Fraunhofer Institute for Integrated Systems and Device Technology IISBWe support the development of high-temperature equipment and processes by our expertise in numerical modeling of heat and mass transport phenomena. Specific expertise is available for crystal growth and epitaxial processes. We are also experienced with other thermal processes like e.g. wafer annealing. We elaborate solutions for furnace modifications in order to optimize the systems for the respective application and we give new insights into the processes, especially for parameters that are hardly accessible via measuring techniques like species distributions or convection pattern.
© Kurt Fuchs / Fraunhofer IISB
Equipment Simulation
Global simulation of a Czochralski puller
3D electromagnetic field simulation of the heater arrangement of a DS furnace
3D CFD model of the SiC CVD epi process
Services
- Thermal simulations (conduction, convection, radiation)
- Flow simulations (gas, melt, turbulence including magnetohydrodynamics)
- Stress simulations
- Electromagnetic field simulations
- Simulation of species transport including chemical reactions
- Software tools: CrysMAS, OpenFOAM, Ansys
- Processes: Cz, VGF, DS, FZ, EFG, LPE, THM, CVD, PVT, HVPE, annealing
- Materials: Si, Ge, GaAs, InP, GaN, AlN, SiC, CdZnTe, halides, oxides
