Structure Simulation

Simulation of Structures for Semiconductor Technology and other Applications

We work on the development and application of simulation programs on structures of different kinds: Such structures are for instance microelectronic devices or interconnects, the related manufacturing equipment, or macroscopic structures such as those included in power electronic systems.

For our simulations we use commercial software, open-source tools, and in-house software modules. Our activities include:

■  Process modeling
   - dry etching processes
   - plasma-based, chemical, and physical deposition processes

■  Coupling of feature-scale and equipment-scale simulation for thermal and plasma reactors

■  Electrical, thermal, and mechanical simulation, e.g., for determining performance and reliability of structures

■  Application in various fields from nanostructures to power electronic systems
 

 

Simulation of Self-aligned Double Patterning

 

Modeling of Block Copolymer Dry Etching

 

Equipment Simulation

 

SUPERAID7

H2020 Project SUPERAID7:

Stability Under Process Variability for Advanced Interconnects and Devices Beyond 7 nm Node

 

Etching Simulator ANETCH

 

Deposition Simulator DEP3D

 

Publications Structure Simulation