Structure Simulation

We work on the development and application of simulation programs on structures of different kinds: Such structures are for instance microelectronic devices or interconnects, the related manufacturing equipment, or macroscopic structures such as those relevant to power electronic systems. Our simulations address the manufacturing processes as well as the operation of the structures with respect to electrical, thermal and mechanical behavior.

Selected Projects


Publications Structure Simulation


Modeling of Block Copolymer Dry Etching


Equipment Simulation


Advanced Simulation of Losses in Litz Wire Systems


Etching Simulator ANETCH