Publications Thin Film Devices and Systems

Jahr Year	Titel/Autor:in Title/Author	Publikationstyp Publication Type
2024	Adhesion strength of ductile thin film determined by cross-sectional nanoindentation Zhao, Dawei; Letz, Sebastian; Jank, Michael; März, Martin	Zeitschriftenaufsatz Journal Article
2024	Precise Compensation of Device Variability in IGZO‐based Ferroelectric Thin‐Film Transistors for Enhanced Transparent Display Performance Joch, Daniel; Lehninger, David; Sunil, Athira; Sanctis, Shawn; Lang, Thomas; Zeltner, Johannes; Wartenberg, Philipp; Seidel, Konrad; Jank, Michael	Zeitschriftenaufsatz Journal Article
2023	Intragranular thermal fatigue of Cu thin films: Near-grain boundary hardening, strain localization and voiding Hlushko, K.; Ziegelwanger, T.; Reisinger, M.; Todt, J.; Meindlhumer, M.; Beuer, Susanne; Rommel, Mathias; Greving, I.; Flenner, S.; Kopeček, J.; Keckes, J.; Detlefs, C.; Yildirim, C.	Zeitschriftenaufsatz Journal Article
2023	Tailoring the Acidity of Liquid Media with Ionizing Radiation: Rethinking the Acid-Base Correlation beyond pH Fritsch, Birk; Körner, Andreas; Couasnon, Thaïs; Blukis, Roberts; Taherkhani, Mehran; Benning, Liane G.; Jank, Michael; Spiecker, Erdmann; Hutzler, Andreas	Zeitschriftenaufsatz Journal Article
2022	Ultrathin and flexible sensors for pressure and temperature monitoring inside battery cells Dreher, Vincent; Joch, Daniel; Kren, Harald; Schwarberg, Jannik H.; Jank, Michael P.M.	Konferenzbeitrag Conference Paper
2022	Sub-Kelvin thermometry for evaluating the local temperature stability within in situ TEM gas cells Fritsch, Birk; Wu, Mingjian; Hutzler, Andreas; Zhou, Dan; Spruit, Ronald; Vogl, Lilian; Will, Johannes; Perez Garza, H. Hugo; März, Martin; Jank, Michael; Spiecker, Erdmann	Zeitschriftenaufsatz Journal Article
2022	Low-Temperature and UV Irradiation Effect on Transformation of Zirconia -MPS nBBs-Based Gels into Hybrid Transparent Dielectric Thin Films Musat, V.; Herbei, E.E.; Anghel, E.M.; Jank, Michael; Oertel, Susanne; Timpu, D.; Frangu, L.	Zeitschriftenaufsatz Journal Article
2021	From Cyclopentasilane to Thin-Film Transistors Gerwig, M.; Ali, A.S.; Neubert, D.; Polster, S.; Bohme, U.; Franze, G.; Rosenkranz, M.; Popov, A.; Ponomarev, I.; Jank, M.; Vieweger, C.; Brendler, E.; Frey, L.; Kroll, P.; Kroke, E.	Zeitschriftenaufsatz Journal Article
2021	A Fully Integrated Ferroelectric Thin-Film-Transistor - Influence of Device Scaling on Threshold Voltage Compensation in Displays Lehninger, D.; Ellinger, M.; Ali, T.; Li, S.; Mertens, K.; Lederer, M.; Olivio, R.; Kampfe, T.; Hanisch, N.; Biedermann, K.; Rudolph, M.; Brackmann, V.; Sanctis, C.; Jank, M.; Seidel, K.	Zeitschriftenaufsatz Journal Article
2020	A Method for the Characterization of Adhesion Strength Degradation of Thin Films on Si-Substrate under Thermal Cycling Test Zhao, Dawei; Letz, Sebastian; Schletz, Andreas; März, Martin	Konferenzbeitrag Conference Paper
2020	Combined experimental and numerical approach for investigating the mechanical degradation of the interface between thin film metallization and Si-substrate after temperature cycling test Zhao, Dawei; Letz, Sebastian; Yu, Zechun; Schletz, Andreas; März, Martin	Zeitschriftenaufsatz Journal Article
2020	Reducing On-Resistance for SiC Diodes by Thin Wafer and Laser Anneal Technology Rusch, Oleg; Hellinger, Carsten; Moult, Jonathan; Corcoran, Yunji; Erlbacher, Tobias	Konferenzbeitrag Conference Paper
2019	Reducing On-Resistance for SiC Diodes by Thin Wafer and Laser Anneal Technology Rusch, O.; Hellinger, C.; Moult, J.; Corcoran, Y.; Erlbacher, T.	Poster
2018	Flexible thin film bending sensor based on Bragg gratings in hybrid polymers Girschikofsky, Maiko; Rosenberger, Manuel; Förthner, Michael; Rommel, Mathias; Frey, Lothar; Hellmann, Ralf	Konferenzbeitrag Conference Paper
2017	Generalized approach to design multi-layer stacks for enhanced optical detectability of ultrathin layers Hutzler, Andreas; Matthus, Christian D.; Rommel, Mathias; Frey, Lothar	Zeitschriftenaufsatz Journal Article
2016	Materials integration for printed zinc oxide thin-film transistors: Engineering of a fully-printed semiconductor/contact scheme Liu, X.; Wegener, M.; Polster, S.; Jank, M.P.M.; Roosen, A.; Frey, L.	Zeitschriftenaufsatz Journal Article
2016	Ion implantation of polypropylene films for the manufacture of thin film capacitors Häublein, V.; Birnbaum, E.; Ryssel, H.; Frey, L.; Djupmyr, M.	Konferenzbeitrag Conference Paper
2016	Correlation of film morphology and defect content with the charge-carrier transport in thin-film transistors based on ZnO nanoparticles Polster, S.; Jank, M.P.M.; Frey, L.	Zeitschriftenaufsatz Journal Article
2016	Contamination control for wafer container used within 300 mm manufacturing for power microelectronics Schneider, G.; Nguyen, T.Q.; Taubert, M.; Bounouar, J.; Le-Guet, C.; Leibold, A.; Richter, H.; Pfeffer, M.	Konferenzbeitrag Conference Paper
2015	Thin film metallization of PDMS with improved adhesion properties for micro electrode arrays Scharin, Marina; Newcomer, Kate; Dirnecker, Tobias; Al-Naimi, A.; Rumler, Maximilian; Rommel, Mathias; Frey, Lothar	Poster
2015	Thin film metallization of PDMS with improved adhesion properties for micro electrode arrays Scharin, Marina; Newcomer, Kate; Al-Naimi, Abd; Dirnecker, Tobias; Rumler, Maximilian; Rommel, Mathias; Frey, Lothar	Poster
2015	In situ formation of tantalum oxide - PMMA hybrid dielectric thin films for transparent electronic application Valcu, E.E.; Musat, V.; Oertel, S.; Jank, M.P.M.; Leedham, T.	Zeitschriftenaufsatz Journal Article
2014	High-mobility metal-oxide thin-film transistors by spray deposition of environmentally friendly precursors Oertel, S.; Jank, M.P.M.; Teuber, E.; Bauer, A.J.; Frey, L.	Konferenzbeitrag Conference Paper
2014	Modification of polypropylene films for thin film capacitors by ion implantation Häublein, V.; Birnbaum, E.; Ryssel, H.; Frey, L.; Grimm, W.	Konferenzbeitrag Conference Paper
2014	Bioactivation of plane and patterned PDMS thin films by wettability engineering Scharin, Marina; Rommel, Mathias; Dirnecker, Tobias; Marhenke, Julius; Herrmann, Benjamin; Rumler, Maximilian; Fader, Robert; Frey, Lothar; Herrmann, Martin	Zeitschriftenaufsatz Journal Article
2014	Optical characterization of patterned thin films Rosu, D.; Petrik, P.; Rattmann, G.; Schellenberger, M.; Beck, U.; Hertwig, A.	Zeitschriftenaufsatz Journal Article
2014	Sol-gel preparation of ZrO2-PMMA for thin films transistors Valcu, E.E.; Musat, V.; Jank, M.; Oertel, S.	Zeitschriftenaufsatz Journal Article
2013	In situ ATR monitoring of cross-link and diffusion behavior of thin-film epoxy and sol-gel based imprint resists Verschuuren, Marc; Fader, Robert; Brakel, Remco van; Hurxkens, Gert-Jan	Poster
2013	Comparative measurements on atomic layer deposited Al2O3 thin films using ex situ table top and mapping ellipsometry, as well as X-ray and VUV reflectometry Petrik, P.; Gumprecht, T.; Nutsch, A.; Roeder, G.; Lemberger, M.; Juhasz, G.; Polgar, O.; Major, C.; Kozma, P.; Janosov, M.; Fodor, B.; Agocs, E.; Fried, M.	Zeitschriftenaufsatz Journal Article
2013	Surface modification of flexible plain and microstructured hard and soft PDMS-thin films by plasma treatment and layer deposition for improved usability for biomedical applications Scharin, Marina; Rommel, Mathias; Dirnecker, Tobias; Rumler, Maximilian; Fader, Robert; Bauer, A.J.; Frey, Lothar; Hermman, Martin	Poster
2013	Complementary methodologies for thin film characterization in one tool - A novel instrument for 450 mm wafers Holfelder, I.; Beckhoff, B.; Fliegauf, R.; Honicke, P.; Nutsch, A.; Petrik, P.; Roeder, G.; Weser, J.	Zeitschriftenaufsatz Journal Article
2013	Characterization of thin ZnO films by vacuum ultra-violet reflectometry Gumprecht, T.; Petrik, P.; Roeder, G.; Schellenberger, M.; Pfitzner, L.; Pollakowski, B.; Beckhoff, B.	Konferenzbeitrag Conference Paper
2013	Laser melting of nanoparticulate transparent conductive oxide thin films Baum, M.; Polster, S.; Jank, M.P.M.; Alexeev, I.; Frey, L.; Schmidt, M.	Zeitschriftenaufsatz Journal Article
2012	Measurement strategy for dielectric ultra-thin film characterization by vacuum ultra-violet reflectometry Gumprecht, T.; Roeder, G.; Schellenberger, M.; Pfitzner, L.	Konferenzbeitrag Conference Paper
2012	Optical thin film metrology for optoelectronics Petrik, P.	Zeitschriftenaufsatz Journal Article
2012	Efficient laser induced consolidation of nanoparticulate ZnO thin films with reduced thermal budget Baum, M.; Polster, S.; Jank, M.P.M.; Alexeev, I.; Frey, L.; Schmidt, M.	Zeitschriftenaufsatz Journal Article
2011	Innovations in structured thin film design and fabrication for optical applications Qi, H.; Wang, J.; Erdmann, A.; Jin, Y.; Shao, J.; Fan, Z.	Konferenzbeitrag Conference Paper
2011	Electrical and structural properties of ultrathin SiON films on Si prepared by plasma nitridation Hourdakis, E.; Nassiopoulou, A.G.; Parisini, A.; Reading, M.A.; Berg, J.A. van den; Sygellou, L.; Ladas, S.; Petrik, P.; Nutsch, A.; Wolf, M.; Roeder, G.	Zeitschriftenaufsatz Journal Article
2011	Current voltage characteristics through grains and grain boundaries of high-k dielectric thin films measured by tunneling atomic force microscopy Murakami, K.; Rommel, Mathias; Yanev, V.; Bauer, A.J.; Frey, L.	Poster
2011	Amorphous silicon carbide thin films (a-SiC:H) deposited by plasma-enhanced chemical vapor deposition as protective coatings for harsh environment applications Daves, W.; Krauss, A.; Behnel, N.; Haublein, V.; Bauer, A.; Frey, L.	Zeitschriftenaufsatz Journal Article
2011	Current voltage characteristics through grains and grain boundaries of high-k dielectric thin films measured by tunneling atomic force microscopy Murakami, Katsuhisa; Rommel, Mathias; Yanev, Vasil; Bauer, A.J.; Frey, Lothar	Konferenzbeitrag Conference Paper
2011	Characterization of thickness variations of thin dielectric layers at the nanoscale using scanning capacitance microscopy Yanev, V.; Rommel, M.; Bauer, A.J.; Frey, L.	Zeitschriftenaufsatz Journal Article
2011	Conduction mechanisms and environmental sensitivity of solution-processed silicon nanoparticle layers for thin-film transistors Weis, S.; Körmer, R.; Jank, M.P.M.; Lemberger, M.; Otto, M.; Ryssel, H.; Peukert, W.; Frey, L.	Zeitschriftenaufsatz Journal Article
2011	Using DES for RoI calculations within semiconductor manufacturing Merhof, Jochen; Lebrecht, Holger; Michl, Markus; Koitzsch, Matthias; Franke, Jörg	Vortrag Presentation
2011	An X-ray photoelectron spectroscopy study of ultra-thin oxynitride films Ladas, S.; Sygellou, L.; Kennou, S.; Wolf, M.; Roeder, G.; Nutsch, A.; Rambach, M.; Lerch, W.	Zeitschriftenaufsatz Journal Article
2010	Simulation of optical waves in thin-film solar cells Pflaum, C.; Rahimi, Z.; Jandl, C.	Konferenzbeitrag Conference Paper
2010	Impact of temperature increments on tunneling barrier height and effective electron mass for plasma nitrided thin SiO2 layer on a large wafer area Aygun, G.; Roeder, G.; Erlbacher, T.; Wolf, M.; Schellenberger, M.; Pfitzner, L.	Zeitschriftenaufsatz Journal Article
2010	Analysis of NbN thin film deposition by plasma-enhanced ALD for gate electrode application Hinz, J.; Bauer, A.J.; Frey, L.	Zeitschriftenaufsatz Journal Article
2010	Guided phase separation of polymer blend thin films on ion beam-induced pre-patterned substrates Karade, Y.; Madani-Grasset, F.; Berger, R.; Csiba, V.; Rommel, M.; Dietzel, A.	Zeitschriftenaufsatz Journal Article
2010	Characterization of thickness variations of thin dielectric layers at a nanoscale using Scanning Capacitance Microscopy Yanev, V.; Rommel, Mathias; Bauer, A.J.; Frey, L.	Poster
2010	Evaluation of NbN thin films grown by MOCVD and plasma-enhanced ALD for gate electrode application in high-k/SiO2 gate stacks Hinz, J.; Bauer, A.J.; Thiede, T.; Fischer, R.A.; Frey, L.	Zeitschriftenaufsatz Journal Article
2009	Influence of N2 and NH3 annealing on the nitrogen incorporation and k-value of thin ZrO2 layers Weinreich, W.; Ignatova, V.A.; Wilde, L.; Teichert, S.; Lemberger, M.; Bauer, A.J.; Reiche, R.; Erben, E.; Heitmann, J.; Oberbeck, L.; Schröder, U.	Zeitschriftenaufsatz Journal Article
2009	Correlation of microscopic and macroscopic electrical characteristics of high-k ZrSixO2-x thin films using tunneling atomic force microscopy Weinreich, W.; Wilde, L.; Kücher, P.; Lemberger, M.; Yanev, V.; Rommel, M.; Bauer, A.J.; Erben, E.; Heitmann, J.; Schröder, U.; Oberbeck, L.	Konferenzbeitrag Conference Paper
2009	Properties of TaN thin films produced using PVD linear dynamic deposition technique Kozlowska, M.; Oechsner, R.; Pfeffer, M.; Bauer, A.J.; Meissner, E.; Pfitzner, L.; Ryssel, H.; Maass, W.; Langer, J.; Ocker, B.; Schmidbauer, S.; Gonchond, J.-P.	Zeitschriftenaufsatz Journal Article
2009	Complementary metrology within a European joint laboratory Nutsch, A.; Beckhoff, B.; Altmann, R.; Berg, J.A. van den; Giubertoni, D.; Hoenicke, P.; Bersani, M.; Leibold, A.; Meirer, F.; Müller, M.; Pepponi, G.; Otto, M.; Petrik, P.; Reading, M.; Pfitzner, L.; Ryssel, H.	Konferenzbeitrag Conference Paper
2009	Deposition of niobium nitride thin films from Tert-Butylamido-Tris-(Diethylamido)-Niobium by a modified industrial MOCVD reactor Thiede, T.B.; Parala, H.; Reuter, K.; Passing, G.; Kirchmeyer, S.; Hinz, J.; Lemberger, M.; Bauer, A.J.; Barreca, D.; Gasparotto, A.; Fischer, R.A.	Zeitschriftenaufsatz Journal Article
2009	Extraordinary low transmission effects for ultra-thin patterned metal films Reibold, D.; Shao, F.; Erdmann, A.; Peschel, U.	Zeitschriftenaufsatz Journal Article
2008	Characterization of Ru and RuO2 thin films prepared by pulsed metal organic chemical vapor deposition Roeder, G.; Manke, C.; Baumann, P.K.; Petersen, S.; Yanev, V.; Gschwandtner, A.; Ruhl, G.; Petrik, P.; Schellenberger, M.; Pfitzner, L.; Ryssel, H.	Konferenzbeitrag Conference Paper
2008	Tunneling atomic-force microscopy as a highly sensitive mapping tool for the characterization of film morphology in thin high-k dielectrics Yanev, V.; Rommel, M.; Lemberger, M.; Petersen, S.; Amon, B.; Erlbacher, T.; Bauer, A.J.; Ryssel, H.; Paskalev, A.; Weinreich, W.; Fachmann, C.; Heitmann, J.; Schroeder, U.	Zeitschriftenaufsatz Journal Article
2008	Effects of X-ray radiation on the surface chemical composition of plasma deposited thin fluorocarbon films Himmerlich, M.; Yanev, V.; Opitz, A.; Keppler, A.; Schäfer, J.A.; Krischok, S.	Zeitschriftenaufsatz Journal Article
2007	Verification of grain boundaries in annealed thin ZrO2 films by electrical AFM technique Yanev, V.; Paskaleva, A.; Weinreich, W.; Lemberger, M.; Petersen, S.; Rommel, Mathias; Bauer, A.J.; Ryssel, H.	Poster
2007	Stress induced leakage current mechanism in thin Hf-silicate layers Paskaleva, A.; Lemberger, M.; Bauer, A.J.	Zeitschriftenaufsatz Journal Article
2007	Thermal stability of thin ALD ZrO2 layers as dielectrics in deep trench DRAM devices annealed in N2 and NH3 Weinreich, W.; Lemberger, M.; Erben, E.; Heitmann, J.; Wilde, L.; Ignatova, V.A.; Teichert, S.; Schröder, U.; Oberbeck, L.; Bauer, A.J.; Ryssel, H.; Kücher, P.	Poster
2007	MOCVD of tantalum nitride thin films from TBTEMT single source precursor as metal electrodes in CMOS applications Lemberger, M.; Thiemann, S.; Baunemann, A.; Parala, H.; Fischer, R.A.; Hinz, J.; Bauer, A.J.; Ryssel, H.	Konferenzbeitrag Conference Paper
2007	Polarity asymmetry of stress and charge trapping behavior of thin Hf- and Zr-silicate layers Paskaleva, A.; Lemberger, M.; Bauer, A.J.	Zeitschriftenaufsatz Journal Article
2006	Stress induced leakage currents and charge trapping in thin Zr- and Hf-silicate layers Paskaleva, A.; Lemberger, M.; Bauer, A.J.	Konferenzbeitrag Conference Paper
2006	Correlation between defects, leakage currents and conduction mechanisms in thin high-k dielectric layers Paskaleva, A.; Atanassova, E.; Lemberger, M.; Bauer, A.J.	Konferenzbeitrag Conference Paper
2006	Optical and X-ray characterization of ferroelectric strontium-bismuth-tantalate (SBT) thin films Fried, M.; Petrik, P.; Horvath, Z.E.; Lohner, T.; Schmidt, C.; Schneider, C.; Ryssel, H.	Konferenzbeitrag Conference Paper
2005	MOCVD of cunductive cubic HfN thin films from Hf(NR2)4 and N,N-dimethylhydrazine Kim, Y.; Parala, H.; Bauer, A.J.; Lemberger, M.; Baunemann, A.; Fischer, R.A.	Konferenzbeitrag Conference Paper
2005	An asymmetry of conduction mechanisms and charge trapping in thin high-k Hf(x)Ti(y)Si(z)O films Paskaleva, A.; Bauer, A.J.; Lemberger, M.	Zeitschriftenaufsatz Journal Article
2005	Conduction mechanisms and an evidence for phonon-assisted conduction process in thin high-k Hf(x)Ti(y)Si(z)O films Paskaleva, A.; Bauer, A.; Lemberger, M.	Zeitschriftenaufsatz Journal Article
2005	Thin Hf(x)Ti(y)Si(z)O films with varying Hf to Ti contents as candidates for high-k dielectrics Bauer, A.J.; Paskaleva, A.; Lemberger, M.; Frey, L.; Ryssel, H.	Konferenzbeitrag Conference Paper
2005	MOCVD of conductive cubic HfN thin films from Hf(NR2)4 and N,N-dimethylhydrazine Kim, Y.; Parala, H.; Bauer, A.J.; Lemberger, M.; Baunemann, A.; Fischer, R.A.	Konferenzbeitrag Conference Paper
2004	Optical characterization of ferroelectric Strontium-Bismuth-Tantalate (SBT) thin films Schmidt, C.; Petrik, P.; Schneider, C.; Fried, M.; Lohner, T.; Barsony, I.; Gyulai, J.; Ryssel, H.	Konferenzbeitrag Conference Paper
2004	Different current conduction mechanisms through thin high-k Hf(x)Ti(y)Si(z)O films due to the varying Hf to Ti ratio Paskaleva, A.; Bauer, A.J.; Lemberger, M.; Zurcher, S.	Zeitschriftenaufsatz Journal Article
2003	Investigation of implantation-induced defects in thin gate oxides using low field tunnel currents Jank, M.; Frey, L.; Bauer, A.J.; Ryssel, H.	Konferenzbeitrag Conference Paper
2001	Electrical reliability aspects of through the gate implanted MOS-structures with thin oxides Jank, M.; Lemberger, M.; Bauer, A.J.; Frey, L.; Ryssel, H.	Zeitschriftenaufsatz Journal Article
2001	Reliability of ultra-thin N2O-nitrided oxides grown by RTP under low-pressure in different gas atmospheres Beichele, M.; Bauer, A.J.; Herden, M.; Ryssel, H.	Zeitschriftenaufsatz Journal Article
2001	Suppression of boron penetration through thin gate oxides by nitrogen implantation into the gate electrode Herden, M.; Bauer, A.J.; Beichele, M.; Ryssel, H.	Zeitschriftenaufsatz Journal Article
2001	Reliability of ultrathin nitrided oxides grown in low- pressure N2O ambient Beichele, M.; Bauer, A.J.; Ryssel, H.	Zeitschriftenaufsatz Journal Article
2001	Suppression of boron penetration through thin gate oxides by nitrogen implantation into the gate electrode in PMOS devices Strobel, S.; Bauer, A.J.; Beichele, M.; Ryssel, H.	Zeitschriftenaufsatz Journal Article
2000	Charge-state dependence of stopping power for light ions penetrating thin carbon foils at low velocity Mu, Y.G.; Burenkov, A.; Ryssel, H.; Xia, Y.Y.; Mei, L.M.	Zeitschriftenaufsatz Journal Article
2000	Gate oxide damage due to through the gate implantation in MOS-structures with ultrathin and standard oxides Jank, M.P.M.; Lemberger, M.; Frey, L.; Ryssel, H.	Konferenzbeitrag Conference Paper
2000	Reliability of ultra-thin N2O-nitrided oxides grown by RTP under low pressure and in different gas atmospheres Beichele, M.; Bauer, A.J.; Ryssel, H.	Zeitschriftenaufsatz Journal Article
2000	Suppression of boron penetration through thin gate oxides by nitrogen implantation into the gate electrode of PMOS devices Herden, M.; Bauer, A.J.; Ryssel, H.	Zeitschriftenaufsatz Journal Article
2000	Charge state dependence of stopping power for light ions penetrating thin carbon foils at low velocity Mu, Y.; Burenkov, A.; Ryssel, H.; Xia, Y.; Mei, L.	Zeitschriftenaufsatz Journal Article
1999	Nondestructive analytical tools for characterization of thin titanium silicide films prepared by conventional and direct step silicidation with enhanced transition Kal, S.; Ryssel, H.	Zeitschriftenaufsatz Journal Article
1999	Thin stoichiometric silicon nitride prepared by r.f. reactive sputtering Qian, F.; Temmel, G.; Schnupp, R.; Ryssel, H.	Zeitschriftenaufsatz Journal Article
1999	Nondestructive analytical tools for characterization of thin titanium silicide films prepared by conventional and direct step silicidation with enhanced transition Kal, S.; Ryssel, H.	Zeitschriftenaufsatz Journal Article
1999	MOCVD of ferroelectric thin films Schmidt, C.; Lehnert, W.; Leistner, T.; Frey, L.; Ryssel, H.	Zeitschriftenaufsatz Journal Article
1999	Reliability of ultra-thin gate oxides grown in low-pressure N20 ambient or on nitrogen-implanted silicon Bauer, A.J.; Beichele; Herden, M.; Ryssel, H.	Zeitschriftenaufsatz Journal Article
1998	Thin carbon films as elctrodes for bioelectronic applications Schnupp, R.; Kühnhold, R.; Temmel, G.; Burte, E.; Ryssel, H.	Zeitschriftenaufsatz Journal Article
1998	Noncontacting measurement of thickness of thin titanium silicide films using spectroscopic ellipsometry Kal, S.; Kasko, I.; Ryssel, H.	Zeitschriftenaufsatz Journal Article
1997	MOCVD of ferroelectric thin films Schmidt, C.; Burte, E.P.	Konferenzbeitrag Conference Paper
1997	Characterization of thin TiSi2 films by spectroscopic ellipsometry and thermal wave analysis Kasko, I.; Kal, S.; Ryssel, H.	Zeitschriftenaufsatz Journal Article
1997	Characterization of ultrathin on stacked layers consisting of thermally grown bottom oxide and deposited silicon nitride Bauer, A.J.; Burte, E.P.; Ryssel, H.	Zeitschriftenaufsatz Journal Article
1996	Characterization of ultrathin on stacked layers consisting of thermally grown bottom oxide and deposited silicon nitride Bauer, A.J.; Burte, E.P.; Ryssel, H.	Zeitschriftenaufsatz Journal Article
1995	Low pressure chemical vapour depostition of tantalum pentoxide thin layers Burte, E.P.; Rausch, N.	Zeitschriftenaufsatz Journal Article
1995	Ion-beam mixed ultra-thin cobalt silicide (CoSi2) films by cobalt sputtering and rapid thermal annealing Kal, S.; Kasko, I.; Ryssel, H.	Zeitschriftenaufsatz Journal Article
1995	Structural and electrical properties of thin SiO2 layers grown by RTP in a mixture of N2O and O2 Bauer, A.J.; Burte, E.P.	Zeitschriftenaufsatz Journal Article

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