.; Lorentz, V.; Giegerich, M.; Baronti, F.; Fantechi, G.; Fanucci, L.; Roncella, R.; Saletti, R.; Saponara, S.; Thaler, A.; Cifrain, M.; Prochazka, W.
Conference Paper
2012Comparative investigation on installation space requirements for input filters of DC-link- and matrix converters based on amplitude pseudo-spectra
Schramm, A.; Lanfer, H.; Petzoldt, J.; Rädel, U.; Schwarzmann, H.; Erlbacher, T.
Conference Paper
2012Enhancements in resizing single crystalline silicon wafers up to 450 mm by using thermal laser separation
Koitzsch, M.; Lewke, D.; Schellenberger, M.; Pfitzner, L.; Ryssel, H.; Zühlke, H.U.
Conference Paper
2012Factory integration
Oechsner, Richard
Journal Article
2012Framework for integration of virtual metrology and predictive maintenance
Roeder, G.; Mattes, A.; Pfeffer, M.; Schellenberger, M.; Pfitzner, L.; Knapp, A.; Mühlberger, H.; Kyek, A.; Lenz, B.; Frisch, M.; Bichlmeier, J.; Leditzky, G.; Lind, E.; Zoia, S.; Fazio, G.
Conference Paper
2012A generic approach for comparing input filter efforts of voltage- and current source converters
Schramm, A.; Lanfer, H.; Petzoldt, J.; Rädel, U.; Schwarzmann, H.; Erlbacher, T.
Conference Paper
2012IMPROVE - a joint European effort to boost efficiency in semiconductor manufacturing: Presentation held at APC Conference XXIV 2012, 10.09.2012 to 12.09.2012, Ann Arbor, Michigan
Schellenberger, Martin; Koitzsch, Matthias; Roeder, Georg; Pfeffer, Markus; Schöpka, Ulrich; Mattes, Andreas; Pfitzner, Lothar
Presentation
2012Improving module performance and reliability in power electronic applications by monolithic integration of RC-snubbers
Erlbacher, Tobias; Schwarzmann, Holger; Bauer, Anton J.; Berberich, Sven E.; Dorp, Joachim vom; Frey, Lothar
Conference Paper
2012Measurement strategy for dielectric ultra-thin film characterization by vacuum ultra-violet reflectometry
Gumprecht, T.; Roeder, G.; Schellenberger, M.; Pfitzner, L.
Conference Paper
2012Modular inverter power electronic for intelligent e-drives
Hofmann, M.; Schletz, A.; Domes, K.; Marz, M.; Frey, L.
Conference Paper
2012Novel cost-efficient contactless distributed monitoring concept for smart battery cells
Lorentz, V.R.H.; Wenger, M.M.; Grosch, J.L.; Giegerich, M.; Jank, M.P.M.; März, M.; Frey, L.
Conference Paper
2012Piezoelektrische Transformatoren zur Ansteuerung von Leistungsschaltern
Schwarzmann, H.
Dissertation
2012Predictive sampling approach to dynamically optimize defect density control operations
Pfeffer, M.; Oechsner, R.; Pfitzner, L.; Eckert, S.; Hartmann, A.; Gold, H.; Biebl, G.; Kaspar, J.
Conference Paper
2012Reliability characterization of dielectrics in 200V trench capacitors: Poster at Workshop on Dielectrics in Microelectronics, WoDiM 2012, Dresden
Erlbacher, Tobias; Schwarzmann, Holger; Bauer, Anton J.; Dorp, Joachim vom; Frey, Lothar
Poster
2012Smart battery cell monitoring with contactless data transmission
Lorentz, V.; Wenger, M.; Giegerich, M.; Zeltner, S.; März, M.; Frey, L.
Conference Paper
2012Stationsanordnung zur Bearbeitung und/oder Vermessen von Halbleiterscheiben sowie Bearbeitungsverfahren
Schellenberger, Martin; Lewke, Dirk
Patent
2012Thermal laser separation and its applications
Lewke, Dirk; Koitzsch, Matthias; Schellenberger, Martin; Pfitzner, Lothar; Ryssel, Heiner; Zühlke, Hans-Ulrich
Journal Article
2012Virtual Equipment for benchmarking Predictive Maintenance algorithms
Mattes, A.; Schöpka, U.; Schellenberger, M.; Scheibelhofer, P.; Leditzky, G.
Conference Paper
2012Der "Zauberspiegel" als Messprinzip
Tobisch, Alexander; Schellenberger, Martin; Pfitzner, Lothar
Journal Article
2011Determination of the dill parameters of thick positive resist for use in modeling applications
Roeder, G.; Liu, S.; Aygun, G.; Evanschitzky, P.; Erdmann, A.; Schellenberger, M.; Pfitzner, L.
Conference Paper
2011Developing a framework for virtual metrology and predictive maintenance
Schellenberger, Martin; Roeder, Georg; Mattes, Andreas; Pfeffer, Markus; Pfitzner, Lothar; Knapp, Alexander; Mühlberger, Heribert; Bichlmeier, Josef; Valeanu, Christian; Kyek, Andreas; Lenz, Benjamin; Frisch, Markus; Leditzky, Günther
Journal Article
2011Modulares Steuerungskonzept für integrierte Messtechnik in der Halbleiterfertigung am Beispiel einer Mehrkammerprozessanlage
Schellenberger, Martin; Ryssel, H.; Frey, L.
Dissertation
2011A novel PWM control for a bi-directional full-bridge DC-DC converter with smooth conversion mode transitions
Lorentz, V.R.H.; Schwarzmann, H.; März, M.; Bauer, A.J.; Ryssel, H.; Frey, L.; Poure, P.; Braun, F.
Journal Article
2011Thermal characterization of an axle-twin-drive with system integrated double-inverter
Hofmann, M.; Eckardt, B.; März, M.; Frey, L.
Conference Paper
2011Thermal Laser Separation (TLS) for separating multi-crystalline silicon wafers: A comparison with state-of-the-art methods: Poster at 26th European Photovoltaic Solar Energy Conference 2011, Hamburg, Germany
Koitzsch, Matthias; Schellenberger, Martin
Poster
2011A virtual equipment as a test bench for evaluating virtual metrology algorithms
Mattes, Andreas; Koitzsch, Matthias; Lewke, Dirk; Müller-Zell, Michael; Schellenberger, Martin
Conference Paper
2011Virtual equipment. A test bench for virtual metrology algorithms: Presentation held at ERIC Conference 2011, Leixlip, October 12th 2011
Mattes, Andreas; Lewke, Dirk; Schellenberger, Martin
Presentation
2010Advanced process control - lessons learned from semiconductor manufacturing
Schellenberger, M.; Roeder, G.; Öchsner, R.; Schöpka, U.; Kasko, I.
Journal Article
2010Effizienzoptimierung integrierter elektrischer Antriebssysteme für Hybrid- und Elektrofahrzeuge
Hofmann, M.; Eckardt, B.; März, M.; Frey, L.
Conference Paper
2010Einrichtung zur Versorgung eines Bordnetzes
März, M.; Eckardt, B.; Wenger, M.; Popov, J.
Patent
2010Highly sensitive wavefront sensor for visual inspection of bare and patterned silicon wafers
Lazareva, I.; Nutsch, A.; Schellenberger, M.; Pfitzner, L.; Frey, L.
Conference Paper
2010Impact of temperature increments on tunneling barrier height and effective electron mass for plasma nitrided thin SiO2 layer on a large wafer area
Aygun, G.; Roeder, G.; Erlbacher, T.; Wolf, M.; Schellenberger, M.; Pfitzner, L.
Journal Article
2010Integrierbare Bauelemente zur Erhöhung der Betriebssicherheit elektronischer Systemkomponenten im Automobil
Dorp, J. vom; Erlbacher, T.; Lorentz, V.; Bauer, A.J.; Ryssel, H.; Frey, L.
Conference Paper
2010Das letzte Wort
Lorentz, V.
Journal Article
2010Lossless average inductor current sensor for CMOS integrated DC-DC converters operating at high frequencies
Lorentz, V.R.H.; Berberich, S.E.; März, M.; Bauer, A.J.; Ryssel, H.; Poure, P.; Braun, F.
Journal Article
2010Photovoltage versus microprobe sheet resistance measurements on ultrashallow structures
Clarysse, T.; Moussa, A.; Parmentier, B.; Bogdanowicz, J.; Vandervorst, W.; Bender, H.; Pfeffer, M.; Schellenberger, M.; Nielsen, P.F.; Thorsteinsson, S.; Lin, R.; Petersen, D.
Journal Article
2010Virtual equipment engineering: A continuous simulation chain leveraging development of new semiconductor manufacturing equipment
Mattes, A.; Koitzsch, M.; Schellenberger, M.; Pfitzner, L.
Conference Paper
2010Virtual equipment engineering: A novel approach for the integrated development of semiconductor manufacturing equipment
Koitzsch, M.; Mattes, A.; Schellenberger, M.; Pfitzner, L.; Frey, L.
Conference Paper
2010Vorrichtung und Verfahren zum Erfassen eines Stromes in einer Spule
Lorentz, V.; Berberich, S.; März, M.
Patent
2010Yield model for estimation of yield impact of semiconductor manufacturing equipment
Nutsch, A.; Oechsner, R.; Schoepka, U.; Pfitzner, L.
Conference Paper
This publication list has been generated from the publication database Fraunhofer-Publica.