Nutzertreffen "Process control and -stabilization, robust processes"

Automation and fab-integration of legacy equipment
Gerhard Kleineidam, InReCon AG, Sinzing, Germany

Advantages of RGA in degas processes prior to PVD metallization on an AMAT Endura system
Andreas Priebe, Christian Bromberger, Atmel Germany GmbH, Heilbronn, Germany

Quick extraction of etch rate and etch rate non-uniformity from OEP signals
Manfred Engelhardt, Infineon Technologies, Munich, Germany