»Flying Cubes« for Fast and Contamination-free FIB Cross-sections in Wafer Manufacturing
Small cube, big impact: our colleague Susanne Beuer from our Front End Department has developed a practical solution for quality and process control in semiconductor technology production. For her work, Susanne has now been honored with the IISB R&D Award.
The silicon cubes provide a novel, fast and contamination-free preparation method for all standard focused ion beam systems (FIB). In the conventional process, a protective platinum layer is first applied to the wafer in a costly and contaminating manner. With the Flying Cubes, this additional layer is no longer required, resulting in a saving of up to 90 % of preparation time, higher SEM image quality, less destruction and minimal waste.
Susanne has shown how inventiveness and endurance can be turned into a truly innovative product. Her journey from idea to the grant of a German patent, along with three ongoing applications in the United States, Japan, and China, is currently being supported by Fraunhofer AHEAD.
Curious? Learn more about the amazing »Flying Cubes«.
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